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    • 6. 发明授权
    • Methods of forming dual-damascene interconnect structures on semiconductor substrates using multiple planarization layers having different porosity characteristics
    • 使用具有不同孔隙率特性的多个平坦化层在半导体衬底上形成双镶嵌互连结构的方法
    • US07365025B2
    • 2008-04-29
    • US11348428
    • 2006-02-06
    • Kyoung-Woo LeeSeung-Man ChoiJa-Hum KuKi-Chul ParkSun Oo Kim
    • Kyoung-Woo LeeSeung-Man ChoiJa-Hum KuKi-Chul ParkSun Oo Kim
    • H01L21/311
    • H01L21/76808H01L21/31144
    • Methods of forming integrated circuit devices include patterning an electrically insulating layer to support dual-damascene interconnect structures therein. The steps of patterning the electrically insulating layer include using multiple planarization layers having different porosity characteristics. Forming an interconnect structure within an integrated circuit device may include forming an electrically insulating layer on a substrate and forming at least one via hole extending at least partially through the electrically insulating layer. The at least one via hole is filled with a first electrically insulating material having a first porosity. The filled at least one via hole is then covered with a second electrically insulating material layer having a second porosity lower than the first porosity. The second electrically insulating material layer is selectively etched back to expose a first portion of the first electrically insulating material in the at least one via hole. The electrically insulating layer is selectively etched to define a trench therein that exposes a second portion of the first electrically insulating material in the at least one via hole.
    • 形成集成电路器件的方法包括图案化电绝缘层以支持其中的双镶嵌互连结构。 图案化电绝缘层的步骤包括使用具有不同孔隙特性的多个平坦化层。 在集成电路器件内形成互连结构可以包括在衬底上形成电绝缘层,并形成至少部分穿过电绝缘层延伸的至少一个通孔。 至少一个通孔填充有具有第一孔隙率的第一电绝缘材料。 填充的至少一个通孔然后被具有低于第一孔隙率的第二孔隙率的第二电绝缘材料层覆盖。 选择性地回蚀第二电绝缘材料层以暴露至少一个通孔中的第一电绝缘材料的第一部分。 电绝缘层被选择性蚀刻以在其中限定其中的沟槽,其暴露出至少一个通孔中的第一电绝缘材料的第二部分。
    • 7. 发明授权
    • Method of fabricating semiconductor device by forming diffusion barrier layer selectively and semiconductor device fabricated thereby
    • 通过选择性地形成扩散阻挡层制造半导体器件的方法和由此制造半导体器件
    • US07335590B2
    • 2008-02-26
    • US11033189
    • 2005-01-11
    • Bong-Seok SuhKi-Chul ParkSeung-Man ChoiIl-Ryong Kim
    • Bong-Seok SuhKi-Chul ParkSeung-Man ChoiIl-Ryong Kim
    • H01L21/4763
    • H01L21/76844H01L21/2855
    • In a method of fabricating a semiconductor device by selectively forming a diffusion barrier layer, and a semiconductor device fabricated thereby, a conductive pattern and an insulating layer, which covers the conductive pattern, are formed on a semiconductor substrate. The insulating layer is patterned, thereby forming an opening for exposing at least a portion of the conductive pattern. Then, a diffusion barrier layer is formed on the semiconductor substrate having the opening, using a selective deposition technique. The diffusion barrier layer is formed to a thickness that is less on the exposed conductive pattern than the thickness of the diffusion barrier layer on the insulating layer exposed inside the opening. Then, the diffusion barrier layer is etched, thereby forming a recessed diffusion barrier layer. In this manner, metal atoms are prevented from being diffused from a metal plug filling the opening or a metal interconnect to the insulating layer.
    • 在通过选择性地形成扩散阻挡层制造半导体器件的方法及其制造的半导体器件中,在半导体衬底上形成覆盖导电图案的导电图案和绝缘层。 对绝缘层进行图案化,从而形成用于暴露导电图案的至少一部分的开口。 然后,使用选择性沉积技术在具有开口的半导体衬底上形成扩散阻挡层。 扩散阻挡层形成为暴露在导电图案上的厚度小于暴露在开口内部的绝缘层上的扩散阻挡层的厚度。 然后,对扩散阻挡层进行蚀刻,从而形成凹陷扩散阻挡层。 以这种方式,防止金属原子从填充开口的金属插塞或与绝缘层的金属互连扩散。
    • 10. 发明授权
    • Apparatus for testing reliability of interconnection in integrated circuit
    • 集成电路中互连可靠性的装置
    • US06842028B2
    • 2005-01-11
    • US10766547
    • 2004-01-27
    • Won-Sang SongJung-Woo KimChang-Sub LeeSam-Young KimYoung-Jin WeeKi-Chul Park
    • Won-Sang SongJung-Woo KimChang-Sub LeeSam-Young KimYoung-Jin WeeKi-Chul Park
    • G01R31/02G01R31/28
    • G01R31/2853
    • In the present invention, an apparatus of testing a leakage protection reliability of an integrated circuit interconnection. The apparatus has at least one comb-like pattern, a serpentine-like pattern and means of applying a bias to the patterns and forms a maximum field region at an interconnection formed around a via, i.e., at the end of a tooth portion composing the comb-like pattern. In one structure of the present invention, the comb-like pattern is formed at one level, and the serpentine-like pattern has a plurality of unit parts corresponding to the tooth portions, respectively, and connection parts connecting the neighboring two unit parts. Each of the unit parts is formed at the same level with the comb-like pattern and spaced apart from the tooth portion by a minimum design length according to a design rule. The unit part has vias formed through an interlayer dielectric layer at the both ends of a tooth parallel part, two tooth parallel parts connected with the vias, respectively, and a length parallel part electrically connecting two tooth parallel parts.
    • 在本发明中,一种测试集成电路互连的漏电保护可靠性的装置。 该装置具有至少一个梳状图案,蛇形样图案和向图案施加偏压的装置,并且在形成在通孔周围的互连处形成最大场区域,即构成 梳状图案 在本发明的一个结构中,梳状图案形成在一个层面上,并且蛇形状图案分别具有对应于齿部的多个单位部分和连接相邻两个单元部分的连接部分。 根据设计规则,每个单元部分与梳状图案形成在相同的高度上,并且与齿部分距离最小设计长度。 单元部分具有通过在平行部分的两端处的层间绝缘层形成的通孔,分别与通孔连接的两个齿平行部分和电连接两个齿平行部分的长度平行部分。