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1. 发明申请

US20090034827A1 Inspection device, inspection method, method of manufacturing color filter, and computer-readable storage medium containing inspection device control program 审中-公开
标题翻译：检验装置，检查方法，制造滤色片的方法，以及包含检查装置控制程序的计算机可读存储介质
公开(公告)号：US20090034827A1
公开(公告)日：2009-02-05
申请号：US12220850
申请日：2008-07-29
申请人： Tamon Iden
发明人： Tamon Iden
IPC分类号： G06K9/00 , G03F1/00
CPC分类号： G01N21/8851 , G01B11/245 , G01N21/95 , G01N2021/8887 , G01N2021/9511 , G01N2021/9513 , G02B5/223
摘要： An inspection device of the present invention includes: a linear irregularity detecting section for detecting linear irregularities individually in an image L of dots on a substrate being inspected by projecting light from a first direction and in an image R of the dots by projecting light from a second direction, which differs from the first direction; a specific-cycle irregularity extracting section for extracting linear irregularities detected at predetermined intervals T in the individual mages L and R, the intervals being taken vertical to the linear irregularities on the substrate; and a detection-target-irregularity extracting section for extracting a linear irregularity detected in both the images L and R as a detection-target linear irregularity. The device therefore is capable of detecting only linear irregularities of a specific cycle which are caused by the presence of dots having irregular thickness when compared to a dot with normal thickness.
摘要翻译：本发明的检查装置包括：线性不规则检测部分，用于通过从第一方向投射光并通过投射来自第一方向的图像R来检测在被检查的基板上的点的图像L中的线性不规则性第二方向与第一方向不同; 特定循环不规则提取部分，用于提取在各个法师L和R中以预定间隔T检测的线性不规则性，垂直于基板上的线性不规则性的间隔; 以及检测目标不规则提取部分，用于提取在图像L和R中检测到的线性不规则性作为检测目标线性不规则性。因此，与具有正常厚度的点相比，该装置能够仅检测由具有不规则厚度的点的存在引起的特定周期的线性不规则性。

2. 发明申请

US20120287600A1 SIMULATED SOLAR LIGHT IRRADIATION DEVICE AND SIMULATED SOLAR LIGHT IRRADIATION METHOD 审中-公开
标题翻译：模拟太阳光照射装置和模拟太阳能照射方法
公开(公告)号：US20120287600A1
公开(公告)日：2012-11-15
申请号：US13519876
申请日：2010-07-25
申请人： Tamon Iden , Kohji Minami
发明人： Tamon Iden , Kohji Minami
IPC分类号： F21V9/02 , F21V99/00
CPC分类号： F21S8/006 , F21Y2115/10 , G02B6/0026 , G02B6/0028 , G02B6/007
摘要： A simulated solar light irradiation device (30) includes (i) a light source section including a first light source (1) and a second light source (2), (ii) light selection means (7) for selecting and emitting (a) light, having shorter-wavelengths than a predetermined boundary wavelength, in first light irradiated by the first light source (1) and (b) light, having longer-wavelengths than the predetermined boundary wavelength, in second light irradiated by the second light source (2), and (iii) control means (5, 6) for controlling a directivity of the first light or a directivity of the second light so that the first light or the second light enters the light selection means (7) at a predetermined incident angle. In this way, it is possible to irradiate designed simulated solar light without increasing a size of the device.
摘要翻译：模拟太阳光照射装置（30）包括：（i）包括第一光源（1）和第二光源（2）的光源部，（ii）用于选择和发射（a）光源的光选择装置，在由第一光源（1）照射的第一光中具有比预定边界波长短的波长的光，和（b）在由第二光源照射的第二光中具有比预定边界波长长的波长的光 2）和（iii）用于控制第一光的方向性或第二光的方向性的控制装置（5,6），使得第一光或第二光在预定事件处进入光选择装置（7）角度。以这种方式，可以在不增加设备尺寸的情况下照射设计的模拟太阳光。

