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1. 发明授权

US07580207B2 Optical apparatus comprising an optical component and an adjustment device and method for influencing a polarization state of the optical component 有权
标题翻译：光学装置包括光学部件和用于影响光学部件的偏振状态的调节装置和方法
公开(公告)号：US07580207B2
公开(公告)日：2009-08-25
申请号：US11383012
申请日：2006-05-12
申请人： Frank Melzer
发明人： Frank Melzer
IPC分类号： G02B7/02 , G02B3/00
CPC分类号： G02B7/023 , G03F7/70825 , G03F7/70966
摘要： An optical apparatus comprises an optical component having at least one optical surface and a first optical axis, a socket in which said optical component is mounted, first manipulators arranged to exert forces approximately parallel to the optical axis of the optical component for varying stresses in the optical component, the forces having a strength such that stress birefringence is induced in the component.
摘要翻译：光学装置包括具有至少一个光学表面和第一光轴的光学部件，安装有所述光学部件的插座，布置成施加近似平行于光学部件的光轴的力的第一操纵器，用于改变光学部件，具有在部件中引起应力双折射的强度的力。

2. 发明申请

US20080297755A1 Focusing-device for the radiation from a light source 有权
标题翻译：用于来自光源的辐射的聚焦装置
公开(公告)号：US20080297755A1
公开(公告)日：2008-12-04
申请号：US12218400
申请日：2008-07-15
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
IPC分类号： G03B27/54
CPC分类号： G03F7/70058 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30
摘要： A focusing-device for the radiation from a light source (2) is provided with a collector mirror (1, 1′) which is arranged in a mount (24) and collects the light, in virtual or real terms, from the light source (2) at the second focus (200). The collector mirror (1, 1′) is displaceably connected to the mount (24) via a bearing in such a way that its optical properties remain at least approximately the same even in the event of temperature changes.
摘要翻译：用于来自光源（2）的辐射的聚焦装置设置有集中器反射镜（1,1'），其被布置在安装件（24）中，并以虚拟或实际的方式从光源收集光（2）在第二焦点（200）。收集镜（1,1'）经由轴承可移动地连接到支座（24），使得即使在温度变化的情况下，它的光学特性保持至少近似相同。

3. 发明授权

US07354168B2 Facet mirror having a number of mirror facets 失效
标题翻译：面镜具有多个镜面
公开(公告)号：US07354168B2
公开(公告)日：2008-04-08
申请号：US10848210
申请日：2004-05-18
申请人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
发明人： Hubert Holderer , Andreas Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann , Jurgen Faltus , Berndt Warm , Stefan Dornheim
IPC分类号： G02B5/09 , G02B7/182
CPC分类号： G03F7/70075 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B7/198 , G02B26/0833 , G03F7/70108 , G03F7/70141 , G03F7/70175 , G03F7/702
摘要： A facet mirror (10) is provided with a number of mirror facets (11), in which the mirror facets (11) respectively have a spherical or conical facet body (17) with a reflecting surface (12). The side of the facet body (17) averted from the reflecting surface (12) is mounted in a bearing device (15).
摘要翻译：小面反射镜（10）设置有多个镜面（11），其中镜面（11）分别具有带有反射表面（12）的球形或圆锥形小面体（17）。从反射面（12）避开的小面体（17）的一侧安装在轴承装置（15）中。

4. 发明申请

US20080013680A1 Collector configured of mirror shells 有权
标题翻译：收集器由镜壳配置
公开(公告)号：US20080013680A1
公开(公告)日：2008-01-17
申请号：US11825078
申请日：2007-07-03
申请人： Wolfgang Singer , Wilhelm Egle , Markus Wiess , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
发明人： Wolfgang Singer , Wilhelm Egle , Markus Wiess , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
IPC分类号： G21K5/00 , G02B5/08 , G02B5/10
CPC分类号： G21K1/06 , B82Y10/00 , G02B5/09 , G02B17/006 , G02B19/0014 , G02B19/0019 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70108 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70825 , G21K2201/065 , G21K2201/067
摘要： There is provided a collector. The collector includes a first mirror shell positioned inside a second mirror shell that has a chamfered end.
摘要翻译：有一个收藏家。收集器包括位于具有倒角端的第二镜壳内的第一镜壳。

