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    • 1. 发明授权
    • Phase-shifting cell for an antenna reflectarray
    • 用于天线反相阵列的相移单元
    • US07042397B2
    • 2006-05-09
    • US10517706
    • 2003-06-13
    • Michel CharrierThierry DeanAfshin ZiaeiHervé LegayBéatrice PinteRaphaël GillardEtienne GirardRonan Moulinet
    • Michel CharrierThierry DeanAfshin ZiaeiHervé LegayBéatrice PinteRaphaël GillardEtienne GirardRonan Moulinet
    • H01Q1/38H01Q13/00
    • H01Q3/46H01Q9/065H01Q21/062
    • The invention relates to phase-shifting cells constituting the passive reflectarrays of antennas with a reconfigurable transmission direction, transmitting in the microwave range. More particularly, the invention describes, within the context of phase-shifting cells of the type having dipole strands angularly distributed in a star configuration, a novel type of switch consisting of a microelectromechanical device essentially comprising a suspended micromembrane which, under the action of an electrostatic force caused by a control voltage, deforms sufficiently to ensure electrical connection between the strands, making it possible to form a dipole in the desired orientation. In one particular embodiment, the micromembrane can be likened to one of the plates of a capacitor and its deformation corresponds to a substantial increase in the capacitance of this capacitor, thus providing the electrical connection. This switch technology has the advantages of greater fabrication simplicity and of enhanced performance compared with the known technologies. The invention provides the main geometrical and technological characteristics for obtaining optimized performance.
    • 本发明涉及在微波范围内传输构成天线的无源反射阵列的移相电池,具有可重新配置的传输方向。 更具体地说,本发明描述了在具有以星形结构成角度分布的偶极子线圈的类型的相移单元的上下文中,新型开关由基本上包含悬浮微膜的微机电装置组成,该微机电装置在 由控制电压引起的静电力足够变形以确保线之间的电连接,使得可以以期望的方向形成偶极子。 在一个具体实施例中,微膜可以被比作电容器的一个板,并且其变形对应于该电容器的电容的显着增加,从而提供电连接。 与已知技术相比,该开关技术具有更大的制造简单性和更高性能的优点。 本发明提供了获得优化性能的主要几何和技术特性。
    • 2. 发明申请
    • Phase-shifting cell for an antenna reflector
    • 用于天线反射器的相移单元
    • US20050219125A1
    • 2005-10-06
    • US10517706
    • 2003-06-13
    • Michel CharrierThierry DeanAfshin ZiaeiHerve LegayBeatrice PinteRaphael GillardEtienne GirardRonan Moulinet
    • Michel CharrierThierry DeanAfshin ZiaeiHerve LegayBeatrice PinteRaphael GillardEtienne GirardRonan Moulinet
    • H01Q3/46H01Q9/06H01Q21/06H01Q1/38
    • H01Q3/46H01Q9/065H01Q21/062
    • The invention relates to phase-shifting cells constituting the passive reflectarrays of antennas with a reconfigurable transmission direction, transmitting in the microwave range. More particularly, the invention describes, within the context of phase-shifting cells of the type having dipole strands angularly distributed in a star configuration, a novel type of switch consisting of a microelectromechanical device essentially comprising a suspended micromembrane which, under the action of an electrostatic force caused by a control voltage, deforms sufficiently to ensure electrical connection between the strands, making it possible to form a dipole in the desired orientation. In one particular embodiment, the micromembrane can be likened to one of the plates of a capacitor and its deformation corresponds to a substantial increase in the capacitance of this capacitor, thus providing the electrical connection. This switch technology has the advantages of greater fabrication simplicity and of enhanced performance compared with the known technologies. The invention provides the main geometrical and technological characteristics for obtaining optimized performance.
