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1. 发明授权

US5855823A Steam humidifier 失效
标题翻译：蒸汽加湿器
公开(公告)号：US5855823A
公开(公告)日：1999-01-05
申请号：US857868
申请日：1997-05-16
申请人： Bruce S. MacGibbon , Christopher P. Sirovy , Mark C. Wolochuk , Travis J. Addington , Chuck K. McCabe , Greg A. Marvell
发明人： Bruce S. MacGibbon , Christopher P. Sirovy , Mark C. Wolochuk , Travis J. Addington , Chuck K. McCabe , Greg A. Marvell
IPC分类号： F24F6/18 , B01F3/04 , F24F6/10
CPC分类号： F24F6/18 , Y10S261/15 , Y10S261/29
摘要： The present invention is a humidifier that provides uniformly controlled generation of water vapor into an air stream. Steel wool is placed into a heating section of a humidifier water reservoir, where vapor is produced, to create an even distribution of vapor exiting the humidifier. A perforated plate is horizontally inserted into the heating section above the steel wool, thereby holding it in place and aiding in the even distribution of vapor from the humidifier.
摘要翻译：本发明是一种加湿器，其将均匀控制的水蒸汽产生产生到气流中。钢丝绒被放置在加湿器储水器的加热部分中，其中产生蒸气，以产生从加湿器排出的蒸汽的均匀分布。多孔板被水平地插入到钢丝绒上方的加热部分中，从而将其保持在适当位置并且帮助来自加湿器的蒸气的均匀分布。

2. 发明授权

US5401212A Environmental control system 失效
标题翻译：环境控制体系
公开(公告)号：US5401212A
公开(公告)日：1995-03-28
申请号：US33892
申请日：1993-03-19
申请人： Greg A. Marvell , Robert M. Genco , Gregory K. Mundt , Michael B. Tanaka
发明人： Greg A. Marvell , Robert M. Genco , Gregory K. Mundt , Michael B. Tanaka
IPC分类号： F24F3/16 , F24F7/06 , H01L21/677 , F24F7/007
CPC分类号： H01L21/67769 , F24F3/1607 , F24F3/161 , H01L21/67017
摘要： An environmental control systems including a modular isolation chamber is disclosed. Together with associated atmospheric regulatory equipment, the connectable modular chambers provide a smaller, cost-effective alternative to the traditional clean rooms utilized for fabricating or processing semiconductors and other products. Because the work pieces and processing or other machinery are isolated from the remainder of the rooms in which they are located, decontamination of much of each room is not required. Use of the portable, modular chambers of the present invention also permits increased control over particulate contaminates smaller than heretofore satisfactorily regulated and individualized regulation of differing processing environments within a single room.
摘要翻译：公开了一种包括模块化隔离室的环境控制系统。与相关的大气监管设备一起，可连接的模块化室为用于制造或加工半导体和其他产品的传统洁净室提供了更小，成本效益更好的替代方案。因为工件和加工或其他机械与其所在的房间隔离，所以不需要对每个房间的大部分进行净化。使用本发明的便携式模块化室还允许增加对颗粒污染物的控制，比迄今为止令人满意地调节和单个房间内的不同处理环境的个性化调节更小。

3. 发明授权

US5960638A Modular environmental control unit for cleanrooms 失效
标题翻译：洁净室模块化环境控制单元
公开(公告)号：US5960638A
公开(公告)日：1999-10-05
申请号：US912213
申请日：1997-08-15
申请人： Chuck K. McCabe , Greg A. Marvell
发明人： Chuck K. McCabe , Greg A. Marvell
IPC分类号： B01L1/04 , H01L21/00 , F25D17/06
CPC分类号： B01L1/04 , H01L21/67017
摘要： This patent discloses a modular environmental control system for small cleanroom enclosures ("mini-enclosures"). Small environmental control units ("ECUs") are mounted on top of individual mini-enclosures, as near as possible to the process tool within the enclosure. Each ECU has the capability of controlling temperature, humidity, and airflow rate delivered into the enclosure. Temperature is adjusted by first cooling the air inside the ECU followed by reheating it to a selected temperature. The cooling capability is not generated by individual ECUs. Instead, a remote fluid cooling unit supplies chilled fluid to each ECU, which is circulated internally to cool the air. The same remote unit services different ECUs at the same time.
摘要翻译：该专利公开了一种用于小型洁净室外壳（“迷你外壳”）的模块化环境控制系统。小型环境控制单元（“ECU”）安装在各个迷你机箱的顶部，尽可能靠近机柜内的加工工具。每个ECU都具有控制传递到外壳中的温度，湿度和气流速率的能力。通过先对ECU内的空气进行冷却，然后将其再加热至选定的温度来调节温度。单个ECU不产生冷却能力。相反，远程流体冷却单元向每个ECU提供冷却流体，每个ECU在内部循环以冷却空气。同一个远程单元同时服务不同的ECU。

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