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    • 1. 发明申请
    • IMMERSION EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    • 倾斜曝光装置和装置制造方法
    • US20090268176A1
    • 2009-10-29
    • US12431238
    • 2009-04-28
    • Haruna KawashimaNobuyuki Saito
    • Haruna KawashimaNobuyuki Saito
    • G03B27/52
    • G03F7/70916G03F7/70341G03F7/7085
    • An immersion exposure apparatus including an optical element 11, a reflective surface 42, a water repellent coating layer 43 in which peeled areas 45 and 46 are formed, a light intensity sensor 4 which detects light intensity of first light and second light, and an arithmetic processing unit which calculates a reflectance of the optical element 11, wherein the first light enters the projection optical system 1, passes through the peeled area 46 to be reflected by the reflective surface 42, is reflected on a surface of the optical element 11, and passes through the peeled area 45 to be received by the light intensity sensor 4, and the second light enters the projection optical system 1 and passes through the peeled area 45 to be received by the light intensity sensor 4 without being reflected on the reflective surface 42 and the surface of the optical element 11.
    • 浸渍曝光装置包括光学元件11,反射表面42,形成有剥离区域45和46的防水涂层43,检测第一光和第二光的光强度的光强度传感器4和算术 处理单元,其计算第一光进入投影光学系统1的光学元件11的反射率,通过被剥离区域46以被反射表面42反射,在光学元件11的表面上被反射, 通过被剥离区域45以被光强度传感器4接收,并且第二光线进入投影光学系统1并且通过剥离区域45以被光强度传感器4接收而不被反射在反射表面42上 和光学元件11的表面。
    • 2. 发明申请
    • FINE POWDER OF SINGLE CRYSTALLINE DIAMOND PARTICLES AND A METHOD FOR THE PRODUCTION THEREOF
    • 单晶金刚石颗粒的精细粉末及其生产方法
    • US20090175776A1
    • 2009-07-09
    • US11813738
    • 2006-01-01
    • Nobuyuki SaitoHisao ShirasawaHiroshi YamanakaHiroshi Ishizuka
    • Nobuyuki SaitoHisao ShirasawaHiroshi YamanakaHiroshi Ishizuka
    • C01B31/06
    • C30B29/04B01D21/02B82Y30/00C01B32/28C01P2004/64C09K3/1409C30B29/605
    • An object of this invention is to provide a fine powder of diamond particles of less than 50 nm with a narrow particle size range. The diamond is single crystalline and characterized with a lot of sharp edges and sharp points. Another object is to provide a method for efficiently producing such fine powder.The method comprises mechanically crushing a raw material of single crystalline diamond particles to prepare starting minute particles of diamond, then imparting hydrophilic quality to the surface of diamond particles. As hydrophilic the diamond particles are dispersed in water to form a slurry, which is set and kept weakly alkaline. The slurry is then subjected to a preliminary grading step, whereby the slurry is removed of a top particle size fraction of the diamond particles that has a D50 size of 60 nm or more. Eliminated of said top particle size fraction, the slurry is then diluted with water to regulate the diamond concentration to 0.1% (by weight) or less. The slurry so conditioned is subjected to a centrifugal force, whereby a coarser particle size fraction of the diamond particles is condensed to a solid cake and removed from the slurry. Effluent slurry is taken out from the centrifugal grading that contains a fraction of the diamond particles having decreased particle sizes.
    • 本发明的目的是提供具有窄的粒度范围的小于50nm的金刚石颗粒的细粉末。 钻石是单晶的,其特征是具有很多锋利的边缘和尖锐的点。 另一个目的是提供一种有效生产这种细粉的方法。 该方法包括机械破碎单晶金刚石颗粒的原料,以制备金刚石的起始微小颗粒,然后赋予金刚石颗粒表面亲水性。 作为亲水性,金刚石颗粒分散在水中以形成浆料,其被固化并保持弱碱性。 然后对浆料进行预分级步骤,由此除去具有D50尺寸为60nm或更大的金刚石颗粒的顶部颗粒尺寸级分的浆料。 除去所述顶部颗粒尺寸级分,然后用水稀释浆料以将金刚石浓度调节至0.1%(重量)以下。 将如此调理的浆料经受离心力,由此将金刚石颗粒的较粗颗粒级分冷凝至固体滤饼并从浆料中除去。 从离心分级中取出流出的浆料,其中含有一部分具有降低的粒度的金刚石颗粒。
    • 4. 发明申请
    • EXPOSURE APPARATUS AND DEVICE MANUFACTURING METHOD
    • 曝光装置和装置制造方法
    • US20090033904A1
    • 2009-02-05
    • US12179923
    • 2008-07-25
    • Haruna KawashimaNobuyuki Saito
    • Haruna KawashimaNobuyuki Saito
    • G03B27/52G01N21/55
    • G03F7/70983G03F7/70225G03F7/70591G03F7/70941
    • This invention provides an exposure apparatus which exposes a substrate (51) with a pattern formed on a reticle (3), and includes a projection optical system (1) including an optical element (11-14) and a reflecting surface (42) which reflects light toward the projection optical system (1). The exposure apparatus further includes a processor (P) which obtains information indicating a surface condition of the optical element (11-14) based on first light which is incident on the projection optical system (1) and reflected by the reflecting surface (42) and a surface of the optical element (11-14) and second light which is incident on the projection optical system (1) and not reflected by the reflecting surface (42) and the surface of the optical element (11-14).
