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    • 2. 发明授权
    • Apparatus for analyzing a silicon compound gas for siloxane content
    • 硅化合物气体分析硅氧烷含量的装置
    • US5952557A
    • 1999-09-14
    • US115541
    • 1998-07-15
    • Takuya IkedaToyohiko Abe
    • Takuya IkedaToyohiko Abe
    • B01D53/04G01N1/34G01N33/00H01J49/04G01N30/04G01N7/00G01N31/12E03B31/00
    • G01N1/405G01N33/0016H01J49/0422H01J49/049B01D2253/106B01D2257/70B01D53/0423B01D53/0438G01N2033/0095Y10T137/86863
    • The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
    • 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 除去塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.在活化后,将除去塔冷却至60℃的温度,在该温度下将硅 诸如硅烷的复合气体S通过压力调节器5和入口阀6进入去除塔2,以便与活化的硅藻土M接触。结果,已经纯化的高纯度硅化合物气体 通过除去硅氧烷通过排气管9排出,从该出口阀9将其通过出口阀8输送到使用区域。
    • 3. 发明授权
    • Method of removing siloxanes from silicon compound gases and apparatus
therefor
    • 从硅化合物气体中除去硅氧烷的方法及其设备
    • US5900532A
    • 1999-05-04
    • US15780
    • 1998-01-29
    • Takuya IkedaToyohiko Abe
    • Takuya IkedaToyohiko Abe
    • B01D53/04G01N1/34G01N33/00H01J49/04G01N1/00B01D53/02
    • G01N1/405G01N33/0016H01J49/0422H01J49/049B01D2253/106B01D2257/70B01D53/0423B01D53/0438G01N2033/0095Y10T137/86863
    • The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0.degree. C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
    • 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 除去塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.在活化后,将除去塔冷却至60℃的温度,在该温度下将硅 诸如硅烷的复合气体S通过压力调节器5和入口阀6进入去除塔2,以便与活化的硅藻土M接触。结果,已经纯化的高纯度硅化合物气体 通过除去硅氧烷通过排气管9排出,从该出口阀9将其通过出口阀8输送到使用区域。
    • 5. 发明授权
    • Positive photosensitive polyimide resin composition comprising an
o-quinone diazide as a photosensitive compound
    • 包含邻醌二叠氮化合物作为光敏化合物的正光敏聚酰亚胺树脂组合物
    • US5288588A
    • 1994-02-22
    • US983605
    • 1992-11-30
    • Masahiko YukawaToyohiko AbeNoriaki Kohtoh
    • Masahiko YukawaToyohiko AbeNoriaki Kohtoh
    • C08G73/10G03F7/023G03F7/32
    • G03F7/0233C08G73/1042Y10S430/106
    • A positive photosensitive polyimide resin composition which comprises 100 parts by weight of an organic solvent-soluble polyimide resin and 1-100 parts by weight of an .omicron.-quinonediazide compound, said polyimide resin being composed of the repeating units represented by formulas [I] and [II] below ##STR1## (where R.sub.1 is a divalent organic group to constitute a diamine which has one or more groups of at least one kind selected from the group consisting of phenolic hydroxyl group, carboxyl group, thiophenol group, and sulfonic group; R.sub.3 is a divalent organic group having no phenolic hydroxyl group, carboxyl group, thiophenol group, and sulfonic group; and R.sub.2 and R.sub.4 each are a tetravalent organic group constituting a-tetracarboxylic acid and a derivative thereof when R.sub.1 has one or more groups of at least one kind selected from the group consisting of carboxyl group and sulfonic group and has no phenolic hydroxyl group and thiophenol group, or R.sub.2 and R.sub.4 each are a tetravalent organic group constituting a tetracarboxylic acid and a derivative thereof composed of four carbonyl groups which are not attached directly to the aromatic ring when R.sub.1 has a phenolic hydroxyl group and/or thiophenol group) with the molar percentage (a) of the repeating units represented by formula [I] being in the range of 1 mol %.ltoreq.a.ltoreq.90 mol % and the molar percentage (b) of the repeating units represented by formula [II] being in the range of 10 mol % .ltoreq.b.ltoreq.99 mol %, and having a reduced viscosity of 0.05-3.0 dl/g (measured at a concentration of 0.5 g/l in N-methylpyrrolidone at 30.degree. C.).
