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    • 7. 发明申请
    • ALIGNING DEVICE, BONDING APPARATUS, AND ALIGNING METHOD
    • 对准装置,联结装置和对准方法
    • US20080245472A1
    • 2008-10-09
    • US12137286
    • 2008-06-11
    • Atsuhiko HirataShigeki FukunagaShigeki YamaneMitsuhiro NamuraArata SuzukiTomonari Watanabe
    • Atsuhiko HirataShigeki FukunagaShigeki YamaneMitsuhiro NamuraArata SuzukiTomonari Watanabe
    • H05K3/30G02F1/13
    • H01L21/682B32B37/0046B32B38/1833B32B2305/55B32B2309/68B32B2309/70B32B2457/14G02F2001/133354Y10T29/49131Y10T29/5313Y10T29/53174Y10T29/53178Y10T29/53183Y10T156/1075
    • An aligning device that can reliably correct misalignment between electronic components for increasing the accuracy in aligning the electronic components, a bonding apparatus equipped with the aligning device, and an aligning method. The aligning device comprises a chamber; a flexible bellows configured to define an airtight chamber therein with the chamber; a driving unit configured to move one of a first block member and a second block member relative to the other, the first block member being for holding a first electronic component and being provided in the airtight chamber, and the second block member being for holding a second electronic component and being provided in the airtight chamber; and an image-taking port protruding inward from an outer surface of the chamber so as to define a space, the image-taking port having an observation window through which at least one of the first electronic component and the second electronic component is observed. In an embodiment, an image-taking port 21 protrudes inward from an outer surface of a chamber 3 so as to define a space 11. Thus, even when the chamber 3 moves together with a second block-member 28, an image recognizing device 47 can be provided in the space 11 so as to be prevented from interfering with the motion of the chamber 3. This allows the chamber 3 to freely move without any restriction. As a result, one of a first block member 12 and the second block member 28 can be freely moved relative to the other without being restricted by the placement of the image recognizing device 47, and a first wafer W1 and a second wafer W2 can be aligned reliably.
    • 可以可靠地校正电子部件之间的未对准的对准装置,用于提高对准电子部件的精度,配备有对准装置的接合装置和对准方法。 对准装置包括一个室; 柔性波纹管,其构造成在其中与所述腔室限定气密室; 驱动单元,其构造成相对于另一块移动第一块构件和第二块构件中的一个,所述第一块构件用于保持第一电子部件并设置在所述气密室中,并且所述第二挡块构件用于保持 第二电子部件并设置在气密室中; 以及从所述室的外表面向内突出以形成空间的摄像端口,所述摄像端口具有观察窗,通过所述观察窗观察所述第一电子部件和所述第二电子部件中的至少一个。 在一个实施例中,摄像端口21从腔室3的外表面向内突出,以限定空间11。 因此,即使当室3与第二块构件28一起移动时,也可以在空间11中设置图像识别装置47,以防止与室3的运动相干扰。 这允许室3自由移动而没有任何限制。 结果,第一块构件12和第二块构件28中的一个可以相对于另一个而不受图像识别装置47的放置的限制而自由移动,并且第一晶片W 1和第二晶片W 2 可以可靠地对齐。
    • 8. 发明授权
    • Feeder for chip components
    • 芯片组件馈线
    • US06705819B1
    • 2004-03-16
    • US09678096
    • 2000-10-04
    • Akira NemotoShigeki TakahashiNihei KaishitaMitsuhiro Namura
    • Akira NemotoShigeki TakahashiNihei KaishitaMitsuhiro Namura
    • B65B2102
    • B65G23/38B65G27/12B65G47/06H05K13/022
    • A feeder for chip components is provided wherein the chip components can be supplied with high stability even in high-speed operation by operating a conveying member at a lower speed than that of a chip mounter and operating the conveying member even when the chip mounter is stopped. The chip components on a belt are supplied in one direction by lowering a feed lever according to the input load from a chip mounter so as to drive the belt connected to the feed lever via a transmission mechanism intermittently in one direction. urging means is provided for urging the feed lever in the returning direction by storing the input load of the chip mounter as energy while an eddy current damper is provided for delaying the returning operation of the feed lever relative to the returning operation of the chip mounter. When the chip mounter operates downwardly, the feed lever is moved downwardly by linking to the chip mounter while the conveyor belt is maintained in a stationary state. When the chip mounter operates upwardly, the feed lever is moved upwardly so as to be delayed relative to the chip mounter by the eddy current damper while the belt is driven at a low speed.
    • 提供了一种用于芯片部件的馈线,其中即使在高速操作中,即使在芯片安装器停止时,也可以以比芯片安装器低的速度操作输送部件并操作输送部件,可以提供高稳定性的芯片部件 。 通过根据来自芯片安装器的输入负载降低进给杆,沿着一个方向间歇地驱动通过传动机构驱动连接到进给杆的皮带,从而沿一个方向供给皮带上的切屑部件。 提供推动装置,用于通过将芯片安装机的输入负载作为能量存储来提供馈送杆,同时设置涡流阻尼器以延迟馈送杆相对于芯片安装机的返回操作的返回操作。 当芯片安装器向下操作时,馈送杆通过连接到芯片安装器而向下移动,同时传送带保持在静止状态。 当芯片安装器向上操作时,馈送杆向上移动,以便当带子以低速驱动时,通过涡流阻尼器相对于芯片安装器延迟。