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    • 1. 发明授权
    • Electrochemical photoetching of compound semiconductors
    • 化学半导体的电化学光刻
    • US4414066A
    • 1983-11-08
    • US416472
    • 1982-09-10
    • Stephen R. ForrestPaul A. KohlRichard L. Panock
    • Stephen R. ForrestPaul A. KohlRichard L. Panock
    • C25F3/12H01L21/3063H01L21/465H01L21/467
    • H01L21/467C25F3/12H01L21/30635H01L21/465
    • A procedure is described for electrochemically photoetching n-type and intrinsic compound semiconductors. The process involves applying a potential to the compound semiconductor while it is in contact with an electrolytic solution and irradiating the surface to be etched with light in a certain energy range. By suitable adjustment in the potential, electrolytic solution composition and light energy, the etch rate is made proportional to the light intensity. By suitable variation in light intensity and light-ray direction, various geometrical features can be made on the surface of the compound semiconductor. For example, a hole with straight sides can be made in the compound semiconductor by use of a light spot and parallel (collimated) light rays. An advantageous application of this process is the fabrication of a photodiode with a hole in the center for use in bidirectional communication systems and to monitor power output for optical communication sources. The advantage of this process is that no damage occurs outside etched hole so that a maximum area of the photodiode remains active for detecting incoming radiation. Another advantage of the process is that etching will stop where the material becomes p-type so that etching can be made to stop automatically at a p/n junction.
    • 描述了用于电化学光刻n型和本征化合物半导体的方法。 该方法包括在化合物半导体与电解液接触的同时施加电位,并在一定的能量范围内用光照射被蚀刻的表面。 通过适当调整电位,电解液组成和光能,刻蚀速率与光强成正比。 通过适当的光强度和光线方向的变化,可以在化合物半导体的表面上形成各种几何特征。 例如,可以通过使用光点和平行(准直)光线在化合物半导体中制造具有直边的孔。 该方法的有利应用是制造在中心具有用于双向通信系统的孔的光电二极管,并监视光通信源的功率输出。 该方法的优点是在蚀刻孔外部不产生损伤,使得光电二极管的最大面积保持活跃以检测入射辐射。 该方法的另一个优点是,在材料变为p型的情况下,蚀刻将停止,使得蚀刻可以在p / n结处自动停止。
    • 2. 发明授权
    • Photodiodes having a hole extending therethrough
    • 具有延伸穿过其中的孔的光电二极管
    • US4577209A
    • 1986-03-18
    • US653885
    • 1984-09-25
    • Stephen R. ForrestRichard L. Panock
    • Stephen R. ForrestRichard L. Panock
    • H04B10/24H01L27/14
    • H04B10/40
    • A single-wavelength, bidirectional fiber optic transmission system is described in which at each terminal the output radiation of a light source (LED or semiconductor laser) is coupled through a small diameter hole in the active area of a photodiode into the core of a larger diameter transmission fiber. On the other hand, radiation propagating through the fiber in the opposite direction exits from the fiber with a large NA so that most of it is incident on the active area of the photodiode and little is lost through the hole. Also described are a number of photodiode configurations for use in such a system, as well as dual photodiodes to perform both signal detection and output monitoring functions.
    • 描述了单波长双向光纤传输系统,其中在每个端子处,光源(LED或半导体激光器)的输出辐射通过光电二极管的有源区域中的小直径孔耦合到较大的核心中 直径传输光纤。 另一方面,沿相反方向传播通过光纤的辐射以大的NA离开纤维,使得其大部分入射到光电二极管的有源区域上,并且几乎不通过孔而损失。 还描述了用于这种系统的多个光电二极管配置以及执行信号检测和输出监视功能的双光电二极管。
    • 3. 发明授权
    • Bidirectional fiber optic systems
    • 双向光纤系统
    • US4709413A
    • 1987-11-24
    • US744465
    • 1985-06-13
    • Stephen R. ForrestRobert A. LiebermanRichard L. Panock
    • Stephen R. ForrestRobert A. LiebermanRichard L. Panock
    • G02B6/42H04B10/24H04B9/00A61B5/02C12M1/34
    • H04B10/40G02B6/4204
    • A bidirectional fiber optic system is described in which at one terminal the output radiation of a light source (LED or semiconductor laser) is coupled through a small diameter hole in the active area of a photodiode into the core of a larger diameter transmission fiber. On the other hand, radiation propagating through the fiber in the opposite direction exits from the fiber with a large numerical aperture so that most of it is incident on the active area of the photodiode and little is lost through the hole. Also described are a number of photodiode configurations for use in such a system, as well as dual photodiodes to perform both signal detection and output monitoring functions. Further described are fiber optic sensing systems for monitoring such variables as blood pressure.
    • 描述了一种双向光纤系统,其中在一个端子处,光源(LED或半导体激光器)的输出辐射通过光电二极管的有源区域中的小直径孔耦合到较大直径的传输光纤的芯中。 另一方面,沿着相反方向通过光纤传播的辐射从具有大数值孔径的光纤中退出,使得其大部分入射到光电二极管的有源区域上,并且几乎不会通过孔而损失。 还描述了用于这种系统的多个光电二极管配置以及执行信号检测和输出监视功能的双光电二极管。 进一步描述的是用于监测诸如血压的变量的光纤传感系统。