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    • 4. 发明申请
    • Light-Emitting Diode Fabrication Method
    • 发光二极管制造方法
    • US20160149073A1
    • 2016-05-26
    • US14750145
    • 2015-06-25
    • TIANJIN SANAN OPTOELECTRONICS CO., LTD.
    • LI-MING SHUDONG-YAN ZHANGXIAO-FENG LIUZHI-BIN LIULIANG-JUN WANGDU-XIANG WANG
    • H01L33/06H01L33/24H01L33/14H01L33/00H01L33/32
    • H01L33/06H01L33/007H01L33/145H01L33/24H01L33/32
    • A method of fabricating a light-emitting diode includes: proving a substrate; forming an N-type layer, a low-temperature AlxInyGa1−x−yN (0≦x≦1, 0≦y≦1, x and y cannot both be zero at the same time) layer, a multiple quantum-well active region, an AlzGa1−zN (0≦z≦1) electron blocking layer, an AlxInyGa1−x−yN (0≦x≦1, 0≦y≦1) separation layer and a P-type layer over the substrate in successive; before growth of the multiple quantum-well active region, growing a low-temperature AlxInyGa1−x−yN layer to form a “V”-shaped indentation or pit; after growth of the multiple quantum-well active region, growing a thin AlzGa1−zN electron blocking layer and then a separation layer under two-dimensional growth mode to form holes between the active region and the P-type layer to separate throughout dislocation within the V pit coverage range and contact with the P-type layer, thus eliminating current leakage and improving inverse current leakage capacity and anti-static capacity of the epitaxial wafer.
    • 制造发光二极管的方法包括:证明基板; 形成N型层,低温Al x In y Ga 1-x-y N(0≦̸ x≦̸ 1,0≦̸ y≦̸ 1,x和y不能同时为零),多量子阱活性区 ,AlzGa1-zN(0≦̸ z≦̸ 1)电子阻挡层,AlxInyGa1-x-yN(0& nlE; x≦̸ 1,0& nlE; y≦̸ 1)分离层和P型层; 在多量子阱活性区域的生长之前,生长低温Al x In y Ga 1-x-y N层以形成“V”形凹陷或凹坑; 在多量子阱活性区域生长之后,在二维生长模式下生长薄的AlzGa1-zN电子阻挡层,然后生长分离层,以在活性区域和P型层之间形成孔,以在 V坑覆盖范围并与P型层接触,从而消除了电流泄漏,提高了外延晶片的反向漏电流和抗静电能力。