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    • 1. 发明授权
    • Vestibule assembly for a heat treatment furnace
    • 用于热处理炉的前庭组件
    • US07293986B2
    • 2007-11-13
    • US10429834
    • 2003-05-06
    • Kevin B. PeckMike D. SolidayJim Sanches
    • Kevin B. PeckMike D. SolidayJim Sanches
    • F27D15/02
    • H01L21/67109F27B17/0025F27D9/00
    • The present invention provides a heat treating process chamber having a housing with a flow passage in communication with a vestibule assembly. The vestibule assembly includes an outer ring with a first groove and an inner ring with a second groove. The first groove is formed in an axially inwardly facing surface of the outer ring. The first groove has a portion open in a radially outer direction and an axially inner direction. The second groove opens in an axially inner direction and is formed in an axially outwardly facing surface of the inner ring. The first and second grooves form a passageway when they are in an axially superimposed relationship. The first groove forms a radially outwardly open end and the second groove forms an axially inwardly facing end of the passageway. The passageway communicates with the flow passage thereby allowing passage of a temperature adjusting medium.
    • 本发明提供一种具有壳体的热处理处理室,该壳体具有与前庭组件连通的流动通道。 前庭组件包括具有第一凹槽的外环和具有第二凹槽的内环。 第一槽形成在外环的轴向向内的表面中。 第一凹槽具有在径向外侧方向和轴向内部方向上敞开的部分。 第二凹槽在轴向内部方向上开口并且形成在内圈的轴向向外的表面中。 当它们处于轴向重叠的关系中时,第一和第二槽形成通道。 第一凹槽形成径向向外开口的端部,第二凹槽形成通道的轴向向内的端部。 通道与流路连通,从而允许温度调节介质通过。