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1. 发明授权

US06816251B2 Method and apparatus for detecting defects along the edge of electronic media 失效
标题翻译：用于检测沿着电子介质边缘的缺陷的方法和装置
公开(公告)号：US06816251B2
公开(公告)日：2004-11-09
申请号：US10272310
申请日：2002-10-11
申请人： Alan J Swan , Thomas J. Hafner , John Howells
发明人： Alan J Swan , Thomas J. Hafner , John Howells
IPC分类号： G01N2188
CPC分类号： G01N21/9503 , G01N21/9506
摘要： An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.

2. 发明授权

US06566673B1 Method and apparatus for detecting defects along the edge of electronic media 失效
公开(公告)号：US06566673B1
公开(公告)日：2003-05-20
申请号：US09895274
申请日：2001-06-29
申请人： Alan Swan , Thomas J. Hafner , John Howells
发明人： Alan Swan , Thomas J. Hafner , John Howells
IPC分类号： G01N2186
CPC分类号： G01N21/9503 , G01N21/9506
摘要： An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.

3. 发明授权

US06183186B2 Wafer handling system and method 失效
标题翻译：晶圆处理系统及方法
公开(公告)号：US06183186B2
公开(公告)日：2001-02-06
申请号：US08920431
申请日：1997-08-29
申请人： John Howells , Andrew P. Gorman , Randall W. Peltola
发明人： John Howells , Andrew P. Gorman , Randall W. Peltola
IPC分类号： B65G4907
CPC分类号： H01L21/67769 , H01L21/67775 , H01L21/67781 , Y10S414/137 , Y10S414/14
摘要： Wafers from cassettes placed in a cassette holder at a loading station are transferred by a loader to a conveyor and through a wafer processing stage. From the conveyer, the wafers are delivered to an unloader at an unloading station. The unloader transfers the wafers to cassettes held in a cassette holder at the unloading station. The cassettes may be loaded into the rear of the loading station and removed from the rear of the unloading station. The cassette holders support plural stacks of at least two cassettes which are independently indexed upwardly and downwardly. The stacks of cassettes are also carried by a cassette positioner which is transversely shiftable to position a first stack in a wafer transfer zone while a second stack is in a cassette transfer zone spaced from the wafer transfer zone and vice versa. The loader may include an arm which is linearly translated and is rotated about its longitudinal axis to invert the wafer for delivery to a destination location. The unloader may be a water slide having a plurality of grooves for carrying water which spreads out from the grooves in the presence of a wafer to support the wafer as it slides down the water slide.
摘要翻译：置于装载站的盒架中的盒的晶片通过装载器传送到输送机并通过晶片处理阶段。从输送机将晶片送到卸载站的卸载机上。卸载机将晶片转移到卸载站固定在盒座中的盒子。盒可以装载到装载站的后部并从卸载站的后部移除。盒式支架支撑多个叠层的至少两个盒，它们独立地向上和向下索引。盒的堆叠也由盒式定位器承载，该盒定位器可横向移位以将第一堆叠定位在晶片传送区域中，而第二堆叠处于与晶片传送区间隔开的盒传送区域中，反之亦然。装载机可以包括直线平移的臂，并且围绕其纵向轴线旋转以反转晶片以便输送到目的地位置。卸载器可以是具有多个用于承载水的槽的水滑块，所述槽在晶片存在的情况下从槽中扩展，以在晶片向下滑动时支撑晶片。

4. 发明授权

US06545752B1 Method and apparatus for detecting defects along the edge of electronic media 失效
公开(公告)号：US06545752B1
公开(公告)日：2003-04-08
申请号：US09895899
申请日：2001-06-29
申请人： Alan J. Swan , Thomas J. Hafner , John Howells
发明人： Alan J. Swan , Thomas J. Hafner , John Howells
IPC分类号： G01N2100
CPC分类号： G01N21/9503 , G01N21/9506
摘要： An electronic media edge defect detector in one form has plural light sources and detectors arranged to direct and receive deflected light from the side edge margins and outer edge margins of the electronic media. The detected light is analyzed to detect the presence of defects. Individual wafers may be raised while in a cassette and turned during the inspection without removing the wafers from the cassette.

