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1. 发明授权

US4883686A Method for the high rate plasma deposition of high quality material 失效
标题翻译：高质量材料高速等离子体沉积的方法
公开(公告)号：US4883686A
公开(公告)日：1989-11-28
申请号：US199062
申请日：1988-05-26
申请人： Joachim Doehler , Stephen J. Hudgens , Stanford R. Ovshinsky , Buddie Dotter II , Lester R. Peedin , Jeffrey M. Krisko , Annette Krisko
发明人： Joachim Doehler , Stephen J. Hudgens , Stanford R. Ovshinsky , Buddie Dotter II , Lester R. Peedin , Jeffrey M. Krisko , Annette Krisko
IPC分类号： C23C16/50 , C23C16/44 , C23C16/452 , C23C16/455 , C23C16/511 , H01L21/205
CPC分类号： C23C16/4551 , C23C16/452 , C23C16/455 , C23C16/45514 , Y10S505/741
摘要： A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exits in said enclosure. In one embodiment, the flow rate of the energy transferring gas flowing through said first conduit, when taken in conjunction with said pressure differential, causes the high flux of activated species of the energy transferring gas to collide with a precursor deposition/etchant gas, remotely introduced into the enclosure through a second conduit, for forming deposition/etchant species therefrom. In an alternate embodiment, the pressure differential causes those activated species, themselves, to be either deposited upon or etched away from the surface of a remotely positioned substrate.

2. 发明授权

US5126635A Microwave plasma operation using a high power microwave transmissive window assembly 失效
标题翻译：微波等离子体操作使用大功率微波透射窗组件
公开(公告)号：US5126635A
公开(公告)日：1992-06-30
申请号：US679362
申请日：1991-04-02
申请人： Joachim Doehler , Buddie Dotter, II , Jeffrey M. Krisko , Lester R. Peedin
发明人： Joachim Doehler , Buddie Dotter, II , Jeffrey M. Krisko , Lester R. Peedin
IPC分类号： H01P1/08
CPC分类号： H01P1/08
摘要： A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.
摘要翻译：一种窗口组件，用于将基本上大气压力水平的波导的相对较高功率的微波能量传送到低于大气压力水平的微波反应室。窗口组件提供微波能量的传输以产生辉光放电等离子体，而不会由于过度的温度和压力条件而遭受灾难性故障。

3. 发明授权

US5093149A Method of depositing directly activated species onto a remotely located substrate 失效
标题翻译：将直接活化的物质沉积到远位的基底上的方法
公开(公告)号：US5093149A
公开(公告)日：1992-03-03
申请号：US520988
申请日：1990-05-07
申请人： Joachim Doehler , Stephen J. Hudgens , Stanford R. Ovshinsky , Lester R. Peedin , Jeffrey M. Krisko
发明人： Joachim Doehler , Stephen J. Hudgens , Stanford R. Ovshinsky , Lester R. Peedin , Jeffrey M. Krisko
IPC分类号： C23C16/44 , C23C16/452 , C23C16/455
CPC分类号： C23C16/4551 , C23C16/452 , C23C16/455 , C23C16/45514
摘要： A method of depositing high quality thin film at a high rate of deposition through the formation of a high flux of activated precursor species of a precursor deposition gas by employing a substantial pressure differential between the pressure adjacent the aperture in a conduit from which said precursor deposition gas is introduced into the interior of a vacuumized enclosure and the background pressure which exits in said enclosure. As the precursor deposition gas is introduced into said enclosure, a high density plume of said activated precursor species are formed therefrom due to an electromagnetic field established in an activation region adjacent said aperture. The pressure differential is sufficient to cause those activated precursor species to be deposited upon a remotely positioned substrate. In order to obtain a sufficient pressure differential, it is preferred that the flow of the precursor deposition gas reaches transonic velocity. And in order to obtain a high quality thin film, it is preferred that the plume of activated precursor species is spaced from the substrate; without structural or electrical confinement, a distance from the activation region greater than the mean free path of undesired activated precursor species and within the mean free path of desired species.
摘要翻译：一种沉积高质量薄膜的方法，该方法是通过在邻近导管孔之间的压力之间产生相当大的压力差，形成高通量的活化前体物质的前体沉积气体，气体被引入真空封壳的内部，并且在所述外壳中离开的背景压力。当前体沉积气体被引入所述外壳中时，由于在邻近所述孔的激活区域中建立的电磁场，所以形成所述活化的前体物质的高密度羽流。压力差足以使这些活化的前体物质沉积在远距离定位的基底上。为了获得足够的压差，优选前体沉积气体的流量达到跨音速。并且为了获得高质量的薄膜，优选活化的前体物质的羽流与基底间隔开; 没有结构或电气限制，距离激活区域的距离大于不期望的活化的前体物质的平均自由程和在所需物种的平均自由程中。