3. 发明申请

US20130033847A1 LIGHT-SOURCE DEVICE AND SIMULATED-SOLAR-LIGHT IRRADIATION DEVICE PROVIDED WITH SAME 失效
标题翻译：具有相同光源的光源器件和模拟太阳光辐照器件
公开(公告)号：US20130033847A1
公开(公告)日：2013-02-07
申请号：US13520413
申请日：2011-03-08
申请人： Akiko Kobayashi , Kohji Minami , Hiroyuki Tadano , Norito Fujihara , Tamon Iden , Atsushi Nakamura
发明人： Akiko Kobayashi , Kohji Minami , Hiroyuki Tadano , Norito Fujihara , Tamon Iden , Atsushi Nakamura
IPC分类号： F21V9/02 , F21V13/12 , F21V13/02
CPC分类号： G02B6/0028 , F21S8/006 , G02B6/0018 , G02B6/0038 , G02B6/4298
摘要： The present invention provides a light source device for emitting concentrated light, which is prepared by concentrating light emitted from a light source, including: the light source; a reflective box in which the light source is provided; a plurality of light guides having a circular column shape or a polygonal column shape and having two end surfaces being different in area; and light separating means, the reflective box having a plurality of openings, each opening being provided with one of the light guides in such a way that the end surface smaller in area faces the light source, and each light separating means being provided at a position between the adjacent ones of the openings. With this, a small-sized light source device for emitting light with high output and high directivity, and a simulated solar light irradiation device including the same are provided.
摘要翻译：本发明提供了一种用于发射集中光的光源装置，其通过集中从光源发射的光来制备，包括：光源; 提供光源的反射盒; 具有圆柱形状或多边形柱状的多个导光体，其两个端面的面积不同; 以及光分离装置，所述反射盒具有多个开口，每个开口设置有所述光导中的一个，使得所述面积较小的所述端面面对所述光源，并且每个光分离装置设置在位置在相邻的开口之间。因此，提供了一种用于发射具有高输出和高方向性的光的小型光源装置，以及包括该光源的模拟太阳光照射装置。

4. 发明申请

US20090303468A1 Undulation Inspection Device, Undulation Inspecting Method, Control Program for Undulation Inspection Device, and Recording Medium 审中-公开
标题翻译：调音检查装置，调查检查方法，无效检查装置的控制程序和记录介质
公开(公告)号：US20090303468A1
公开(公告)日：2009-12-10
申请号：US12308241
申请日：2007-06-12
申请人： Kenji Itoh , Tamon Iden , Takeshi Murakami
发明人： Kenji Itoh , Tamon Iden , Takeshi Murakami
IPC分类号： G01N21/88 , G06F19/00
CPC分类号： G01N21/8901 , G01B11/306 , G01N2021/556 , G01N2021/9513
摘要： An undulation inspection device of the present invention includes: illumination means (line light source 2) that subjects, to illumination, an object to be inspected; light intensity acquisition means (area sensor 3) that acquires light intensity distribution of light that comes, in response to the illumination, from a surface of the object to be inspected; image capturing means (line sensor 4) that obtains only predetermined light out of light that comes from the surface of the object to be inspected; adjustment means (image processing section 20 and light source drive controlling section 21) that adjusts the illumination means (line light source 2), based on the light intensity distribution that is obtained from the light intensity acquisition means; and determination means (defect determination processing means 23) that determines a state of undulation that is formed on the surface of the object to be inspected, based on a result of capturing an image by the image capturing means after adjustment of the illumination means. This makes it possible to provide an undulation inspection device capable of inspecting simply and at a high precision a state of undulation (a difference in film thickness) on a surface of a large substrate (e.g., color filter substrate).
摘要翻译：本发明的起伏检查装置包括：照明装置（线光源2），照明要被检查的物体; 光强度获取装置（区域传感器3），其从待检查对象的表面获取响应于照明的光的光强度分布; 仅从待检查物体的表面获得来自光的预定光的图像捕获装置（线传感器4）基于从光强度获取装置获得的光强度分布来调节照明装置（线光源2）的调整装置（图像处理部分20和光源驱动控制部分21）以及基于在调整照明装置之后由图像捕获装置捕获图像的结果来确定形成在待检查对象的表面上的起伏状态的确定装置（缺陷确定处理装置23）。这使得可以提供能够简单且高精度地检查大基板（例如滤色器基板）的表面上的波动状态（膜厚度差）的波峰检查装置。

