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    • 1. 发明授权
    • Swash plate compressor including a connection mechanism between a piston and an inside surface of a crank chamber
    • 斜盘式压缩机包括在活塞和曲柄室的内表面之间的连接机构
    • US06398519B1
    • 2002-06-04
    • US09714177
    • 2000-11-17
    • Isamu FukaiKeiji ShimizuMasayuki Kurihara
    • Isamu FukaiKeiji ShimizuMasayuki Kurihara
    • F04B112
    • F04B27/0878F04B27/1081
    • A swash plate compressor includes a cylinder block having positioned therein a plurality of cylinders and a crank chamber. Each of a plurality of pistons has a head portion and a skirt portion. The head portion of the piston is slidably disposed within one of the cylinders. The skirt portion of the piston slidably abuts on an inside surface of the crank chamber, and by its action the pistons are prevented from nutating axes when the pistons are driven in a reciprocating motion within the cylinders upon rotation of the swash plate. The crank chamber has a truncated cone-shape, the inside diameter of which is reduced between a top dead center and a bottom dead center of the piston. The structure for the swash plate compressor according to this invention reduces vibration and noise caused by the nutation of the pistons.
    • 旋转斜盘压缩机包括其中定位有多个气缸和曲柄室的气缸体。 多个活塞中的每一个具有头部和裙部。 活塞的头部可滑动地设置在一个气缸内。 活塞的裙部可滑动地抵靠曲柄室的内表面,并且通过其作用,当旋转斜盘时活塞在气缸内以往复运动的方式被驱动时,可以防止活塞受到章动轴。 曲柄室具有截头圆锥形,其内径在活塞的上止点和下死点之间减小。 根据本发明的斜盘式压缩机的结构减少了由活塞的章动引起的振动和噪音。
    • 4. 发明授权
    • IC fault analysis system having charged particle beam tester
    • 具有带电粒子束测试仪的IC故障分析系统
    • US5640098A
    • 1997-06-17
    • US593549
    • 1996-01-30
    • Hironobu NiijimaHiroshi KawamotoAkira GoishiMasayuki KuriharaToshimichi Iwai
    • Hironobu NiijimaHiroshi KawamotoAkira GoishiMasayuki KuriharaToshimichi Iwai
    • G01R31/307G01R31/319G01R31/305
    • G01R31/307G01R31/31912
    • An IC fault analysis system which is capable of accurately correlating mask layout data and/or net listing data associated with CAD (computer aided design) data developed in the IC design and an image obtained by a non-contact type tester such as an electron beam tester. The IC fault analysis system includes a circuit diagram display for showing a circuit diagram of the IC device under test based on the CAD data, a mask layout display for showing a mask layout of the IC device under test based on the CAD data, a contrast image display for showing a potential distribution of the IC device under test obtained in the non-contact type tester, an input means connected to the circuit diagram display for specifying a circuit component of the IC device under test, a comparison means for comparing the circuit diagram of the circuit component defined by the input means and contrast image corresponding to the circuit component, and a comparison data memory for storing the comparison data of the comparison means and providing the comparison data to the contrast image display.
    • 一种IC故障分析系统,其能够精确地将与IC设计中开发的CAD(计算机辅助设计)数据相关联的掩模布局数据和/或净列表数据相关联,以及由诸如电子束之类的非接触型测试仪获得的图像 测试仪 IC故障分析系统包括用于示出基于CAD数据的被测IC器件的电路图的电路图显示,用于显示基于CAD数据的被测IC器件的掩模布局的掩模布局显示,对比度 用于示出在非接触型测试仪中获得的被测IC器件的电位分布的图像显示器,连接到用于指定被测IC器件的电路部件的电路图显示器的输入装置,用于比较电路 由对应于电路部件的输入装置和对比度图像定义的电路部件的图表,以及用于存储比较装置的比较数据并将比较数据提供给对比度图像显示的比较数据存储器。
    • 9. 发明授权
    • IC analysis system having charged particle beam apparatus for improved
contrast image
    • 具有用于改善对比度图像的带电粒子束装置的IC分析系统
    • US5640539A
    • 1997-06-17
    • US309750
    • 1994-09-21
    • Akira GoishiMasayuki KuriharaKoshi Ueda
    • Akira GoishiMasayuki KuriharaKoshi Ueda
    • G01Q30/00G01R31/307G06F17/00G21K1/08H01J37/304
    • G01R31/307
    • The object of the invention is to provide an IC analysis system having a charged particle beam apparatus in which the operability and picture quality have been enhanced and the measurement method of a device under test. In the IC analysis system, stop signal generating means in which the stop signal stimulates the acquisition of image data is added to a test pattern generator and acquisition completion signal generating means which releases the stopping state on completing the acquisition of image data and which resumes the test pattern updating operation is added to the charged particle beam apparatus. Furthermore, by adding mode select means to the charged particle beam apparatus, a clearer potential contrast image can be obtained. The methods for locating fault positions can be realized in the IC analysis system having the charged particle beam apparatus wherein the image data can be obtained by alternate test patterns, or by adding one image data to the reverse potential of another image data, or by scanning and irradiating the charged particle beam onto the same surface of the device at a plurality of times.
    • 本发明的目的是提供一种具有带电粒子束装置的IC分析系统,其中可操作性和图像质量得到提高,并且被测装置的测量方法。 在IC分析系统中,停止信号刺激图像数据的获取的停止信号产生装置被添加到测试图案发生器和获取完成信号产生装置,在完成图像数据的获取时释放停止状态,并且恢复 将测试图案更新操作添加到带电粒子束装置中。 此外,通过向带电粒子束装置添加模式选择装置,可以获得更清晰的电位对比图像。 用于定位故障位置的方法可以在具有带电粒子束装置的IC分析系统中实现,其中可以通过替代测试图案获得图像数据,或者通过将一个图像数据添加到另一图像数据的反向电位,或通过扫描 并且多次将带电粒子束照射到装置的相同表面上。