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    • 1. 发明申请
    • Transistors, Semiconductor Devices, Assemblies And Constructions
    • 晶体管,半导体器件,组件和结构
    • US20090200614A1
    • 2009-08-13
    • US12424392
    • 2009-04-15
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L27/088
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 2. 发明申请
    • Selective etch chemistries for forming high aspect ratio features and associated structures
    • 用于形成高纵横比特征和相关结构的选择性蚀刻化学
    • US20080057724A1
    • 2008-03-06
    • US11515435
    • 2006-08-31
    • Mark KiehlbauchTed Taylor
    • Mark KiehlbauchTed Taylor
    • H01L21/461H01L21/302
    • H01L21/31116
    • An interlevel dielectric layer, such as a silicon oxide layer, is selectively etched using a plasma etch chemistry including a silicon species and a halide species and also preferably a carbon species and an oxygen species. The silicon species can be generated from a silicon compound, such as SixMyHz, where “Si” is silicon, “M” is one or more halogens, “H” is hydrogen and x≧1, y≧0 and z≧0. The carbon species can be generated from a carbon compound, such as CαMβHγ, where “C” is carbon, “M” is one or more halogens, “H” is hydrogen, and α≧1, β≧0 and γ≧0. The oxygen species can be generated from an oxygen compound, such as O2, which can react with carbon to form a volatile compound.
    • 使用包括硅物质和卤化物物质以及还优选碳物质和氧物质的等离子体蚀刻化学品来选择性地蚀刻诸如氧化硅层的层间电介质层。 硅物质可以由硅化合物生成,例如Si x为硅,“M”为硅,“M” “是一种或多种卤素,”H“是氢,x> = 1,y> = 0且z> = 0。 碳物质可以由碳化合物生成,例如C a为C的C“C”,“M” “是一种或多种卤素,”H“是氢,α> = 1,β> = 0和γ> = 0。 氧类可以由氧化合物(例如O 2)生成,其可以与碳反应形成挥发性化合物。
    • 5. 发明授权
    • Method of forming candles and candle composition therefor
    • 形成蜡烛和蜡烛成分的方法
    • US4855098A
    • 1989-08-08
    • US133541
    • 1987-12-16
    • Ted Taylor
    • Ted Taylor
    • C11C5/00
    • C11C5/002C11C5/006Y10S425/803
    • A candle composition consisting essentially of about 10 to 90 volume percent of a first paraffin wax with a melting point of 120.degree. to 125.degree. F. and having a maximum of 2 percent oil, about 10 to 90 volume percent of the second paraffin wax with a melting point of 125.degree. to 130.degree. F. and having a maximum of 0.2 percent oil, and about 0.1 volume percent of stretchability enhancer and a method of forming a candle therefrom. A method of forming a candle comprising submerging a plurality of wax pieces consisting essentially of about 10 to 90 volume % paraffin wax with a melting point of 120.degree. F. and having a maximum of 2.0% oil, about 10 to 90 volume % paraffin wax with a melting point of 125.degree. to 130.degree. F. and having a maximum of 0.2% oil and about 0.1 to 1.0 volume % of a stretchability enhancer in water having a temperature between about 100.degree. and 120.degree. F., permitting the pieces to soften in the water, removing the pieces from the water, joining the soft pieces together while the pieces are soft, and inserting wick material in between the joined soft pieces.
    • 一种蜡烛组合物,其基本上由约10至90体积%的熔点为120至125°F的第一石蜡和最多2%的油组成,约10至90体积%的第二种石蜡与 熔点为125〜130°F,最大为0.2%的油,约0.1体积%的伸缩性增强剂及其形成蜡烛的方法。 一种形成蜡烛的方法,包括浸没多个蜡片,其基本上由约10至90体积%的石蜡组成,熔点为120°F,最大为2.0%的油,约10至90体积%的石蜡 熔点为125〜130°F,最高为0.2%的油和约0.1〜1.0%的伸缩性增强剂在水中的温度在约100〜120°F之间。 在水中软化,将水从水中取出,将软片接合在一起,同时软件柔软,并将芯材插入连接的软片之间。
    • 6. 发明授权
    • Semiconductor devices, assemblies and constructions
    • 半导体器件,组件和结构
    • US08791506B2
    • 2014-07-29
    • US13224804
    • 2011-09-02
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L27/118H01L29/80
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 7. 发明申请
    • SELECTIVE ETCH CHEMISTRIES FOR FORMING HIGH ASPECT RATIO FEATURES AND ASSOCIATED STRUCTURES
    • 用于形成高比例特征和相关结构的选择性蚀刻化学
    • US20120068366A1
    • 2012-03-22
    • US13305603
    • 2011-11-28
    • Mark KiehlbauchTed Taylor
    • Mark KiehlbauchTed Taylor
    • H01L23/48
    • H01L21/31116
    • An interlevel dielectric layer, such as a silicon oxide layer, is selectively etched using a plasma etch chemistry including a silicon species and a halide species and also preferably a carbon species and an oxygen species. The silicon species can be generated from a silicon compound, such as SixMyHz, where “Si” is silicon, “M” is one or more halogens, “H” is hydrogen and x≧1, y≧0 and z≧0. The carbon species can be generated from a carbon compound, such as CαMβHγ, where “C” is carbon, “M” is one or more halogens, “H” is hydrogen, and α≧1, β≧0 and γ≧0. The oxygen species can be generated from an oxygen compound, such as O2, which can react with carbon to form a volatile compound.