5. 发明授权

US08714800B2 Light-source device and simulated-solar-light irradiation device provided with same 失效
标题翻译：光源装置和模拟太阳光照射装置
公开(公告)号：US08714800B2
公开(公告)日：2014-05-06
申请号：US13520413
申请日：2011-03-08
申请人： Akiko Kobayashi , Kohji Minami , Hiroyuki Tadano , Norito Fujihara , Tamon Iden , Atsushi Nakamura
发明人： Akiko Kobayashi , Kohji Minami , Hiroyuki Tadano , Norito Fujihara , Tamon Iden , Atsushi Nakamura
IPC分类号： G02B6/00 , F21V7/00
CPC分类号： G02B6/0028 , F21S8/006 , G02B6/0018 , G02B6/0038 , G02B6/4298
摘要： The present invention provides a light source device for emitting concentrated light, which is prepared by concentrating light emitted from a light source, including: the light source; a reflective box in which the light source is provided; a plurality of light guides having a circular column shape or a polygonal column shape and having two end surfaces being different in area; and light separating means, the reflective box having a plurality of openings, each opening being provided with one of the light guides in such a way that the end surface smaller in area faces the light source, and each light separating means being provided at a position between the adjacent ones of the openings. With this, a small-sized light source device for emitting light with high output and high directivity, and a simulated solar light irradiation device including the same are provided.
摘要翻译：本发明提供了一种用于发射集中光的光源装置，其通过集中从光源发射的光来制备，包括：光源; 提供光源的反射盒; 具有圆柱形状或多边形柱状的多个导光体，其两个端面的面积不同; 以及光分离装置，所述反射盒具有多个开口，每个开口设置有所述光导中的一个，使得所述面积较小的所述端面面对所述光源，并且每个光分离装置设置在位置在相邻的开口之间。因此，提供了一种用于发射具有高输出和高方向性的光的小型光源装置，以及包括该光源的模拟太阳光照射装置。

6. 发明申请

US20090177428A1 Method of Measuring Peripheral Tilt Angle, Method and Device for Inspecting Inspection Object Having Surface Mounds, Method of Determining Position of Illumination Means, Irregularity Inspection Device, and Light Source Position Determining Device 审中-公开
标题翻译：测量外围倾斜角度的方法，检查具有表面积的检查对象的方法和装置，确定照明装置的位置的方法，不规则检查装置和光源位置确定装置
公开(公告)号：US20090177428A1
公开(公告)日：2009-07-09
申请号：US12227562
申请日：2007-06-12
申请人： Tamon Iden
发明人： Tamon Iden
IPC分类号： G01P21/00 , G01B11/26 , G01B11/30
CPC分类号： G01B11/26 , G01B11/306 , G02F1/1309
摘要： The method of measuring a peripheral tilt angle in accordance with the present invention, to address the problems, is a method of measuring a peripheral tilt angle on an inspection object having surface mounds, the method including: the step A of projecting light onto the inspection object; the step B of sensing distribution of light reflected off the inspection object; the step C of obtaining a feature point of the distribution of the reflected light from result of the sensing of the distribution of the reflected light; and the step D of obtaining a peripheral tilt angle which is a tilt angle near a periphery of each of the surface mounds based on an angle of projection of the light in step A to a position which, on the inspection object, corresponds to the feature point and an angle of sensing of the reflected light in step B off a position which, on the inspection object, corresponds to the feature point. Thus, the invention provides a method whereby a peripheral tilt angle, or a tilt angle of a surface mound near its periphery on an inspection object is obtained and also provides a method whereby deviation in height of the surface mound is precisely inspected based on the peripheral tilt angle.
摘要翻译：根据本发明的测量周边倾斜角度的方法为了解决这些问题，是测量具有表面丘的检查对象的周边倾斜角的方法，该方法包括：步骤A将光投射到检查目的; 检测从检查对象反射的光的分布的步骤B; 从感测反射光的分布的结果获得反射光的分布的特征点的步骤C; 以及步骤D，基于步骤A中的光的投影角度获得作为每个表面丘的周边附近的倾斜角的周边倾斜角到在检查对象上对应于特征的位置点和步骤B中的反射光的感测角度偏离在检查对象上对应于特征点的位置。因此，本发明提供了一种方法，其中获得周边倾斜角度或其周边附近的表面丘的倾斜角，并且还提供了一种基于外围设备精确检查表面丘的偏移的方法倾斜角度

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