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1. 发明授权

US10386730B2 Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process 有权
公开(公告)号：US10386730B2
公开(公告)日：2019-08-20
申请号：US13244191
申请日：2011-09-23
申请人： Steve Hansen
发明人： Steve Hansen
IPC分类号： G06G7/48 , G03F7/20
摘要： A method of generating a model for simulating the imaging performance of an optical imaging system. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; defining a first model representing the imaging performance of the optical imaging system and the process, and calibrating the model, where the first model generates values corresponding to a latent image slope. The method further includes the step of defining a second model for estimating a line width roughness of a feature to be imaged, where the second model utilizes the latent image slope values to estimate the line width roughness.

2. 发明申请

US20090193961A1 Apparatus, System, and Method for Filamentary Composite Lattice Structure Manufacturing 审中-公开
标题翻译：长丝复合格子结构制造的装置，系统和方法
公开(公告)号：US20090193961A1
公开(公告)日：2009-08-06
申请号：US12063998
申请日：2006-08-16
申请人： David W. Jensen , Keith Davis , Boyd Kimber Gunnell , Gregory James Larson , David L. Blunck , Tyler Evans , Steve Hansen , Sarita Rogers , Jennifer Boyce , Eve Pate , James T. Ayers III
发明人： David W. Jensen , Keith Davis , Boyd Kimber Gunnell , Gregory James Larson , David L. Blunck , Tyler Evans , Steve Hansen , Sarita Rogers , Jennifer Boyce , Eve Pate , James T. Ayers III
IPC分类号： D04C1/00 , D04C3/00
CPC分类号： B29C70/222 , B29C53/564 , B29C53/8066 , D02H1/00 , D03D37/00 , D03D47/34 , D04C3/38
摘要： An apparatus, system, and method are disclosed for the manufacture of composite lattice structures comprising a weaving mechanism 104 configured to position fibers in a lattice structure, the weaving mechanism 104 comprising one or more bobbins 304, each one or more bobbin 304 configured to carry fiber and a plurality of horn gears 302 configured to move the one or more bobbins 304 across the face of the weaving mechanism 104 to control the position of the fiber carried by the one or more bobbins 304 in the lattice structure, and a shape retention structure 108 configured to hold the fibers in lattice structure. Beneficially, such an apparatus, system, and method would automate the process of manufacturing composite lattice structures and reduce the costs associated with the existing methods for manufacturing such structures.
摘要翻译：公开了用于制造复合格子结构的装置，系统和方法，其包括构造成将纤维定位在格子结构中的织造机构104，编织机构104包括一个或多个线轴304，每个一个或多个线轴304被配置为携带纤维和多个喇叭齿轮302，其构造成使一个或多个线轴304穿过编织机构104的表面，以控制由一个或多个线轴304承载在格子结构中的纤维的位置，以及形状保持结构 108被配置为将光纤保持为格子结构。有利的是，这种装置，系统和方法将使制造复合晶格结构的过程自动化并且降低与用于制造这种结构的现有方法相关联的成本。

3. 发明申请

US20060078805A1 Lithographic apparatus and device manufacturing method 失效
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US20060078805A1
公开(公告)日：2006-04-13
申请号：US11090697
申请日：2005-03-28
申请人： Steve Hansen
发明人： Steve Hansen
IPC分类号： G03C5/00 , G03B27/42 , G03F1/00
CPC分类号： G03F7/70091 , G03F7/70125
摘要： By proper selection of illumination configuration, mask transmission, and mask bias, complex patterns of contact holes may be imaged with sufficient latitude for manufacturing at minimum half-pitches of k1=0.40 or below. In an embodiment, a method of transferring an image of a mask pattern onto a substrate with a lithographic apparatus is presented. The method includes illuminating a mask pattern of an attenuated phase shift mask with an illumination configuration including on-axis and off-axis components, the off-axis component of the illumination being an annular illumination extending near a pupil edge, and projecting an image of the illuminated mask pattern onto the substrate.
摘要翻译：通过适当选择照明配置，掩模透射和掩模偏压，接触孔的复杂图案可以以足够的纬度被成像，以便以最小半间距k≤0.40或更低制造。在一个实施例中，提出了用光刻设备将掩模图案的图像转印到基板上的方法。该方法包括用包括轴上和离轴分量的照明配置照亮衰减的相移掩模的掩模图案，照明的离轴分量是在瞳孔边缘附近延伸的环形照明，并且投影图像照明的掩模图案到基底上。

