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2. 发明申请

US20160295676A1 METHOD FOR GENERATING AN ATMOSPHERIC PLASMA JET AND ATMOSPHERIC PLASMA MINITORCH DEVICE 有权
标题翻译：产生大气等离子体喷射和大气等离子体装置的方法
公开(公告)号：US20160295676A1
公开(公告)日：2016-10-06
申请号：US15035759
申请日：2014-11-14
申请人： NADIR S.r.l.
发明人： Alessandro PATELLI , Emanuele VERGA FALZACAPPA , Paolo SCOPECE , Roberto PIEROBON , Simone VEZZU'
IPC分类号： H05H1/30 , H05H1/24
CPC分类号： H05H1/30 , H05H1/2406 , H05H2001/2462 , H05H2245/125
摘要： A method and a device for generating a plasma in atmospheric-pressure, low-temperature conditions are described herein. The device described for the generation of the plasma comprises a first pair of electrodes, each of which separated by a dielectric layer and externally positioned with respect to a tubular duct where the gas flows, and a second pair of electrodes, also in this case each of which separated by a dielectric layer and externally positioned with respect to said tubular duct where the same gas flows downstream with respect to the first pair with respect to the direction of the flow. A high-frequency excitation is applied to the first pair of electrodes while a Radio-Frequency excitation is applied to the second pair of electrodes. The plasma generated in this manner emerges from the gas flow at the outlet of the transport duct. The high-frequency excitation can be applied in pulse trains and the Radio-Frequency generator is substantially activated in said pulse trains for the purpose of limiting the thermal load on the treated substrate. Chemical precursors and reagents can be added to the plasma as vapors or aerosols by means of a central transport duct coaxial with the tubular duct for the gas.
摘要翻译：本文描述了用于在大气压低温条件下产生等离子体的方法和装置。用于产生等离子体的装置包括第一对电极，每个电极由电介质层分离，并相对于气体流动的管状导管在外部定位;以及第二对电极，在这种情况下也分别为其中介电层分隔开并相对于所述管状导管在外部定位，其中相同气体相对于流动方向相对于第一对下游流动。对第一对电极施加高频激励，同时对第二对电极施加射频激励。以这种方式产生的等离子体从输送管道出口处的气流中流出。高频激励可以应用在脉冲串中，并且射频发生器在所述脉冲串中基本上被激活，以限制处理过的衬底上的热负荷。化学前体和试剂可以通过与用于气体的管状管道同轴的中心输送管道作为蒸气或气溶胶添加到等离子体中。

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