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    • 3. 发明授权
    • Device for positioning objects within a sealed chamber
    • 用于将物体定位在密封室内的装置
    • US5139383A
    • 1992-08-18
    • US734473
    • 1991-07-23
    • Alexander PolyakThu Huynh
    • Alexander PolyakThu Huynh
    • H01J37/20H01L21/68
    • H01J37/20H01L21/68H01J2237/20257Y10S403/01Y10T464/30Y10T74/18992
    • A device for positioning objects within a sealed vacuum chamber (112) comprises a stationay housing (114), which is sealingly attached to the vacuum chamber (112). Located within the housing (114) is a tubular body (158) capable of rotating and translating within the stationary housing (114) through the interaction of an outer magnet (116), which slides and rotates on the surface of the stationary housing, and an inner magnet (118), which is attached to the tubular body (158). A shaft (198) is located inside the tubular body, but cannot be shifted axially with respect to this body. The front end of shaft (198) extends into the vacuum chamber (112) and may carry a specimen or any other object to be treated or tested in the vacuum chamber. The shaft (198) is driven from an external drive mechanism (124). Rotation of the shaft can be converted into opening and closing movements of the jaws (218 and 220). Thus, the object can be clamped by the jaws, rotated, and linearly moved inside a sealed chamber under the control of external drive means.
    • 一种用于将物体定位在密封真空室(112)内的装置包括一个与真空室(112)密封连接的台架壳体(114)。 位于壳体(114)内部的管状体(158)能够通过在固定壳体的表面上滑动并旋转的外部磁体(116)的相互作用而在固定壳体(114)内旋转和平移,并且 内部磁体(118),其连接到管状体(158)上。 轴(198)位于管状体内部,但不能相对于本体轴向移动。 轴(198)的前端延伸到真空室(112)中,并且可以携带在真空室中待处理或测试的样品或任何其它物体。 轴(198)从外部驱动机构(124)驱动。 轴的旋转可以转换成夹爪(218和220)的打开和关闭运动。 因此,物体可以在外部驱动装置的控制下被夹爪夹持,在密封室内旋转和线性移动。