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    • 4. 发明授权
    • Detector for diffracted electrons
    • 用于衍射电子的检测器
    • US5387794A
    • 1995-02-07
    • US178693
    • 1994-01-10
    • Takao Marui
    • Takao Marui
    • G01N23/04G01N23/207H01J37/22H01J37/295H01J37/28
    • H01J37/2955H01J37/22H01J2237/2445
    • A detector for electrons diffracted by a sample irradiated with an electron beam uses a fluorescent screen to output optical signals representing the diffraction pattern formed by the diffracted electrons, and a TV camera to convert these optical signals to electrical signals. A photoelectric converter is used to determine the brightness of each position on the fluorescent screen but its position is controlled such that the converter will not obstruct the view of the fluorescent screen from the TV camera. Coordinate data on the positions at which the measured brightness is greater than a specified standard brightness value may be stored and relied upon in moving the photoelectric converter, or the light-receiving end of an optical fiber connected thereto, relative to the fluorescent screen.
    • 由用电子束照射的样品衍射的电子的检测器使用荧光屏输出表示由衍射电子形成的衍射图案的光信号,以及TV摄像机将这些光信号转换为电信号。 使用光电转换器来确定荧光屏上每个位置的亮度,但其位置被控制,使得转换器不会阻碍荧光屏从电视摄像机的视野。 在测量亮度大于指定标准亮度值的位置上的坐标数据可以相对于荧光屏移动光电转换器或与其连接的光纤的光接收端移动。