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    • 1. 发明申请
    • Microwave Plasma Generation Method and Microwave Plasma Generator
    • 微波等离子体发生器和微波等离子体发生器
    • US20090128041A1
    • 2009-05-21
    • US11992993
    • 2006-09-12
    • Takuya UrayamaKazunari FujiokaMasahiko Uchiyama
    • Takuya UrayamaKazunari FujiokaMasahiko Uchiyama
    • H05H1/24
    • H05H1/30
    • A microwave plasma generator in which the generating amount of radicals can be regulated easily with higher reaction efficiency while reducing gas consumption. The microwave plasma generator comprises an outer conductor (2), an inner conductor (3) arranged in the internal space (4) of the outer conductor, a discharge tube (7) having a double tube structure consisting of an inner tube (5) and an outer tube (6) and penetrating the outer and inner conductors in the axial direction, and a cavity (1) having a means for adjusting the position of the inner tube to the outer tube in the axial direction in the discharge tube. The microwave plasma generator is further provided with a first gas supply pipe (16), which has a first flow control valve (18) and supplies first gas from a gas cylinder (14) to the outer tube of the discharge tube, a second gas supply pipe (17), which has a second flow control valve (19) and supplies second gas to the inner tube of the discharge tube, a microwave generation source (21), and a microwave supplying passage (22) for supplying microwave from the microwave generation source to the cavity.
    • 一种微波等离子体发生器,其中能够以更高的反应效率容易地调节自由基的发生量,同时降低气体消耗。 微波等离子体发生器包括外导体(2),布置在外导体的内部空间(4)中的内导体(3),具有由内管(5)组成的双管结构的放电管(7) 和外管(6),其沿轴向贯通外导体和内导体;以及空腔(1),其具有用于在放电管内沿轴向调节内管与外管的位置的装置。 微波等离子体发生器还设置有第一气体供给管(16),其具有第一流量控制阀(18),并且将来自气瓶(14)的第一气体供给到排出管的外管,第二气体 供给管(17),其具有第二流量控制阀(19)并将第二气体供给到放电管的内管,微波产生源(21)和微波供给通路(22),用于从 微波产生源到腔。
    • 2. 发明申请
    • Coaxial Microwave Plasma Torch
    • 同轴微波等离子火炬
    • US20070210038A1
    • 2007-09-13
    • US10594746
    • 2005-03-25
    • Shuitsu FujiiRaju RamasamyTakuya UrayamaKazunari Fujioka
    • Shuitsu FujiiRaju RamasamyTakuya UrayamaKazunari Fujioka
    • H05H1/30
    • H05H1/30H05H1/46
    • A coaxial microwave plasma torch, comprising, an outside conductor (1) formed in a cylindrical shape, a cylindrical electric discharge tube (3) fixedly inserted into an axial hole (2) formed in the outside conductor on one end face (4) side, and a coaxial cable (6) having one end fitted to the other end face of the outside conductor. An antenna (9) electrically connected to an inside conductor (8) is fitted to the one end of the coaxial cable and extended into the electric discharge tube through a through-hole (11) axially passed through between the other end face (5) of the outside conductor and the bottom ice of the axial hole. The outside conductor (7) of the coaxial cable is electrically connected to the outside conductor, and a gas inlet pipeline (13) supplying a gas into the electric discharge tube is fitted in the outside conductor.
