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    • 1. 发明授权
    • Nonvolatile semiconductor memory
    • 非易失性半导体存储器
    • US08916923B2
    • 2014-12-23
    • US13225025
    • 2011-09-02
    • Ryuji Ohba
    • Ryuji Ohba
    • H01L29/792H01L21/28H01L29/423H01L29/51B82Y10/00
    • H01L29/513B82Y10/00H01L21/28273H01L21/28282H01L29/42324H01L29/4234
    • According to one embodiment, in a nonvolatile semiconductor memory in which a charge store layer is formed on a tunnel insulating film formed on a channel region of a semiconductor substrate, a first nanoparticle layer containing first conductive nanoparticles is formed on the channel side, and a second nanoparticle layer containing a plurality of second conductive nanoparticles having an average particle size larger than the first conductive nanoparticles is formed on the charge store layer side. An average energy value ΔE1 required for charging one electron in the first conductive nanoparticle is smaller than an average energy value ΔE required for charging one electron in the second conductive nanoparticle, and a difference between ΔE1 and ΔE is larger than a heat fluctuation energy (kBT).
    • 根据一个实施例,在形成在半导体衬底的沟道区上的隧道绝缘膜上形成电荷存储层的非易失性半导体存储器中,在沟道侧形成包含第一导电纳米颗粒的第一纳米颗粒层, 在电荷存储层侧形成含有平均粒径大于第一导电性纳米粒子的多个第二导电性纳米粒子的第二纳米粒子层。 在第一导电纳米颗粒中对一个电子充电所需的平均能量值&Dgr; E1小于在第二导电纳米颗粒中对一个电子进行充电所需的平均能量值&Dgr; E,并且Dgr; E1和&Dgr之间的差异为 大于热波动能(kBT)。
    • 2. 发明授权
    • Nonvolatile semiconductor memory
    • 非易失性半导体存储器
    • US08742489B2
    • 2014-06-03
    • US13427587
    • 2012-03-22
    • Ryuji OhbaDaisuke Matsushita
    • Ryuji OhbaDaisuke Matsushita
    • H01L29/792H01L21/336
    • B82Y10/00G11C16/0466H01L21/28273H01L21/28282H01L29/42332H01L29/7881H01L29/792
    • According to one embodiment, a nonvolatile semiconductor memory including a first gate insulating film formed on a channel region of a semiconductor substrate, a first particle layer formed in the first gate insulating film, a charge storage part formed on the first gate insulating film, a second gate insulating film which is formed on the charge storage part, a second particle layer formed in the second gate insulating film, and a gate electrode formed on the second gate insulating film. The first particle layer includes first conductive particles that satisfy Coulomb blockade conditions. The second particle layer includes second conductive particles that satisfy Coulomb blockade conditions and differs from the first conductive particles in average particle diameter.
    • 根据一个实施例,一种非易失性半导体存储器,包括形成在半导体衬底的沟道区上的第一栅极绝缘膜,形成在第一栅极绝缘膜中的第一颗粒层,形成在第一栅极绝缘膜上的电荷存储部, 形成在电荷存储部上的第二栅极绝缘膜,形成在第二栅极绝缘膜中的第二粒子层和形成在第二栅极绝缘膜上的栅电极。 第一颗粒层包括满足库仑阻挡条件的第一导电颗粒。 第二粒子层包含满足库仑阻挡条件的第二导电粒子,与第一导电粒子的平均粒径不同。
    • 4. 发明申请
    • SEMICONDUCTOR MEMORY
    • 半导体存储器
    • US20120235219A1
    • 2012-09-20
    • US13419930
    • 2012-03-14
    • Ryuji OHBA
    • Ryuji OHBA
    • H01L29/78
    • H01L21/28273B82Y10/00G11C2216/06H01L21/28282H01L29/42332
    • In one embodiment, there is provided a semiconductor memory that includes: a semiconductor substrate having a channel region; a first tunnel insulating film on the channel region; a first fine particle layer on the first tunnel insulating film, the first fine particle layer including first conductive fine particles; a second tunnel insulating film on the first fine particle layer; a second fine particle layer on the second tunnel insulating film, the second fine particle layer including second conductive fine particles; a third tunnel insulating film on the second fine particle layer; a third fine particle layer on the third tunnel insulating film, the third fine particle layer including third conductive fine particles. A mean particle diameter of the second conductive fine particles is larger than that of the first conductive fine particles and that of the third conductive fine particles.
