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    • 1. 发明申请
    • UNDERFILL PROCESS FOR FLIP-CHIP LEDS
    • FLIP-CHIP LED的底层工艺
    • US20090230409A1
    • 2009-09-17
    • US12050082
    • 2008-03-17
    • Grigoriy BasinFrederic DianaPaul S. MartinDima Simonian
    • Grigoriy BasinFrederic DianaPaul S. MartinDima Simonian
    • H01L33/00
    • H01L33/54H01L24/97H01L33/0079H01L33/56H01L2224/16225H01L2224/32225H01L2224/73204H01L2924/00
    • An underfill technique for LEDs uses compression molding to simultaneously encapsulate an array of flip-chip LED dies mounted on a submount wafer. The molding process causes liquid underfill material (or a softened underfill material) to fill the gap between the LED dies and the submount wafer. The underfill material is then hardened, such as by curing. The cured underfill material over the top and sides of the LED dies is removed using microbead blasting. The exposed growth substrate is then removed from all the LED dies by laser lift-off, and the underfill supports the brittle epitaxial layers of each LED die during the lift-off process. The submount wafer is then singulated. This wafer-level processing of many LEDs simultaneously greatly reduces fabrication time, and a wide variety of materials may be used for the underfill since a wide range of viscosities is tolerable.
    • 用于LED的底部填充技术使用压缩成型来同时封装安装在底座晶片上的倒装芯片LED管芯阵列。 成型工艺使液体底部填充材料(或软化的底部填充材料)填充LED管芯和底座晶片之间的间隙。 然后将底部填充材料硬化,例如通过固化。 使用微珠喷砂除去在LED管芯的顶部和侧面上固化的底部填充材料。 然后通过激光剥离从所有LED管芯去除暴露的生长衬底,并且底部填充物在剥离过程中支持每个LED管芯的脆性外延层。 然后将底座晶片分离。 许多LED的晶片级处理同时大大减少了制造时间,并且可以使用各种各样的材料用于底部填充,因为宽范围的粘度是可以容忍的。
    • 3. 发明授权
    • Underfill process for flip-chip LEDs
    • 倒装芯片LED的底部填充工艺
    • US08273587B2
    • 2012-09-25
    • US13115475
    • 2011-05-25
    • Grigoriy BasinFrederic DianaPaul S. MartinDima Simonian
    • Grigoriy BasinFrederic DianaPaul S. MartinDima Simonian
    • H01L21/00
    • H01L33/54H01L24/97H01L33/0079H01L33/56H01L2224/16225H01L2224/32225H01L2224/73204H01L2924/00
    • An underfill technique for LEDs uses compression molding to simultaneously encapsulate an array of flip-chip LED dies mounted on a submount wafer. The molding process causes liquid underfill material (or a softened underfill material) to fill the gap between the LED dies and the submount wafer. The underfill material is then hardened, such as by curing. The cured underfill material over the top and sides of the LED dies is removed using microbead blasting. The exposed growth substrate is then removed from all the LED dies by laser lift-off, and the underfill supports the brittle epitaxial layers of each LED die during the lift-off process. The submount wafer is then singulated. This wafer-level processing of many LEDs simultaneously greatly reduces fabrication time, and a wide variety of materials may be used for the underfill since a wide range of viscosities is tolerable.
    • 用于LED的底部填充技术使用压缩成型来同时封装安装在底座晶片上的倒装芯片LED管芯阵列。 成型工艺使液体底部填充材料(或软化的底部填充材料)填充LED管芯和底座晶片之间的间隙。 然后将底部填充材料硬化,例如通过固化。 使用微珠喷砂除去在LED管芯的顶部和侧面上固化的底部填充材料。 然后通过激光剥离从所有LED管芯去除暴露的生长衬底,并且底部填充物在剥离过程中支持每个LED管芯的脆性外延层。 然后将底座晶片分离。 许多LED的晶片级处理同时大大减少了制造时间,并且可以使用各种各样的材料用于底部填充,因为宽范围的粘度是可以容忍的。
    • 6. 发明申请
    • UNDERFILL PROCESS FOR FLIP-CHIP LEDS
    • FLIP-CHIP LED的底层工艺
    • US20110223696A1
    • 2011-09-15
    • US13115475
    • 2011-05-25
    • Grigoriy BasinFrederic DianaPaul S. MartinDima Simonian
    • Grigoriy BasinFrederic DianaPaul S. MartinDima Simonian
    • H01L33/52
    • H01L33/54H01L24/97H01L33/0079H01L33/56H01L2224/16225H01L2224/32225H01L2224/73204H01L2924/00
    • An underfill technique for LEDs uses compression molding to simultaneously encapsulate an array of flip-chip LED dies mounted on a submount wafer. The molding process causes liquid underfill material (or a softened underfill material) to fill the gap between the LED dies and the submount wafer. The underfill material is then hardened, such as by curing. The cured underfill material over the top and sides of the LED dies is removed using microbead blasting. The exposed growth substrate is then removed from all the LED dies by laser lift-off, and the underfill supports the brittle epitaxial layers of each LED die during the lift-off process. The submount wafer is then singulated. This wafer-level processing of many LEDs simultaneously greatly reduces fabrication time, and a wide variety of materials may be used for the underfill since a wide range of viscosities is tolerable.
    • 用于LED的底部填充技术使用压缩成型来同时封装安装在底座晶片上的倒装芯片LED管芯阵列。 成型工艺使液体底部填充材料(或软化的底部填充材料)填充LED管芯和底座晶片之间的间隙。 然后将底部填充材料硬化,例如通过固化。 使用微珠喷砂除去在LED管芯的顶部和侧面上固化的底部填充材料。 然后通过激光剥离从所有LED管芯去除暴露的生长衬底,并且底部填充物在剥离过程中支持每个LED管芯的脆性外延层。 然后将底座晶片分离。 许多LED的晶片级处理同时大大减少了制造时间,并且可以使用各种各样的材料用于底部填充,因为宽范围的粘度是可以容忍的。