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1. 发明授权

US4695775A Imaging system having an improved electrostatic yoke and method of making same 失效
标题翻译：具有改进的静电轭的成像系统及其制造方法
公开(公告)号：US4695775A
公开(公告)日：1987-09-22
申请号：US863430
申请日：1986-05-15
申请人： Ira G. Ritzman , Joseph W. Wright
发明人： Ira G. Ritzman , Joseph W. Wright
IPC分类号： H01J29/46 , H01J29/74 , H01J31/38
CPC分类号： H01J29/74 , H01J29/465 , H01J31/38
摘要： An imaging system for focusing and deflecting an electron beam comprises, as in prior systems, an evacuated envelope structure having a longitudinal axis and a solenoid for generating a substantially uniform magnetic field within the envelope and along the longitudinal axis thereof. As in prior systems of this type, the envelope includes an electrostatic yoke therein for generating a variable substantially uniform electric field within the envelope to deflect the electron beam along two coordinates of the system. The electric field is orthogonal to the magnetic field. An electron gun within the envelope generates and directs the electron beam through the magnetic and electric field to a target located opposite the electron gun and in a plane perpendicular to the axis of the tube. Unlike prior systems, the electrostatic yoke of the present system comprises a first conductive layer bonded to the interior surface of the envelope, and a second conductive layer overlying the first conductive layer. The first conductive layer has a thickness in the range of about 500 to 1000 .ANG. and the second conductive layer has a thickness in the range of about 800 to 1500 .ANG.. The first and second layers include two pairs of interleaved electrodes. A method of making the electrostatic deflection yoke is also disclosed.
摘要翻译：用于聚焦和偏转电子束的成像系统包括与现有系统一样的具有纵向轴线和螺线管的真空包络结构，用于在外壳内并沿其纵向轴线产生基本上均匀的磁场。如在这种类型的现有系统中，外壳包括其中的静电磁轭，用于在外壳内产生可变的基本上均匀的电场，以使电子束沿系统的两个坐标偏转。电场与磁场正交。外壳内的电子枪产生并引导电子束穿过磁场和电场到与电子枪相对的靶并且垂直于管轴的平面。与现有系统不同，本系统的静电磁轭包括结合到外壳的内表面的第一导电层和覆盖第一导电层的第二导电层。第一导电层具有在约500至1000范围内的厚度，并且第二导电层的厚度在约800至1500范围内。第一层和第二层包括两对交错电极。还公开了制造静电偏转线圈的方法。

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