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1. 发明授权

US06344656B1 Surface measuring apparatus having relative displacement between a probe and its carriage 失效
标题翻译：表面测量装置具有探头与其支架之间的相对位移
公开(公告)号：US06344656B1
公开(公告)日：2002-02-05
申请号：US09555730
申请日：2000-07-21
申请人： Ian Hopkins , Keith Hall , Anthony Smith , Dipak Daudia
发明人： Ian Hopkins , Keith Hall , Anthony Smith , Dipak Daudia
IPC分类号： G01N2186
CPC分类号： G01B11/005
摘要： A metrological instrument for measuring surface characteristics such as surface form of a component (300). The instrument includes a slideway (32) to cause relative movement between a surface sensing probe (84) and the component which allows the probe to traverse a surface of the component. A probe carriage (80) supports the probe to allow the probe to move as a body in a measurement direction relative to the carriage so as to follow a surface being sensed. An optical sensor (82) provides a signal indicative of the displacement of the probe relative to the probe carriage. A controller (83) acts in response to a signal from the optical sensor, to move the probe carriage so as to maintain the probe in an operational range. A further sensor (11) measures measurement of displacement of the probe in the measurement direction as it follows a surface during use of the instrument.
摘要翻译：用于测量表面特性（例如部件（300）的表面形式）的计量仪器。该仪器包括滑道（32），以在表面感测探头（84）和允许探针穿过部件表面的部件之间产生相对运动。探针支架（80）支撑探头以允许探针作为身体在相对于滑架的测量方向上移动，以便跟随被感测的表面。光学传感器（82）提供指示探针相对于探针台架的位移的信号。控制器（83）响应于来自光学传感器的信号而起作用以移动探针支架，以将探头保持在操作范围内。另外的传感器（11）在使用仪器期间测量探头在测量方向上的位移测量。

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