    • 一种正型感光性聚酰亚胺树脂组合物,其包含100重量份的有机溶剂可溶性聚酰亚胺树脂和1-100重量份的(ü) - 醌二叠氮化合物,所述聚酰亚胺树脂由式(I)表示的重复单元 )和(II)(*化学结构*)(I)(*化学结构*)(II)(其中R1是构成二胺的二价有机基团,其具有一个或多个选自以下的至少一种基团: 由酚羟基,羧基,苯硫酚基和磺酸基组成的组; R3是不含酚羟基,羧基,苯硫酚基和磺酸基的二价有机基团; R2和R4各自是构成四价有机基团 α-四羧酸及其衍生物,当R1具有一个或多个选自羧基和磺酸基中并且不具有酚羟基和苯硫酚g的至少一种基团时, 或R 2和R 4各自为构成四羧酸的四价有机基团及其衍生物,其中,当R 1具有酚羟基和/或苯硫酚基团时,其不具有直接连接到芳环上的四个羰基) 由式(I)表示的重复单元的百分比(a)在1摩尔%<= a <= 90摩尔%的范围内,由式(II)表示的重复单元的摩尔百分数(b)在 范围为10摩尔%<= b <= 99摩尔%,并且具有0.05-3.0dl / g的比浓粘度(在N-甲基吡咯烷酮中在30℃下以0.5g / l的浓度测量)。
    • 10. 发明授权
    • Method of removing siloxanes from silicon compound gases and apparatus therefor, and siloxane content analyzing method and analyzing apparatus
    • 从硅化合物气体中除去硅氧烷的方法及其设备,以及硅氧烷含量分析方法和分析装置
    • US06196050B1
    • 2001-03-06
    • US09217992
    • 1998-12-22
    • Takuya IkedaToyohiko Abe
    • Takuya IkedaToyohiko Abe
    • G01N1910
    • G01N1/405B01D53/0423B01D53/0438B01D2253/106B01D2257/70G01N33/0016G01N2033/0095H01J49/0422H01J49/049Y10T137/86863
    • The present invention enables siloxanes which have a detrimental effect on the quality of products during semiconductor production to be efficiently removed from silicon compound gases, and enables minute amounts of siloxanes in these gases to be accurately measured to a few ppb, thus allowing for improvements in quality control by offering silicon compound gases of high purity. Diatomaceous earth M filled into a removal column 2 is heated by heating means provided on the removal column 2, while an inert gas such as nitrogen or helium is fed from an inert gas delivery pipe 13 via a pressure regulator 5 and an entry valve 6 into the removal-column 2, and is allowed to flow out through an outlet valve 8 in order to thermally activate the diatomaceous earth M. After activation, the removal column is cooled to a temperature of 60-0° C., at which temperature a silicon compound gas S such as silane is fed through the pressure regulator 5 and the entry valve 6 into the removal column 2 so as to come into contact with the activated diatomaceous earth M. As a result, high-purity silicon compound gas which has been purified by removing siloxanes is let out through a gas vent pipe 9, from which it can be delivered through the outlet valve 8 to an area of use.
    • 本发明使得可以有效地从硅化合物气体中除去在半导体生产过程中对产品质量产生不利影响的硅氧烷,并且能够将这些气体中的微量硅氧烷精确地测量到几ppb,从而允许改进 提供高纯度硅复合气体的质量控制。 填充到除去塔2中的硅藻土M由设置在除去塔2上的加热装置加热,同时惰性气体例如氮气或氦气通过压力调节器5和入口阀6从惰性气体输送管13供入到 去除塔2,并且允许其通过出口阀8流出,以热活化硅藻土M.活化后,将除去塔冷却至60℃的温度,在此温度下 诸如硅烷的硅化合物气体S通过压力调节器5和进入阀6进入去除塔2中以与活化的硅藻土M接触。结果,已经将高纯度硅化合物气体 通过除去硅氧烷净化出来,通过排气管9排出,通过出口阀8将其从输送阀8输送到使用区域。