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    • 9. 发明申请
    • SUBSTRATE PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS
    • 基板加工方法和基板加工装置
    • US20110065288A1
    • 2011-03-17
    • US12857942
    • 2010-08-17
    • Toru HARADAMasayoshi MINAMI
    • Toru HARADAMasayoshi MINAMI
    • H01L21/318F27D11/00
    • F27B17/0025H01L21/02164H01L21/02222H01L21/02323H01L21/02337H01L21/31058H01L21/3125H01L21/316H01L21/67109
    • Provided is a substrate processing method comprising: loading a substrate, on which polysilazane is applied, into a substrate process chamber; maintaining an inside of the substrate process chamber, into which the substrate is loaded, in water vapor atmosphere and depressurization atmosphere at a temperature of 400° C.; performing a first heat treatment process on the substrate in a state where the inside of the substrate process chamber is maintained in the water vapor atmosphere and the depressurization atmosphere at the temperature of 400° C.; next, increasing an inner temperature of the substrate process chamber from the temperature of 400° C. in the first heat treatment process to a temperature ranging from 900° C. to 1000° C.; and performing a second heat treatment process on the substrate in a state where the inside of the substrate process chamber is maintained in water vapor atmosphere and depressurization atmosphere at the temperature ranging from 900° C. to 1000° C.
    • 提供了一种基板处理方法,其包括:将其上施加有聚硅氮烷的基板加载到基板处理室中; 在400℃的温度下在水蒸汽气氛和减压气氛中保持衬底处理室的内部,衬底处理室内装载衬底处理室。 在基板处理室的内部保持在水蒸气气氛和400℃的减压气氛的状态下对基板进行第一热处理工序; 接下来,在第一热处理过程中将衬底处理室的内部温度从400℃升高到900℃至1000℃的温度; 在基板处理室的内部保持在水蒸汽气氛和在900℃〜1000℃的温度下的减压气氛的状态下对基板进行第二热处理工序。
    • 10. 发明授权
    • Information processing apparatus, image forming apparatus, and electronic data movement canceling method
    • 信息处理装置,图像形成装置和电子数据移动取消方法
    • US07703143B2
    • 2010-04-20
    • US11009415
    • 2004-12-13
    • Toru HaradaHiroyuki Kimbara
    • Toru HaradaHiroyuki Kimbara
    • G06F7/04
    • G06F21/10G06Q20/3674G06Q20/4012
    • An information processing apparatus deleting, from a second recording medium, a copy of electronic data once recorded in the second recording medium, an original of the electronic data being recorded in a first recording medium different from the second recording medium, includes: an electronic data deleting part deleting the copy of the electronic data from the second recording medium, which copy can be used when authentication is succeeded in based on medium identification information which is prepared for identifying the first recording medium; an electronic data validating part validating the electronic data once invalidated when the copy of the electronic data was created in the second recording medium; and a medium identification information deleting part deleting the medium identification information of the first recording medium which was recorded in a predetermined storage area when the copy was created in the second recording medium.
    • 一种信息处理设备,从第二记录介质中删除一旦记录在第二记录介质中的电子数据的副本,正在记录在与第二记录介质不同的第一记录介质中的电子数据的原件包括:电子数据 删除从第二记录介质删除电子数据的副本的部分,根据准备用于识别第一记录介质的介质识别信息,可以在认证成功时使用该副本; 当在第二记录介质中创建电子数据的副本时,电子数据验证部分验证电子数据一旦无效; 以及介质识别信息删除部分,当在第二记录介质中创建拷贝时,删除记录在预定存储区域中的第一记录介质的介质标识信息。