    • 在一个实施例中,提供一种半导体存储器,其包括:具有沟道区的半导体衬底; 在通道区域上的第一隧道绝缘膜; 所述第一隧道绝缘膜上的第一细颗粒层,所述第一细颗粒层包括第一导电细颗粒; 在第一细颗粒层上的第二隧道绝缘膜; 在第二隧道绝缘膜上的第二细颗粒层,第二微粒层包括第二导电细颗粒; 第二细颗粒层上的第三隧道绝缘膜; 第三隧道绝缘膜上的第三细颗粒层,第三细颗粒层包括第三导电细颗粒。 第二导电性微粒的平均粒径大于第一导电性微粒和第三导电性微粒的平均粒径。
    • 7. 发明申请
    • NONVOLATILE SEMICONDUCTOR MEMORY
    • 非易失性半导体存储器
    • US20120061746A1
    • 2012-03-15
    • US13225025
    • 2011-09-02
    • Ryuji Ohba
    • Ryuji Ohba
    • H01L29/792
    • H01L29/513B82Y10/00H01L21/28273H01L21/28282H01L29/42324H01L29/4234
    • According to one embodiment, in a nonvolatile semiconductor memory in which a charge store layer is formed on a tunnel insulating film formed on a channel region of a semiconductor substrate, a first nanoparticle layer containing first conductive nanoparticles is formed on the channel side, and a second nanoparticle layer containing a plurality of second conductive nanoparticles having an average particle size larger than the first conductive nanoparticles is formed on the charge store layer side. An average energy value ΔE1 required for charging one electron in the first conductive nanoparticle is smaller than an average energy value ΔE required for charging one electron in the second conductive nanoparticle, and a difference between ΔE1 and ΔE is larger than a heat fluctuation energy (kBT).
    • 根据一个实施例,在形成在半导体衬底的沟道区上的隧道绝缘膜上形成电荷存储层的非易失性半导体存储器中,在沟道侧形成含有第一导电纳米颗粒的第一纳米颗粒层, 在电荷存储层侧形成含有平均粒径大于第一导电性纳米粒子的多个第二导电性纳米粒子的第二纳米粒子层。 在第一导电纳米颗粒中对一个电子充电所需的平均能量值&Dgr; E1小于在第二导电纳米颗粒中对一个电子进行充电所需的平均能量值&Dgr; E,并且Dgr; E1和&Dgr之间的差异为 大于热波动能(kBT)。
    • 8. 发明申请
    • RANDOM NUMBER GENERATING DEVICE
    • 随机数生成装置
    • US20070296025A1
    • 2007-12-27
    • US11743265
    • 2007-05-02
    • Mari MatsumotoRyuji OhbaShinobu Fujita
    • Mari MatsumotoRyuji OhbaShinobu Fujita
    • H01L29/792
    • G06F7/588H03B29/00
    • A random number generating device includes a semiconductor device including a source region, a drain region, a channel region provided between the source region and the drain region, and an insulating portion provided on the channel region, the insulating portion including a trap insulating film having traps based on dangling bonds and expressed by Six(SiO2)y(Si3N4)1-yMz (M is an element other than Si, O, and N, x≧0, 1≧y≧0, z≧0, the case where x=0 and y=1 and z=0 is excluded), conductivity of the channel region varying randomly depending on the amount of charge caught in the traps, and a random number generating unit connected to the semiconductor device and generating random numbers based on a random variation in the conductivity of the channel region.
    • 随机数发生装置包括:半导体器件,包括源区域,漏极区域,设置在源极区域和漏极区域之间的沟道区域;以及绝缘部分,设置在沟道区域上,绝缘部分包括捕获绝缘膜, 基于悬挂键并由Si x Si(SiO 2)y(Si 3 N)3表示的陷阱 (M是除Si,O和N之外的元素,x> = 0,1,= y> = 0,z> = 0,x = 0且y = 1,z = 0的情况除外),根据陷阱中捕获的电荷量随机地变化的信道区域的导电率和连接的随机数发生单元 并且基于沟道区域的导电性的随机变化产生随机数。
    • 10. 发明授权
    • Semiconductor memory
    • 半导体存储器
    • US08587050B2
    • 2013-11-19
    • US13419930
    • 2012-03-14
    • Ryuji Ohba
    • Ryuji Ohba
    • H01L29/788
    • H01L21/28273B82Y10/00G11C2216/06H01L21/28282H01L29/42332
    • In one embodiment, there is provided a semiconductor memory that includes: a semiconductor substrate having a channel region; a first tunnel insulating film on the channel region; a first fine particle layer on the first tunnel insulating film, the first fine particle layer including first conductive fine particles; a second tunnel insulating film on the first fine particle layer; a second fine particle layer on the second tunnel insulating film, the second fine particle layer including second conductive fine particles; a third tunnel insulating film on the second fine particle layer; a third fine particle layer on the third tunnel insulating film, the third fine particle layer including third conductive fine particles. A mean particle diameter of the second conductive fine particles is larger than that of the first conductive fine particles and that of the third conductive fine particles.
    • 在一个实施例中,提供一种半导体存储器,其包括:具有沟道区的半导体衬底; 在通道区域上的第一隧道绝缘膜; 所述第一隧道绝缘膜上的第一细颗粒层,所述第一细颗粒层包括第一导电细颗粒; 在第一细颗粒层上的第二隧道绝缘膜; 在第二隧道绝缘膜上的第二细颗粒层,第二微粒层包括第二导电细颗粒; 第二细颗粒层上的第三隧道绝缘膜; 第三隧道绝缘膜上的第三细颗粒层,第三细颗粒层包括第三导电细颗粒。 第二导电性微粒的平均粒径大于第一导电性微粒和第三导电性微粒的平均粒径。