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    • 2. 发明授权
    • Method of forming measuring targets for measuring dimensions of substrate in substrate manufacturing process
    • 在基板制造工艺中形成用于测量基板尺寸的测量目标的方法
    • US08053175B2
    • 2011-11-08
    • US12136292
    • 2008-06-10
    • Hsiang-Ming Feng
    • Hsiang-Ming Feng
    • G03F7/20
    • H05K1/0269H05K1/116H05K3/427H05K3/4602H05K3/4679H05K2201/09536H05K2201/0959H05K2201/0989
    • A method of forming measuring targets for measuring the dimensions of a substrate during a substrate manufacturing process is provided. First, a board having a base layer and a conductive layer is provided, wherein the conductive layer is disposed on a surface of the base layer. Then, at least one through hole is formed in the board as a measuring target for measuring the dimensions of the substrate. Next, a plated via is formed in the through hole as another measuring target for measuring the dimensions of the substrate. Thereafter, a patterned dielectric layer is formed on the board to expose the plated via as a next measuring target for measuring the dimensions of the substrate. In the present invention, measuring targets are formed during a substrate manufacturing process and the dimensions of the substrate are measured instantly. The accuracy in process alignment is improved without increasing the fabrication cost.
    • 提供了一种在基板制造过程中形成用于测量基板的尺寸的测量目标的方法。 首先,提供具有基底层和导电层的基板,其中导电层设置在基底层的表面上。 然后,在板中形成至少一个通孔作为测量基板尺寸的测量对象。 接下来,在通孔中形成电镀通孔作为用于测量基板的尺寸的另一测量对象。 此后,在板上形成图形化的电介质层,以暴露电镀通孔,作为测量基板尺寸的下一个测量对象。 在本发明中,在基板制造工序中形成测量对象,并且立即测量基板的尺寸。 在不增加制造成本的情况下,改进了工艺对准的精度。
    • 3. 发明申请
    • METHOD OF FORMING MEASURING TARGETS FOR MEASURING DIMENSIONS OF SUBSTRATE IN SUBSTRATE MANUFACTURING PROCESS
    • 形成测量靶材的方法,用于测量基板制造工艺中的基板尺寸
    • US20090258320A1
    • 2009-10-15
    • US12136292
    • 2008-06-10
    • Hsiang-Ming Feng
    • Hsiang-Ming Feng
    • G03F7/20
    • H05K1/0269H05K1/116H05K3/427H05K3/4602H05K3/4679H05K2201/09536H05K2201/0959H05K2201/0989
    • A method of forming measuring targets for measuring the dimensions of a substrate during a substrate manufacturing process is provided. First, a board having a base layer and a conductive layer is provided, wherein the conductive layer is disposed on a surface of the base layer. Then, at least one through hole is formed in the board as a measuring target for measuring the dimensions of the substrate. Next, a plated via is formed in the through hole as another measuring target for measuring the dimensions of the substrate. Thereafter, a patterned dielectric layer is formed on the board to expose the plated via as a next measuring target for measuring the dimensions of the substrate. In the present invention, measuring targets are formed during a substrate manufacturing process and the dimensions of the substrate are measured instantly. The accuracy in process alignment is improved without increasing the fabrication cost.
    • 提供了一种在基板制造过程中形成用于测量基板的尺寸的测量目标的方法。 首先,提供具有基底层和导电层的基板,其中导电层设置在基底层的表面上。 然后,在板中形成至少一个通孔作为测量基板尺寸的测量对象。 接下来,在通孔中形成电镀通孔作为用于测量基板的尺寸的另一测量对象。 此后,在板上形成图形化的电介质层,以暴露电镀通孔,作为测量基板尺寸的下一个测量对象。 在本发明中,在基板制造工序中形成测量对象,并且立即测量基板的尺寸。 在不增加制造成本的情况下,改进了工艺对准的精度。