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1. 发明授权

US6101844A Double wall reaction chamber glassware 失效
标题翻译：双壁反应室玻璃器皿
公开(公告)号：US6101844A
公开(公告)日：2000-08-15
申请号：US22056
申请日：1998-02-10
申请人： Jack D. Fowler , Robert Parvin , Jeffrey Kowalski , Patrick W. Wiesen
发明人： Jack D. Fowler , Robert Parvin , Jeffrey Kowalski , Patrick W. Wiesen
IPC分类号： H01L21/22 , C23C16/44 , C23C16/455 , C30B25/08 , C30B31/10 , H01L21/205 , H01L21/324 , C23C16/00
CPC分类号： C23C16/4407 , C23C16/44 , C23C16/45578 , C30B25/08 , C30B31/10
摘要： A double wall reaction chamber assembly comprising a cylindrical inner wall and a cylindrical outer wall axially parallel thereto, the inner wall having an annular junction with a thickened annular junction flange on the outer surface thereof. The lower end of the outer wall being fused to the outer surface of the thickened annular junction. The outer surface of the inner wall and the inner surface of the annular junction flange define a sloping annular drainage channel to a downwardly sloping drainage port, enabling liquid to drain from the junction. The double wall reaction chamber assembly has a cylindrical inner wall and a cylindrical outer wall axially parallel thereto. It has a lower end fused to the inner wall. A gas distribution tube has a gas inlet end and a gas distributor end, the gas distributor end comprising a split tee having a junction. One leg of the tee extends in a first direction from the junction around the inner wall to a first outlet terminus, and the other leg of the tee extends from the junction in a second direction around the inner wall in a direction opposite to the first direction and to a second outlet terminus. The legs of the tee slope downward from the junction to the respective outlet terminus, whereby liquid in the gas distributor will completely drain from the assembly.
摘要翻译：一种双壁反应室组件，包括圆柱形内壁和与其平行的圆柱形外壁，内壁具有与其外表面上的增厚的环形接合凸缘的环形接合部。外壁的下端与增厚的环形结的外表面熔合。内壁的外表面和环形接合凸缘的内表面限定了向下倾斜的排水口的倾斜的环形排水通道，使得液体能够从连接处排出。双壁反应室组件具有圆柱形内壁和与其平行的圆柱形外壁。它具有与内壁熔合的下端。气体分配管具有气体入口端和气体分配器端，气体分配器端包括具有连接点的分流三通。三通的一条腿从第一方向从内壁的连接处延伸到第一出口端，并且三通的另一条腿在第二方向上以与第一方向相反的方向围绕内壁延伸并到第二个出口总站。三通的腿从接头向下倾斜到相应的出口端，由此气体分配器中的液体将完全从组件排出。

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