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    • 10. 发明授权
    • MEMS resonant accelerometer
    • MEMS谐振加速度计
    • US09470708B2
    • 2016-10-18
    • US14348702
    • 2011-09-30
    • Hyeong-Gyun JeongJin-Woo Song
    • Hyeong-Gyun JeongJin-Woo Song
    • G01P15/10G01P15/097G01P15/08G01P15/125
    • G01P15/0802G01P15/097G01P15/125
    • Provided is a micro electro mechanical system (MEMS) resonating accelerometer. The MEMS resonating accelerometer according to the present invention comprises: a first inertial mass; a second inertial mass which is spaced at a predetermined distance from the first inertial mass on a first axis; an elastic body which is provided between the first and second inertial masses so as to apply elasticity; and a tuning fork which is connected to the elastic body and measures the change of frequency according to acceleration, wherein the longitudinal direction of the tuning fork is parallel to a second axis which is perpendicular to the first axis, the elastic body has an opening portion being in a circular shape with a portion thereof removed, and one end of the tuning fork penetrates the opening portion and is connected to the inner surface of the elastic body.
    • 提供了一种微机电系统(MEMS)谐振加速度计。 根据本发明的MEMS共振加速度计包括:第一惯性质量; 第二惯性质量体,其在第一轴线上与所述第一惯性质量体隔开预定的距离; 弹性体,其设置在所述第一和第二惯性块之间,以便施加弹性; 音叉与弹性体连接并根据加速度测量频率变化,其中音叉的纵向平行于与第一轴垂直的第二轴,弹性体具有开口部分 呈圆形的部分被除去,音叉的一端穿过开口部分,并连接到弹性体的内表面。