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    • 2. 发明申请
    • MONOCHROMATIC WAVELENGTH VARIABLE TERAHERTZ WAVE GENERATION/DETECTION SYSTEM AND METHOD
    • 单色波长变化TERAHERTZ波形发生/检测系统和方法
    • US20110057109A1
    • 2011-03-10
    • US12874912
    • 2010-09-02
    • Ruixiang GUOHiroaki MINAMIDEHiromasa ITO
    • Ruixiang GUOHiroaki MINAMIDEHiromasa ITO
    • G01J5/02G01J5/00
    • G01J3/42G01J3/0208G01N21/3581G02F1/39G02F2203/13
    • To provide a monochromatic wavelength variable terahertz wave generation/detection system that has high detection sensitivity at room temperature and that can quickly operate at the same time, excitation light of monochromatic wavelength generated from one excitation light source is inputted to a wavelength variable terahertz wave source and a nonlinear light conversion terahertz wave detector through an excitation light phase control optical system shown below. The excitation light phase control optical system includes, on a light path of the excitation light, an optical element capable of simultaneously changing an incidence angle of the excitation light to a generation point of a terahertz wave in the wavelength variable terahertz wave source and an incidence angle of the excitation light to an incidence point of the terahertz wave in the nonlinear light conversion terahertz wave detector to set both the generation point and the incidence point at the same time on the focal points in a confocal optical system.
    • 为了提供在室温下具有高检测灵敏度并可以同时快速操作的单色波长可变太赫兹波生成/检测系统,从一个激发光源产生的单色波长的激发光被输入到波长可变的太赫兹波源 以及通过如下所示的激发光相位控制光学系统的非线性光转换太赫兹波检测器。 激发光相位控制光学系统在激发光的光路上包括能够同时将激发光的入射角改变为波长可变太赫兹波源中的太赫兹波的产生点的光学元件和入射 在非线性光转换太赫兹波检测器中激发光的角度与太赫兹波的入射点同时在共焦光学系统的焦点上同时设置发生点和入射点。
    • 5. 发明申请
    • MOBILITY MEASURING APPARATUS, METHOD THEREFOR, AND RESISTIVITY MEASURING APPARATUS AND METHOD THEREFOR
    • 移动性测量装置,其方法和电阻测量装置及其方法
    • US20110058155A1
    • 2011-03-10
    • US12872385
    • 2010-08-31
    • Seigo OhnoHiromasa ItoHiroaki MinamideAkihide Hamano
    • Seigo OhnoHiromasa ItoHiroaki MinamideAkihide Hamano
    • G01J3/00G01R27/08
    • H01L22/12G01N21/3563G01N21/3581H01L22/14H01L2924/014
    • A mobility measuring apparatus includes a storage unit that respectively stores a relationship between the mobility μ of carriers in a semiconductor and a decay constant γ of the carriers and a relationship between a reflectivity R of the semiconductor to a terahertz light and the decay constant γ of the carriers, a light radiating unit that radiates a terahertz light to the semiconductor as a sample, a detecting unit that detects a reflected light of the sample to the radiated terahertz light, a reflectivity calculating unit that calculates the reflectivity Rexp of the sample by determining a ratio of an intensity of the reflected light relative to an intensity of the radiated terahertz light, an obtaining unit that obtains the decay constant γexp of the sample corresponding to the reflectivity Rexp of the sample by making reference to the stored relationship between the reflectivity R and the decay constant γ of the carriers, and a mobility calculating unit that calculates the mobility μexp of the sample from the stored relationship between the mobility μ and the decay constant γ on the basis of the obtained decay constant γexp.
    • 移动性测量装置包括存储单元,其分别存储半导体中的载流子迁移率μ与载流子的衰减常数γ之间的关系以及半导体与太赫兹光的反射率R和衰变常数γ之间的关系 所述载体,将作为样品向所述半导体照射太赫兹光的光照射单元,检测所述样品的反射光到所述辐射太赫兹光的检测单元,反射率计算单元,其通过确定所述样品的反射率Rexp来计算 反射光的强度相对于照射的太赫兹光的强度的比率;获得单元,其通过参照所存储的反射率R的关系来获得与样品的反射率Rexp相对应的样品的衰变常数γexp 和载波的衰减常数γ,以及计算m的移动性计算单元 根据获得的衰减常数γexp,从存储的迁移率μ与衰减常数γ之间的关系得到的样本的能力μexp。
    • 10. 发明授权
    • Mobility measuring apparatus, method therefor, and resistivity measuring apparatus and method therefor
    • 移动性测量装置及其方法,以及电阻率测量装置及其方法
    • US08619243B2
    • 2013-12-31
    • US12872385
    • 2010-08-31
    • Seigo OhnoHiromasa ItoHiroaki MinamideAkihide Hamano
    • Seigo OhnoHiromasa ItoHiroaki MinamideAkihide Hamano
    • G01J3/00H01L29/04H01L27/14H01L29/12
    • H01L22/12G01N21/3563G01N21/3581H01L22/14H01L2924/014
    • A mobility measuring apparatus includes a storage unit that respectively stores a relationship between the mobility μ of carriers in a semiconductor and a decay constant γ of the carriers and a relationship between a reflectivity R of the semiconductor to a terahertz light and the decay constant γ of the carriers, a light radiating unit that radiates a terahertz light to the semiconductor as a sample, a detecting unit that detects a reflected light of the sample to the radiated terahertz light, a reflectivity calculating unit that calculates the reflectivity Rexp of the sample by determining a ratio of an intensity of the reflected light relative to an intensity of the radiated terahertz light, an obtaining unit that obtains the decay constant γexp of the sample corresponding to the reflectivity Rexp of the sample by making reference to the stored relationship between the reflectivity R and the decay constant γ of the carriers, and a mobility calculating unit that calculates the mobility μexp of the sample from the stored relationship between the mobility μ and the decay constant γ on the basis of the obtained decay constant γexp.
    • 移动性测量装置包括存储单元,其分别存储半导体中的载流子迁移率μ和载流子的衰变常数γ之间的关系,以及半导体与太赫兹光的反射率R和衰变常数γ之间的关系 所述载体,将作为样品向所述半导体照射太赫兹光的光照射单元,检测所述样品的反射光到所述辐射太赫兹光的检测单元,反射率计算单元,其通过确定所述样品的反射率Rexp来计算 反射光的强度相对于辐射太赫兹光的强度的比率;获得单元,其通过参考存储的反射率R之间的关系来获得与样品的反射率Rexp相对应的样品的衰减常数γexp 和载流子的衰减常数γ,以及迁移率计算单元 根据获得的衰减常数γexp,从迁移率μ和衰变常数γ之间的存储关系中的样本的迁移率muexp。