4. 发明申请

US20050134822A1 Optimized polarization illumination 有权
标题翻译：优化极化照明
公开(公告)号：US20050134822A1
公开(公告)日：2005-06-23
申请号：US10921878
申请日：2004-08-20
申请人： Robert Socha , Donis Flagello , Steve Hansen
发明人： Robert Socha , Donis Flagello , Steve Hansen
IPC分类号： G03F7/20 , H01L21/027 , G03B27/72
CPC分类号： G03F7/705 , G03F7/70125 , G03F7/70341 , G03F7/70566 , G03F7/70616
摘要： Disclosed concepts include a method of optimizing polarization of an illumination of a pattern to be formed in a surface of a substrate. Polarized illumination is optimized by determining an illumination intensity for at least one point on an illuminator for at least two polarization states, determining image log slope for the at least one point on the illuminator for the at least two polarization states, determining a maximum image log slope (ILS) where the ILS is near zero for the at least one point on the illuminator, and selecting an optimal polarization state corresponding to the at least two polarization states that minimizes an ILS for the at least one point on the illuminator. This may be repeated for a plurality of points on the illuminator.
摘要翻译：公开的概念包括优化待形成在衬底的表面中的图案的照明的偏振的方法。通过确定至少两个偏振状态的照明器上的至少一个点的照明强度来确定极化照明，确定用于至少两个偏振状态的照明器上的至少一个点的图像对数斜率，确定最大图像记录斜率（ILS），其中ILS对于照明器上的至少一个点接近于零，并且选择对应于使得照明器上的至少一个点的ILS最小化的至少两个偏振状态的最佳极化状态。对于照明器上的多个点可以重复这一点。

5. 发明授权

US06766963B2 Recycled rubber railroad crossties 有权
标题翻译：回收橡胶铁路十字架
公开(公告)号：US06766963B2
公开(公告)日：2004-07-27
申请号：US10275665
申请日：2002-11-07
申请人： Steve Hansen
发明人： Steve Hansen
IPC分类号： E01B2104
CPC分类号： B29B17/0042 , B29B2017/042 , B29C47/00 , B29C47/0016 , B29C47/003 , B29C47/0033 , B29K2007/00 , B29K2021/00 , B29K2105/26 , B29L2030/00 , C08J11/06 , C08J2321/00 , C08L17/00 , C08L19/003 , E01B3/44 , Y02W30/62 , Y02W30/625 , Y02W30/701 , C08L2666/08
摘要： A method for the manufacture of a railroad crosstie (90) from recycled rubber is disclosed. The rubber crosstie (90) has an expected life of between 30 to 60 years and can be made primarily of rubber crumbs obtained from stockpiles of discarded rubber tires. A feature of the invention is to produce a crosstie (90) having at least one longitudinal side incorporating a plurality of indentations for more effective engagement upon installation into a gravel bed to avoid slippage.
摘要翻译：公开了一种从回收橡胶制造铁路叉车（90）的方法。橡胶十字架（90）的预期寿命为30至60年，可以主要由废弃橡胶轮胎的堆料获得的橡胶屑制成。本发明的一个特征是产生具有至少一个纵向侧的交叉（90），所述至少一个纵向侧结合有多个压痕，以在安装到砾石床中时更有效地接合以避免滑动。

6. 发明授权

US06284165B1 Methods of strengthening metal halide particles, and improved lamp fill material 失效
标题翻译：加强金属卤化物颗粒的方法和改进的灯泡填充材料
公开(公告)号：US06284165B1
公开(公告)日：2001-09-04
申请号：US09434462
申请日：1999-11-05
申请人： Scott Anderson , Steve Hansen
发明人： Scott Anderson , Steve Hansen
IPC分类号： B29B910
CPC分类号： C01D3/00 , B01J2/02 , C01G1/06 , C01G5/006 , H01J61/125
摘要： Particle compositions are described comprising certain metal halides in combination with a strengthening agent. The addition of the strengthening agent to a metal halide particle increases the particle's strength thereby reducing breakage on impact and during handling. When used as a vaporizable metal halide fill in discharge lamps, the particle strength is increased without significantly altering the spectral and electrical characteristics of the lamp. Methods of making the particles and arc tube containing the particles are also disclosed.
摘要翻译：描述了包含某些金属卤化物与强化剂组合的颗粒组合物。向金属卤化物颗粒中添加增强剂会增加颗粒的强度，从而减少冲击和处理时的破损。当用作可放电的金属卤化物填充放电灯时，粒子强度增加而不显着改变灯的光谱和电特性。还公开了制备含有颗粒的颗粒和电弧管的方法。

7. 发明授权

US08395757B2 Optimized polarization illumination 有权
标题翻译：优化极化照明
公开(公告)号：US08395757B2
公开(公告)日：2013-03-12
申请号：US12773775
申请日：2010-05-04
申请人： Robert Socha , Donis Flagello , Steve Hansen
发明人： Robert Socha , Donis Flagello , Steve Hansen
IPC分类号： G03B27/72 , G03B27/54
CPC分类号： G03F7/705 , G03F7/70125 , G03F7/70341 , G03F7/70566 , G03F7/70616
摘要： Disclosed concepts include a method of optimizing polarization of an illumination of a pattern to be formed in a surface of a substrate. Polarized illumination is optimized by determining an illumination intensity for at least one point on an illuminator for at least two polarization states, determining image log slope for the at least one point on the illuminator for the at least two polarization states, determining a maximum image log slope (ILS) where the ILS is near zero for the at least one point on the illuminator, and selecting an optimal polarization state corresponding to the at least two polarization states that minimizes an ILS for the at least one point on the illuminator. This may be repeated for a plurality of points on the illuminator.
摘要翻译：公开的概念包括优化待形成在衬底的表面中的图案的照明的偏振的方法。通过确定至少两个偏振状态的照明器上的至少一个点的照明强度来确定极化照明，确定用于至少两个偏振状态的照明器上的至少一个点的图像对数斜率，确定最大图像记录斜率（ILS），其中ILS对于照明器上的至少一个点接近于零，并且选择对应于使得照明器上的至少一个点的ILS最小化的至少两个偏振状态的最佳极化状态。对于照明器上的多个点可以重复这一点。

