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    • 3. 发明授权
    • Humidity sensing element of electric capacitance change type and method
of producing same
    • 电容变化型湿度传感元件及其制造方法
    • US4276128A
    • 1981-06-30
    • US14382
    • 1979-02-21
    • Atsushi NishinoAkihiko YoshidaNobukuni Ogino
    • Atsushi NishinoAkihiko YoshidaNobukuni Ogino
    • G01N27/22G01R27/26H01G9/05
    • G01N27/225G01R27/2605Y10T29/417
    • A device comprising a dielectric oxide film formed by anodization of a surface region of a valve metal body, a semiconductive metal oxide layer porously formed on the dielectric oxide film, and a gas permeable electrode layer formed on the semiconductive metal oxide layer with the interposal of a gas permeable carbon layer therebetween. The semiconductive metal oxide layer is formed by pyrolysis of a metal salt solution so as to be, microscopically, only partially in contact with the dielectric oxide film. After forming of the electrode layer, the device is immersed in boiling water and/or kept in a high temperature high humidity atmosphere for an adequate amount of time to stabilize the semiconductive metal oxide layer, resulting in that the semiconductive metal oxide layer has a multiplicity of microscopic crevices and that the device becomes quite stable in the relation between humidity and electrostatic capacitance of the device.
    • 一种包括通过阳极氧化阀金属体的表面区域形成的电介质氧化膜的装置,在电介质氧化膜上形成的半导体金属氧化物层,以及形成在半导体金属氧化物层上的透气电极层, 它们之间的透气性碳层。 半导体金属氧化物层是通过金属盐溶液的热解形成的,以便在显微镜下仅部分地与电介质氧化膜接触。 在形成电极层之后,将装置浸入沸水中和/或在高温高湿气氛中保持足够的时间以稳定半导体金属氧化物层,导致半导体金属氧化物层具有多重性 的微观裂缝,并且器件在器件的湿度和静电电容之间的关系变得相当稳定。