    • 本发明涉及在微波范围内传输构成天线的无源反射阵列的移相电池,具有可重新配置的传输方向。 更具体地说,本发明描述了在具有以星形结构成角度分布的偶极子线圈的类型的相移单元的上下文中,新型开关由基本上包含悬浮微膜的微机电装置组成,该微机电装置在 由控制电压引起的静电力足够变形以确保线之间的电连接,使得可以以期望的方向形成偶极子。 在一个具体实施例中,微膜可以被比作电容器的一个板,并且其变形对应于该电容器的电容的显着增加,从而提供电连接。 与已知技术相比,该开关技术具有更大的制造简单性和更高性能的优点。 本发明提供了获得优化性能的主要几何和技术特性。
    • 3. 发明授权
    • Electrostatically actuated low response time power commutation micro-switches
    • 静电驱动低响应时间功率换向微动开关
    • US07297571B2
    • 2007-11-20
    • US10529241
    • 2003-09-26
    • Afshin ZiaeiThierry DeanJean-Philippe Polizzi
    • Afshin ZiaeiThierry DeanJean-Philippe Polizzi
    • H01L21/00
    • H01H59/0009H01G5/16
    • The field of the invention is that of microsystems of the electrostatically actuated microswitch type that are used in electronics to carry out switching functions, especially in the microwave field for mobile telephony and radars. The object of the invention is to improve the performance of the switch by reducing the response time of the device and by increasing the radiofrequency or microwave power supported, while still maintaining low switching voltages. This improved performance is obtained by using thick membranes and by placing a material of high relative permittivity between said membrane and the associated electrode. The switch is obtained by a novel production process, the membrane being produced on an independent substrate and then joined to the base substrate of the switch. Examples of processes for producing devices according to the invention with the materials that can be used, the possible geometries and the various production steps are given.
    • 本发明的领域是用于电子设备中用于执行切换功能的静电致动微动开关类型的微系统,特别是用于移动电话和雷达的微波领域。 本发明的目的是通过减少设备的响应时间并且通过增加支持的射频或微波功率,同时仍保持低的开关电压来提高开关的性能。 通过使用厚膜和通过在所述膜和相关电极之间放置高相对介电常数的材料来获得这种改进的性能。 该开关通过新颖的制造方法获得,该膜在独立的基板上产生,然后连接到开关的基底。 给出了根据本发明的装置的生产方法,可以使用的材料,可能的几何形状和各种生产步骤。
    • 4. 发明申请
    • Electrostatically actuated low response time power commutation micro-switches
    • 静电驱动低响应时间功率换向微动开关
    • US20060084198A1
    • 2006-04-20
    • US10529241
    • 2003-09-26
    • Afshin ZiaeiThierry DeanJean-Philippe Polizzi
    • Afshin ZiaeiThierry DeanJean-Philippe Polizzi
    • H01L21/50
    • H01H59/0009H01G5/16
    • The field of the invention is that of microsystems of the electrostatically actuated microswitch type that are used in electronics to carry out switching functions, especially in the microwave field for mobile telephony and radars. The object of the invention is to improve the performance of the switch by reducing the response time of the device and by increasing the radiofrequency or microwave power supported, while still maintaining low switching voltages. This improved performance is obtained by using thick membranes and by placing a material of high relative permittivity between said membrane and the associated electrode. The switch is obtained by a novel production process, the membrane being produced on an independent substrate and then joined to the base substrate of the switch. Examples of processes for producing devices according to the invention with the materials that can be used, the possible geometries and the various production steps are given.
    • 本发明的领域是用于电子设备中用于执行切换功能的静电致动微动开关类型的微系统,特别是用于移动电话和雷达的微波领域。 本发明的目的是通过减少设备的响应时间并且通过增加支持的射频或微波功率,同时仍保持低的开关电压来提高开关的性能。 通过使用厚膜和通过在所述膜和相关电极之间放置高相对介电常数的材料来获得这种改进的性能。 该开关通过新颖的制造方法获得,该膜在独立的基板上产生,然后连接到开关的基底。 给出了根据本发明的装置的生产方法,可以使用的材料,可能的几何形状和各种生产步骤。