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    • 5. 发明授权
    • Micromechanical microwave power meter
    • 微机功率计
    • US07548074B2
    • 2009-06-16
    • US11630575
    • 2005-06-16
    • Heikki SeppäJukka Kyynäräinen
    • Heikki SeppäJukka Kyynäräinen
    • G01R27/26G01R25/02
    • G01R21/12
    • A micromechanical sensor for measuring millimetric wave or microwave power, which sensor includes a wave line for conducting the millimetric or microwave power and a moving part and a fixed electrode, in such a way that the capacitance (C) between the moving part and the fixed electrode couples to the wave power advancing in the wave line. According to the invention, the capacitance (C) between the moving part and the fixed electrode is divided into at least two portions (C/n), which are located at a distance from each other, in such a way that the wave power advancing in the wave line couples to the portions (C/n) of the capacitance (C) consecutively and experiences the inductive load between the portions (C/n) of the capacitance (C). Thus the frequency band of the sensor can be substantially broadened and the reflective coefficient can be kept reasonably small.
    • 一种用于测量毫米波或微波功率的微机械传感器,该传感器包括用于传导毫米或微波功率的波纹线以及移动部件和固定电极,使得移动部件和固定电极之间的电容(C) 电极耦合到在波浪线上行进的波浪功率。 根据本发明,移动部件和固定电极之间的电容(C)被分成至少两个部分(C / n),它们彼此相隔一定距离,使得波浪功率提前 在波导线中连接到电容(C)的部分(C / n)并经历电容(C)的部分(C / n)之间的电感负载。 因此,传感器的频带可以基本上变宽,并且可以将反射系数保持在相当小的范围内。