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    • 10. 发明授权
    • 3D package device of photonic integrated chip matching circuit
    • 光子集成芯片匹配电路的3D封装器件
    • US09059516B2
    • 2015-06-16
    • US13713461
    • 2012-12-13
    • INSTITUTE OF SEMICONDUCTORS, CHINESE ACADEMY OF SCIENCES
    • Ninghua ZhuJiasheng WangJianguo LiuYu Liu
    • H01Q11/02H01Q13/20G02F1/01H01L23/66H01P11/00
    • H01Q13/206G02F1/0121H01L23/66H01L2224/45144H01L2224/48091H01P11/003H01L2924/00014H01L2924/00
    • A 3D package device of a photonic integrated chip matching circuit, comprising: a first carrier substrate; a first microwave transmission line array formed by evaporation on the top surface of the first carrier substrate to provide bias voltages and high-frequency modulation signals to the photonic integrated chip; a second carrier substrate formed perpendicularly to the first carrier substrate or to have a certain angle with respect to the first carrier substrate, so as to constitute a 3D structure; a second microwave transmission line array formed by evaporation on the bottom surface of the second carrier substrate to match electrodes of the first microwave transmission line array, the second microwave transmission line array being soldered or sintered with the electrodes of the first microwave transmission line array; an electrode array formed by evaporation on a side surface or two opposite side surfaces of the second carrier substrate; and a microwave circuit.
    • 一种光子集成芯片匹配电路的3D封装器件,包括:第一载体衬底; 第一微波传输线阵列,其通过在第一载体衬底的顶表面上的蒸发形成,以向光子集成芯片提供偏置电压和高频调制信号; 第二载体衬底,其垂直于第一载体衬底形成或相对于第一载体衬底具有一定角度,以构成3D结构; 第二微波传输线阵列,其通过在第二载体衬底的底表面上蒸发形成,以匹配第一微波传输线阵列的电极,第二微波传输线阵列与第一微波传输线阵列的电极焊接或烧结; 在所述第二载体基板的侧面或两个相对的侧面上通过蒸镀形成的电极列; 和微波电路。