8. 发明申请

US20080183446A1 Method, program product and apparatus for predicting line width roughness and resist pattern failure and the use thereof in a lithography simulation process 有权
标题翻译：用于预测线宽粗糙度和抗蚀剂图案破坏的方法，程序产品和装置及其在光刻模拟过程中的应用
公开(公告)号：US20080183446A1
公开(公告)日：2008-07-31
申请号：US11979838
申请日：2007-11-08
申请人： Steve Hansen
发明人： Steve Hansen
IPC分类号： G06F17/11 , G06G7/48
CPC分类号： G03F7/70675 , G03F7/705 , G03F7/70625
摘要： A method of generating a model for simulating the imaging performance of an optical imaging system. The method includes the steps of defining the optical imaging system and a process to be utilized by the optical imaging system; defining a first model representing the imaging performance of the optical imaging system and the process, and calibrating the model, where the first model generates values corresponding to a latent image slope. The method further includes the step of defining a second model for estimating a line width roughness of a feature to be imaged, where the second model utilizes the latent image slope values to estimate the line width roughness.
摘要翻译：一种生成用于模拟光学成像系统的成像性能的模型的方法。该方法包括以下步骤：定义光学成像系统和由光学成像系统利用的过程; 定义表示光学成像系统和过程的成像性能的第一模型，以及校准模型，其中第一模型产生对应于潜像斜率的值。该方法还包括定义用于估计要成像的特征的线宽粗糙度的第二模型的步骤，其中第二模型利用潜像斜率值来估计线宽粗糙度。

9. 发明授权

US10071273B2 Newtonian foam superconcentrate 有权
公开(公告)号：US10071273B2
公开(公告)日：2018-09-11
申请号：US14907780
申请日：2014-07-28
申请人： Steve Hansen , Lucas M. L. Jacobs
发明人： Steve Hansen , Lucas M. L. Jacobs
IPC分类号： A62C2/00 , A62D1/02 , A62C5/02 , A62C35/02 , A62C3/00 , A62C99/00
CPC分类号： A62D1/0071 , A62C3/00 , A62C5/02 , A62C35/023 , A62C99/0009 , A62C99/0018 , A62C99/009
摘要： The invention provides an aqueous foaming Newtonian concentrate, an expanded foam composition and a process of forming a foam composition concentrate. The aqueous foaming concentrate includes a carbonized saccharide mixture, a surfactant, water and optionally further agents including cross-linking agents, thickeners, solvents, stabilizers, buffers, corrosion inhibitors and preservatives. Foaming concentrates of the present invention are free of fluorine and persistent organic pollutants and particularly suited for use in fire prevention, suppression and extinguishment, vapor suppression and wetting of surfaces at concentrations less than 1.3% by weight.

10. 发明申请

US20110051114A1 OPTIMIZED POLARIZATION ILLUMINATION 有权
标题翻译：优化极化照明
公开(公告)号：US20110051114A1
公开(公告)日：2011-03-03
申请号：US12773775
申请日：2010-05-04
申请人： Robert SOCHA , Donis Flagello , Steve Hansen
发明人： Robert SOCHA , Donis Flagello , Steve Hansen
IPC分类号： G03B27/72
CPC分类号： G03F7/705 , G03F7/70125 , G03F7/70341 , G03F7/70566 , G03F7/70616
摘要： Disclosed concepts include a method of optimizing polarization of an illumination of a pattern to be formed in a surface of a substrate. Polarized illumination is optimized by determining an illumination intensity for at least one point on an illuminator for at least two polarization states, determining image log slope for the at least one point on the illuminator for the at least two polarization states, determining a maximum image log slope (ILS) where the ILS is near zero for the at least one point on the illuminator, and selecting an optimal polarization state corresponding to the at least two polarization states that minimizes an ILS for the at least one point on the illuminator. This may be repeated for a plurality of points on the illuminator.
摘要翻译：公开的概念包括优化待形成在衬底的表面中的图案的照明的偏振的方法。通过确定至少两个偏振状态的照明器上的至少一个点的照明强度来确定极化照明，确定用于至少两个偏振状态的照明器上的至少一个点的图像对数斜率，确定最大图像记录斜率（ILS），其中ILS对于照明器上的至少一个点接近于零，并且选择对应于使得照明器上的至少一个点的ILS最小化的至少两个偏振状态的最佳极化状态。对于照明器上的多个点可以重复这一点。

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