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    • 9. 发明授权
    • Plasma-resistant fluorine-based elastomer sealing material
    • 等离子体氟基弹性体密封材料
    • US06787610B2
    • 2004-09-07
    • US10267859
    • 2002-10-10
    • Kazuki MorimotoMitsuyuki NakanoKazuo Nishimoto
    • Kazuki MorimotoMitsuyuki NakanoKazuo Nishimoto
    • C08F25908
    • C08G65/336C08G65/007C08G65/226C08L71/02C08L83/00
    • An elastomer sealing material having low dielectric constant and low dielectric dissipation, which is satisfactory with both of resistance to oxygen plasma and non-adhesion to quartz and can be applied to apparatus utilizing microwaves, is disclosed. The plasma-resistant fluorine-based elastomer sealing material comprises a fluorine-based elastomer having a divalent perfluoropolyether or divalent perfluoroalkylene structure in the main chain thereof and having two or more hydrosilyl groups and addition-reactive alkenyl groups in the terminals or side chains thereof, and a polymer having two or more hydrosilyl groups in the molecule and being capable of addition reacting with the alkenyl groups, the fluorine-based elastomer being crosslinked with the polymer.
    • 公开了具有低介电常数和低电介质耗散的弹性体密封材料,其对氧等离子体的耐受性和对石英的不粘附都是令人满意的,并且可以应用于利用微波的装置。 耐等离子体的氟系弹性体密封材料包括在其主链中具有二价全氟聚醚或二价全氟亚烷基结构的氟基弹性体,并且在其末端或侧链中具有两个或更多个氢化甲硅烷基和加成反应性链烯基, 并且在分子中具有两个以上氢化甲硅烷基并且能够与烯基加成反应的聚合物,所述氟基弹性体与聚合物交联。