4. 发明授权

US4937094A Method of creating a high flux of activated species for reaction with a remotely located substrate 失效
标题翻译：产生高通量的活化物质用于与位于远端的基质反应的方法
公开(公告)号：US4937094A
公开(公告)日：1990-06-26
申请号：US373300
申请日：1989-06-29
申请人： Joachim Doehler , Stephen J. Hudgens , Stanford R. Ovshinsky , Buddie Dotter, II , Lester R. Peedin , Jeffrey M. Krisko , Annette Krisko
发明人： Joachim Doehler , Stephen J. Hudgens , Stanford R. Ovshinsky , Buddie Dotter, II , Lester R. Peedin , Jeffrey M. Krisko , Annette Krisko
IPC分类号： C23C16/44 , C23C16/452 , C23C16/455
CPC分类号： C23C16/4551 , C23C16/452 , C23C16/455 , C23C16/45514
摘要： A method of forming a high flux of activated species, such as ions, of an energy transferring gas by employing a substantial pressure differential between a first conduit in which the energy transferring gas is introduced into a vacuumized enclosure and the background pressure which exits in said enclosure. In one embodiment, the flow rate of the energy transferring gas flowing through said first conduit, when taken in conjunction with said pressure differential, causes the high flux to activated species of the energy transferring gas to collide with a precursor deposition/etchant gas, remotely introduced into the enclosure through a second conduit, for forming deposition/etchant species therefrom. In an alternate embodiment, the pressure differential causes those activated species, themselves, to be either deposited upon or etched away from the surface of a remotely positioned substrate.
摘要翻译：一种通过在其中将能量转移气体引入抽真空的外壳中的第一导管和在所述真空室中退出的背景压力之间的实质压差来形成能量转移气体的高通量活化物质如离子的方法，外壳。在一个实施例中，当与所述压力差相结合时，流过所述第一导管的能量转移气体的流速导致能量转移气体的活化物质与前体沉积/蚀刻剂气体的远距离碰撞通过第二导管引入外壳，用于从其形成沉积/蚀刻剂物质。在替代实施例中，压差使得这些活化物质本身沉积在或远离远离定位的基底的表面上蚀刻。

5. 发明授权

US4931756A High power microwave transmissive window assembly 失效
标题翻译：大功率微波透射窗组件
公开(公告)号：US4931756A
公开(公告)日：1990-06-05
申请号：US179617
申请日：1988-04-08
申请人： Joachim Doehler , Buddie Dotter, II , Jeffrey M. Krisko , Lester R. Peedin
发明人： Joachim Doehler , Buddie Dotter, II , Jeffrey M. Krisko , Lester R. Peedin
IPC分类号： H05H1/46 , C23C14/22 , C23C16/50 , C23C16/511 , H01L21/302 , H01L21/3065 , H01L21/31 , H01P1/08
CPC分类号： H01P1/08
摘要： A window assembly for transmitting relatively high power microwave energy from a waveguide, held at substantially atmospheric pressure levels, into a microwave reaction chamber at sub-atmospheric pressure levels. The window assembly provides for the transmission of microwave energy to generate a glow discharge plasma without suffering from catastrophic failure as a result of excessive temperature and pressure conditions.
摘要翻译：一种窗口组件，用于将基本上大气压力水平的波导的相对较高功率的微波能量传送到低于大气压力水平的微波反应室。窗口组件提供微波能量的传输以产生辉光放电等离子体，而不会由于过度的温度和压力条件而遭受灾难性故障。

6. 发明授权

US4893584A Large area microwave plasma apparatus 失效
标题翻译：大面积微波等离子体仪器
公开(公告)号：US4893584A
公开(公告)日：1990-01-16
申请号：US174659
申请日：1988-03-29
申请人： Joachim Doehler , Jeffrey M. Krisko
发明人： Joachim Doehler , Jeffrey M. Krisko
IPC分类号： C23C16/50 , C23C16/511 , C23F4/00 , H01J37/32 , H05H1/46
CPC分类号： H01J37/32229 , H01J37/32192 , H01J37/32238 , H05H1/46
摘要： Microwave energy apparatus adapted to sustain a substantially uniform plasma over a relatively large area. In the broadest form of the invention, an isolating window is disposed about the microwave applicator, said isolating window formed from a material through which the microwave energy can be transmitted from the applicator into a plasma reaction vessel and said isolating window configured in a shape which is substantially optimized to withstand compressive forces. In this manner, the thickness of the isolating window may be minimized to provide for rapid thermal cooling, wherby high power densities may be achieved without cracking the window.

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