    • 使用包括硅物质和卤化物物质以及还优选碳物质和氧物质的等离子体蚀刻化学品来选择性地蚀刻诸如氧化硅层的层间电介质层。 可以从诸如SixMyHz的硅化合物生成硅种类,其中“Si”是硅,“M”是一种或多种卤素,“H”是氢,x≥1,y≥0和z≥0。 碳类可以由碳化合物如CαM&bgr;Hγ生成,其中“C”是碳,“M”是一种或多种卤素,“H”是氢,α≥1,&bgr;≥0和γ ≧0。 氧类可以由氧化合物(例如O 2)产生,其可以与碳反应形成挥发性化合物。
    • 8. 发明申请
    • SELECTIVE ETCH CHEMISTRIES FOR FORMING HIGH ASPECT RATIO FEATURES AND ASSOCIATED STRUCTURES
    • 用于形成高比例特征和相关结构的选择性蚀刻化学
    • US20090159560A1
    • 2009-06-25
    • US12393893
    • 2009-02-26
    • Mark KiehlbauchTed Taylor
    • Mark KiehlbauchTed Taylor
    • B44C1/22
    • H01L21/31116
    • An interlevel dielectric layer, such as a silicon oxide layer, is selectively etched using a plasma etch chemistry including a silicon species and a halide species and also preferably a carbon species and an oxygen species. The silicon species can be generated from a silicon compound, such as SixMyHz, where “Si” is silicon, “M” is one or more halogens, “H” is hydrogen and x≧1, y≧0 and z≧0. The carbon species can be generated from a carbon compound, such as CαMβHγ, where “C” is carbon, “M” is one or more halogens, “H” is hydrogen, and α≧1, β≧0 and γ≧0. The oxygen species can be generated from an oxygen compound, such as O2, which can react with carbon to form a volatile compound.
    • 使用包括硅物质和卤化物物质以及还优选碳物质和氧物质的等离子体蚀刻化学品来选择性地蚀刻诸如氧化硅层的层间电介质层。 硅物质可以由诸如SixMyHz的硅化合物产生,其中“Si”是硅,“M”是一个或多个卤素,“H”是氢,x> = 1,y> = 0,z> = 0。 碳类可以由诸如CalphaMbetaHgamma的碳化合物产生,其中“C”是碳,“M”是一种或多种卤素,“H”是氢,α> = 1,β> = 0,γ> = 0。 氧类可以由氧化合物(例如O 2)产生,其可以与碳反应形成挥发性化合物。
    • 9. 发明授权
    • Methods of forming semiconductor devices, assemblies and constructions
    • 形成半导体器件,组件和结构的方法
    • US07537994B2
    • 2009-05-26
    • US11511596
    • 2006-08-28
    • Ted TaylorXiawan Yang
    • Ted TaylorXiawan Yang
    • H01L21/8238H01L21/336H01L21/8236H01L21/3205
    • H01L21/76283
    • Embodiments disclosed herein include methods in which a pair of openings are formed into semiconductor material, with the openings being spaced from one another by a segment of the semiconductor material. Liners are formed along sidewalls of the openings, and then semiconductor material is isotropically etched from bottoms of the openings to merge the openings and thereby completely undercut the segment of semiconductor material. Embodiments disclosed herein may be utilized in forming SOI constructions, and in forming field effect transistors having transistor gates entirely surrounding channel regions. Embodiments disclosed herein also include semiconductor constructions having transistor gates surrounding channel regions, as well as constructions in which insulative material entirely separates an upper semiconductor material from a lower semiconductor material.
    • 本文公开的实施例包括其中一对开口形成为半导体材料的方法,其中开口通过半导体材料的部分彼此间隔开。 衬套沿着开口的侧壁形成,然后半导体材料从开口的底部被各向同性地蚀刻以合并开口,从而完全地切割半导体材料段。 本文公开的实施例可以用于形成SOI结构,并且在形成具有完全围绕通道区域的晶体管栅极的场效应晶体管中。 本文公开的实施例还包括具有围绕通道区域的晶体管栅极的半导体结构以及其中绝缘材料将上半导体材料与下半导体材料完全分离的结构。
    • 10. 发明授权
    • Selective etch chemistries for forming high aspect ratio features and associated structures
    • 用于形成高纵横比特征和相关结构的选择性蚀刻化学
    • US07517804B2
    • 2009-04-14
    • US11515435
    • 2006-08-31
    • Mark KiehlbauchTed Taylor
    • Mark KiehlbauchTed Taylor
    • H01L21/302
    • H01L21/31116
    • An interlevel dielectric layer, such as a silicon oxide layer, is selectively etched using a plasma etch chemistry including a silicon species and a halide species and also preferably a carbon species and an oxygen species. The silicon species can be generated from a silicon compound, such as SixMyHz, where “Si” is silicon, “M” is one or more halogens, “H” is hydrogen and x≧1, y≧0 and z≧0. The carbon species can be generated from a carbon compound, such as CαMβHγ, where “C” is carbon, “M” is one or more halogens, “H” is hydrogen, and α≧1, β≧0 and γ≧0. The oxygen species can be generated from an oxygen compound, such as O2, which can react with carbon to form a volatile compound.
    • 使用包括硅物质和卤化物物质以及还优选碳物质和氧物质的等离子体蚀刻化学品来选择性地蚀刻诸如氧化硅层的层间电介质层。 硅物质可以由诸如SixMyHz的硅化合物产生,其中“Si”是硅,“M”是一个或多个卤素,“H”是氢,x> = 1,y> = 0,z> = 0。 碳类可以由诸如CalphaMbetaHgamma的碳化合物产生,其中“C”是碳,“M”是一种或多种卤素,“H”是氢,α> = 1,β> = 0,γ> = 0。 氧类可以由氧化合物(例如O 2)产生,其可以与碳反应形成挥发性化合物。