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    • 2. 发明申请
    • Apparatus for conveying gases to and from a chamber
    • 用于将气体输送到室的设备
    • US20060289071A1
    • 2006-12-28
    • US10574036
    • 2004-09-24
    • Michael Czerniak
    • Michael Czerniak
    • B67D5/00E03B5/00E03B11/00
    • C23C16/45544Y10T137/85986Y10T137/86163Y10T137/87249Y10T137/87281Y10T137/87338
    • Apparatus comprising: a chamber having a chamber inlet and a chamber outlet; a first inlet for receiving a first gas stream; a second inlet for receiving a second gas stream; a first outlet for outputting the first gas stream to a first vacuum pump; a second outlet for outputting the second gas stream to a second vacuum pump; a conduit network for connecting the first inlet to the first outlet and for connecting the second inlet to the second outlet such that, for each gas stream, first and second flow paths are defined between its respective inlet and outlet, the first flow path passing through the chamber inlet and the chamber outlet, and the second flow path by-passing the chamber, and means for routing the gas streams through the network such that when one gas stream flows along its first flow path, the other gas stream flows along its second flow path.
    • 一种装置,包括:具有室入口和室出口的室; 用于接收第一气流的第一入口; 用于接收第二气流的第二入口; 用于将第一气流输出到第一真空泵的第一出口; 用于将第二气流输出到第二真空泵的第二出口; 用于将第一入口连接到第一出口并用于将第二入口连接到第二出口的管道网络,使得对于每个气流,在其相应的入口和出口之间限定第一和第二流动路径,第一流动路径通过 腔室入口和腔室出口以及旁路腔的第二流路,以及用于将气流引导通过网络的装置,使得当一个气流沿其第一流动路径流动时,另一个气流沿其第二个流动流动 流路。