5. 发明授权

US6053668A Water slide for transferring semiconductor wafers 失效
标题翻译：用于转移半导体晶片的水滑块
公开(公告)号：US6053668A
公开(公告)日：2000-04-25
申请号：US920432
申请日：1997-08-29
申请人： Andrew P. Gorman , John Howells , Randall W. Peltola
发明人： Andrew P. Gorman , John Howells , Randall W. Peltola
IPC分类号： B65G49/07 , H01L21/677 , B65G53/16
CPC分类号： H01L21/67784 , H01L21/67778
摘要： A water slide for semiconductor wafer processing minimizes water usage by confining water to flow within spaced-apart grooves in the absence of a wafer. When a wafer passes down the water slide, a meniscus of water formed above the grooves is spread out to occupy the space underneath the wafer and prevent it from contacting the water slide as the wafer travels down the water slide.
摘要翻译：用于半导体晶片处理的水滑块通过限制水在不存在晶片的情况下在间隔开的沟槽内流动来最小化水的使用。当晶片向下滑动水滑块时，形成在凹槽上方的水面弯月面被展开以占据晶片下面的空间，并且当晶片沿着水滑板行进时，防止它与水滑板接触。

6. 发明授权

US5915910A Semiconductor wafer transfer method and apparatus 失效
标题翻译：半导体晶片转印方法和装置
公开(公告)号：US5915910A
公开(公告)日：1999-06-29
申请号：US920476
申请日：1997-08-29
申请人： John Howells , Randall W. Peltola
发明人： John Howells , Randall W. Peltola
IPC分类号： B65G49/07 , H01L21/677 , H01L21/683 , B65G1/06
CPC分类号： H01L21/6838 , H01L21/67778 , Y10S414/136 , Y10S414/137 , Y10S414/141
摘要： A wafer transfer mechanism and method involves inserting a wafer carrying arm into position within a wafer cassette so that a wafer may be detachably coupled to the arm. The arm is moved linearly to position the arm for coupling to the wafer, with the motion being reversed to remove the wafer from the cassette. After the arm clears the cassette, the arm may be pivoted about an axis which is transverse to the longitudinal axis of the arm to invert the wafer and deposit it at a destination location, such as onto a conveyor. A vacuum may be used to detachably couple the wafer to the arm with the vacuum being relieved to release the wafer at the destination location. A puff or pulse of air may be used to assist in decoupling the wafer from the arm.
摘要翻译：晶片传送机构和方法包括将晶片承载臂插入晶片盒内的位置，使得晶片可拆卸地联接到臂上。臂被线性移动以定位臂以联接到晶片，其中运动被反转以从盒中移除晶片。在臂清除盒之后，臂可以围绕横向于臂的纵向轴线的轴线枢转以反转晶片并将其沉积到目的地位置，例如到输送机上。可以使用真空来将晶片可拆卸地连接到臂上，同时释放真空以在目的位置释放晶片。可以使用吹气或空气脉冲来帮助将晶片与臂分离。

7. 发明授权

US1725583A Manufacture of yeast 失效
公开(公告)号：US1725583A
公开(公告)日：1929-08-20
申请号：US1068925
申请日：1925-02-20
申请人： JOHN HOWELLS LLEWELLYN
发明人： JOHN HOWELLS LLEWELLYN
IPC分类号： C12N1/18
CPC分类号： C12N1/18 , Y10S435/813

8. 发明授权

US6152680A Wafer cassette rotation mechanism 失效
标题翻译：晶圆盒旋转机构
公开(公告)号：US6152680A
公开(公告)日：2000-11-28
申请号：US918332
申请日：1997-08-26
申请人： John Howells , Robert H. Niemeyer, III
发明人： John Howells , Robert H. Niemeyer, III
IPC分类号： B65G49/07 , H01L21/673 , H01L21/677
CPC分类号： H01L21/68 , H01L21/6732 , H01L21/67326 , Y10S414/14
摘要： The present invention concerns a device for the rotation of a wafer cassette such as between a horizontal orientation and a vertical orientation. The wafer cassette rotation device includes a carriage for receiving and supporting a wafer cassette, a receptacle in which the carriage is supported and rotates, and a drive mechanism for rotating the carriage together with any wafer cassette that has been inserted into the carriage, between horizontal and vertical orientations. The carriage is shaped to receive a standard wafer cassette, the carriage open at both front and top portions, includes wafer cassette supports. Wheels may be attached to opposing side edges of the bottom of the carriage. A cam drive mechanism is used to move the carriage within the receptacle.
摘要翻译：本发明涉及一种用于旋转晶片盒的装置，例如在水平取向和垂直取向之间。晶片盒旋转装置包括用于接收和支撑晶片盒的滑架，托架被支撑和旋转的插座，以及驱动机构，用于将滑架与已经插入滑架的任何晶片盒一起旋转在水平和垂直方向。托架被成形为接收标准的晶片盒，托架在前部和顶部都打开，包括晶片盒支架。车轮可以附接到托架的底部的相对的侧边缘。凸轮驱动机构用于将托架移动到容器内。

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