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    • 8. 发明授权
    • Dual-layer carbon-based protective overcoats for recording media by filtered cathodic ARC deposition
    • 用于通过过滤阴极ARC沉积记录介质的双层碳基保护涂层
    • US07175926B2
    • 2007-02-13
    • US10776191
    • 2004-02-12
    • Xiaoding MaMichael Joseph StirnimanJing Gui
    • Xiaoding MaMichael Joseph StirnimanJing Gui
    • G11B5/72
    • G11B5/72C23C14/0605G11B5/8408Y10T428/24975Y10T428/24983Y10T428/24992
    • A recording medium, comprising: (a) a substrate having at least one surface; (b) a stacked plurality of thin film layers on the at least one surface and including at least one magnetic or magneto-optical (MO) recording layer; and (c) a protective overcoat layer on an outer surface of an outermost layer of the layer stack, comprising: (i) a first sub-layer layer (c1) of undoped tetrahedral amorphous carbon (ta-C) formed by filtered cathodic arc deposition (FCAD) on the outer surface of the outermost layer of the stacked plurality of thin film layers and having a high mass density of carbon (C) atoms greater than about 2.5 gms/cm3; and (ii) a second sub-layer (c2) of nitrogen-doped tetrahedral amorphous carbon (ta-C:N) formed by FCAD on the undoped ta-C layer and having a high mass density of carbon (C) atoms greater than about 2.0 gms/cm3.
    • 一种记录介质,包括:(a)具有至少一个表面的基底; (b)在所述至少一个表面上堆叠的多个薄膜层,并且包括至少一个磁光或磁光(MO)记录层; (c)在层叠体的最外层的外表面上的保护性外涂层,包括:(i)未掺杂的四面体无定形碳(ta)的第一子层层(c 1) -C)通过过滤的阴极电弧沉积(FCAD)形成在层叠的多个薄膜层的最外层的外表面上,并且具有大于约2.5gms / cm 2的碳(C)原子的高质量密度, 3 ; 和(ii)由FCAD在未掺杂的Ta-C层上形成并且具有高质量密度的由氮化物掺杂的四面体无定形碳(ta-C:N)的第二子层(c 2 N 2) 的碳(C)原子大于约2.0gms / cm 3。