    • 本发明提供了一种曝光装置,其以形成在标线片(3)上的图案露出基板(51),并且包括具有光学元件(11-14)和反射表面(42)的投影光学系统(1) 将光朝向投影光学系统(1)反射。 曝光装置还包括处理器(P),其基于入射到投影光学系统(1)并被反射表面(42)反射的第一光获得指示光学元件(11-14)的表面状态的信息, 以及光学元件(11-14)的表面和入射到投影光学系统(1)上并且不被反射表面(42)反射并且不被光学元件(11-14)的表面反射的第二光。
    • 5. 发明授权
    • Data transfer control device, electronic instrument, and data transfer control method
    • 数据传输控制装置,电子仪器和数据传输控制方法
    • US07219238B2
    • 2007-05-15
    • US10379910
    • 2003-03-06
    • Nobuyuki SaitoYoshimi Oka
    • Nobuyuki SaitoYoshimi Oka
    • H04L9/00H04L9/32G06F11/30G06F12/14G06F13/28G06F15/16
    • H04N21/42661G06F21/85
    • Data to be transferred from a BUS1 (IEEE 1394 or USB) is encrypted by a second encryption process (DES) and the encrypted data is written to an external SDRAM through an external terminal of a data transfer control device. The encrypted data that has been written to the SDRAM is read through the external terminal, and the thus-read encrypted data is transferred to a BUS2 to which an HDD is connected. Encrypted data transferred from the BUS1 is decrypted by a first decryption process (DTCP), and is written to a small-capacity SRAM within the data transfer control device. The thus-written decrypted data is read from the SRAM and encrypted by the second encryption process. Paths that bypass the second encryption (or decryption) are also provided.
    • 要从BUS 1(IEEE 1394或USB)传送的数据通过第二加密处理(DES)进行加密,并且加密数据通过数据传输控制装置的外部端子写入外部SDRAM。 已写入SDRAM的加密数据通过外部端子读取,这样读取的加密数据被传送到连接有HDD的总线2。 从总线1传送的加密数据由第一解密处理(DTCP)解密,并被写入数据传送控制装置内的小容量SRAM。 这样写入的解密数据从SRAM中读取并通过第二加密处理进行加密。 还提供绕过第二次加密(或解密)的路径。
    • 6. 发明授权
    • Data transfer control device including buffer controller with plurality of pipe regions allocated to plurality of endpoints
    • 数据传输控制装置包括具有分配给多个端点的多个管道区域的缓冲器控制器
    • US07028109B2
    • 2006-04-11
    • US10377763
    • 2003-03-04
    • Nobuyuki SaitoShinsuke KubotaHiroaki ShimonoKuniaki Matsuda
    • Nobuyuki SaitoShinsuke KubotaHiroaki ShimonoKuniaki Matsuda
    • G06F3/00
    • G06F13/4022
    • A plurality of pipe regions PIPE0 to PIPEe in which data transferred to and from endpoints is stored are allocated in a packet buffer (FIFO). Transfer condition information on data transfer between the pipe regions and the endpoints is set in transfer condition registers TREG0 to TREGe in a register section. A host (transfer) controller automatically generates a transaction for each of the endpoints based on the transfer condition information (total size, maximum packet size, transfer direction, number of continuous execution times, token issue interval, and the like) set in the transfer condition registers, and automatically transfers data between each pipe region and the endpoint. An OTG (state) controller which controls a state of USB On-The-Go is provided. The pipe regions are allocated in the packet buffer during a host operation.
    • 在存储分组缓冲器(FIFO)的情况下分配存储了从端点传送的数据的多个管道区域PIPE 0〜PIPEe。 在管道区域和端点之间的数据传输的转移条件信息被设置在寄存器部分的传送条件寄存器TREG 0到TREGe中。 主机(传输)控制器根据转移中设置的传送条件信息(总大小,最大包大小,传送方向,连续执行次数,令牌发放间隔等)自动生成每个端点的事务。 条件寄存器,并在每个管道区域和端点之间自动传输数据。 提供控制USB On-The-Go状态的OTG(状态)控制器。 管道区域在主机操作期间被分配在分组缓冲器中。