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    • 6. 发明授权
    • Heat assisted magnetic recording head and method of manufacturing the same
    • 热辅助磁记录头及其制造方法
    • US08023228B2
    • 2011-09-20
    • US11510796
    • 2006-08-28
    • Jin-seung SohnMyung-bok Lee
    • Jin-seung SohnMyung-bok Lee
    • G11B5/00
    • G11B5/314G11B5/02G11B2005/0005G11B2005/0021
    • A heat assisted magnetic recording (HAMR) head and manufacturing method are provided. The HAMR head is mounted on a slider having an air-bearing surface (ABS) and includes a substrate; a recording unit formed on the substrate and having a stepped end; a waveguide located in a space formed by the stepped end; and a near field light emission (NFE) pole located adjacent to the recording unit and having an end located on a same plane as the ABS. The method includes forming a cladding layer on a substrate; forming a first metal layer on the cladding layer; etching a part of the first metal layer; forming a core layer on the etched region; forming a refraction part in a part of the core layer; forming a second metal layer the first metal layer and the core layer; and forming a recording unit on the second metal layer.
    • 提供热辅助磁记录(HAMR)头和制造方法。 HAMR头安装在具有空气轴承表面(ABS)的滑块上并且包括基板; 记录单元,形成在所述基板上并具有阶梯端; 位于由阶梯端形成的空间中的波导; 以及邻近记录单元并且具有位于与ABS相同的平面上的端部的近场发光(NFE)极。 该方法包括在基板上形成包覆层; 在所述包层上形成第一金属层; 蚀刻第一金属层的一部分; 在蚀刻区域上形成芯层; 在芯层的一部分中形成折射部分; 形成第一金属层和芯层的第二金属层; 以及在所述第二金属层上形成记录单元。