    • 一种同轴微波等离子体焰炬,包括形成为圆筒形状的外部导体(1),在一个端面(4)侧固定地插入形成在外部导体中的轴向孔(2)中的圆柱形放电管(3) ,以及一端配合到外导体的另一端面的同轴电缆(6)。 电连接到内部导体(8)的天线(9)装配到同轴电缆的一端,并通过在另一端面(5)之间轴向穿过的通孔(11)延伸到放电管中, 的外部导体和轴向孔的底部冰。 同轴电缆的外部导体(7)电连接到外部导体,并且将外部导体中的气体供应到放电管中的气体导入管道(13)。
    • 3. 发明授权
    • Coaxial microwave plasma torch
    • 同轴微波等离子炬
    • US07858899B2
    • 2010-12-28
    • US10594746
    • 2005-03-25
    • Shuitsu FujiiRaju RamasamyTakuya UrayamaKazunari Fujioka
    • Shuitsu FujiiRaju RamasamyTakuya UrayamaKazunari Fujioka
    • B23K9/02H05B31/26
    • H05H1/30H05H1/46
    • A coaxial microwave plasma torch, comprising, an outside conductor (1) formed in a cylindrical shape, a cylindrical electric discharge tube (3) fixedly inserted into an axial hole (2) formed in the outside conductor on one end face (4) side, and a coaxial cable (6) having one end fitted to the other end face of the outside conductor. An antenna (9) electrically connected to an inside conductor (8) is fitted to the one end of the coaxial cable and extended into the electric discharge tube through a through-hole (11) axially passed through between the other end face (5) of the outside conductor and the bottom face of the axial hole. The outside conductor (7) of the coaxial cable is electrically connected to the outside conductor, and a gas inlet pipeline (13) supplying a gas into the electric discharge tube is fitted in the outside conductor.
    • 一种同轴微波等离子体焰炬,包括形成为圆筒形状的外部导体(1),在一个端面(4)侧固定地插入形成在外部导体中的轴向孔(2)中的圆柱形放电管(3) ,以及一端配合到外导体的另一端面的同轴电缆(6)。 电连接到内部导体(8)的天线(9)装配到同轴电缆的一端,并通过在另一端面(5)之间轴向穿过的通孔(11)延伸到放电管中, 的外部导体和轴向孔的底面。 同轴电缆的外部导体(7)电连接到外部导体,并且将外部导体中的气体供应到放电管中的气体导入管道(13)。
    • 4. 发明授权
    • Microwave plasma generation method and microwave plasma generator
    • 微波等离子体发生方法和微波等离子体发生器
    • US07795818B2
    • 2010-09-14
    • US11992993
    • 2006-09-12
    • Takuya UrayamaKazunari FujiokaMasahiko Uchiyama
    • Takuya UrayamaKazunari FujiokaMasahiko Uchiyama
    • H05B31/26
    • H05H1/30
    • A microwave plasma generator in which the generating amount of radicals can be regulated easily with higher reaction efficiency while reducing gas consumption. The microwave plasma generator comprises an outer conductor (2), an inner conductor (3) arranged in the internal space (4) of the outer conductor, a discharge tube (7) having a double tube structure consisting of an inner tube (5) and an outer tube (6) and penetrating the outer and inner conductors in the axial direction, and a cavity (1) having a means for adjusting the position of the inner tube to the outer tube in the axial direction in the discharge tube. The microwave plasma generator is further provided with a first gas supply pipe (16), which has a first flow control valve (18) and supplies first gas from a gas cylinder (14) to the outer tube of the discharge tube, a second gas supply pipe (17), which has a second flow control valve (19) and supplies second gas to the inner tube of the discharge tube, a microwave generation source (21), and a microwave supplying passage (22) for supplying microwave from the microwave generation source to the cavity.
    • 一种微波等离子体发生器,其中能够以更高的反应效率容易地调节自由基的发生量,同时降低气体消耗。 微波等离子体发生器包括外导体(2),布置在外导体的内部空间(4)中的内导体(3),具有由内管(5)组成的双管结构的放电管(7) 和外管(6),其沿轴向贯通外导体和内导体;以及空腔(1),其具有用于在放电管内沿轴向调节内管与外管的位置的装置。 微波等离子体发生器还设置有第一气体供给管(16),其具有第一流量控制阀(18),并且将来自气瓶(14)的第一气体供给到排出管的外管,第二气体 供给管(17),其具有第二流量控制阀(19)并将第二气体供给到放电管的内管,微波产生源(21)和微波供给通路(22),用于从 微波产生源到腔。