5. 发明授权

US07244954B2 Collector having unused region for illumination systems using a wavelength ≦193 nm 有权
标题翻译：收集器具有使用波长<= 193nm的照明系统的未使用区域
公开(公告)号：US07244954B2
公开(公告)日：2007-07-17
申请号：US11243403
申请日：2005-10-04
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Jochen Wietzorrek , Frank Melzer , Johannes Wangler
IPC分类号： G02B27/10
CPC分类号： G21K1/06 , B82Y10/00 , G02B5/09 , G02B17/006 , G02B19/0014 , G02B19/0019 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70108 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70825 , G21K2201/065 , G21K2201/067
摘要： There is provided a collector for illumination systems for light having a wavelength ≦193 nm comprising. The collector includes (a) a first mirror shell adjacent to, and positioned inside of, a second mirror shell around a common axis of rotation, in which the first and second mirror shells are rotationally symmetric, and (b) a component in a region between the first and second mirror shells. The collector is for receiving the light from a light source via an object-side aperture and for illuminating an area in an image-side plane, and the region is not used by the light.
摘要翻译：提供了一种用于具有波长<= 193nm的光的照明系统的收集器。收集器包括（a）第一反射镜壳体，其围绕公共旋转轴线邻近第二反射镜壳体并位于其内部，其中第一和第二反射镜壳体旋转对称，以及（b）区域中的部件在第一和第二镜壳之间。收集器用于经由物体侧孔口接收来自光源的光并且用于照射图像侧平面中的区域，并且该区域不被光使用。

6. 发明申请

US20070019310A1 Facet mirrors and a method for producing mirror facets 审中-公开
标题翻译：分面镜和生产镜面的方法
公开(公告)号：US20070019310A1
公开(公告)日：2007-01-25
申请号：US10563701
申请日：2004-07-08
申请人： Andreas Seifert , Frank Melzer , Andreas Heisler , Heinz Mann , Gerhard Romeyn
发明人： Andreas Seifert , Frank Melzer , Andreas Heisler , Heinz Mann , Gerhard Romeyn
IPC分类号： G02B5/08
CPC分类号： G03F7/70075 , G02B5/08 , G02B5/09 , G03F7/70141 , G03F7/702 , G03F7/70825 , G21K2201/06
摘要： In a method for producing mirror facets (1) for facet mirrors in illuminating devices or projection exposure machines in microlithography by using radiation in the extreme ultraviolet range, individual tilting angles are recessed into an optical surface (2) of the mirror facet (1), preferably a surface with tilting angles relative to a reference surface of the mirror facet (1) is machined into or on said optical surface.
摘要翻译：在通过使用在极紫外线范围内的辐射的微照相中的用于在照明装置或投影曝光机中制造用于刻面镜的镜面（1）的方法中，各个倾斜角度凹入到镜面（1）的光学表面（2）中，优选地，相对于镜面（1）的参考表面具有倾斜角度的表面被加工到所述光学表面中或所述光学表面上。

7. 发明授权

US06655808B2 Focusing-device for the radiation from a light source 有权
标题翻译：用于来自光源的辐射的聚焦装置
公开(公告)号：US06655808B2
公开(公告)日：2003-12-02
申请号：US09950186
申请日：2001-09-10
申请人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
发明人： Martin Antoni , Frank Melzer , Andreas Seifert , Wolfgang Singer
IPC分类号： G02B508
CPC分类号： G03F7/70058 , G02B5/10 , G02B17/02 , G02B27/0025 , G02B27/30
摘要： A focusing-device for the radiation from a light source, in particular a laser plasma source, has a collector mirror which collects the light from the light source at a second focus in virtual or real terms, in particular for micro-lithography using EUV radiation, and a routing unit and downstream beam formation in an illuminating system. The collector mirror can be displaced in the z-direction (optical axis) and is designed and/or mounted in such a way that the position of the second focus remains unchanged in the event of temperature changes.
摘要翻译：用于来自光源，特别是激光等离子体源的辐射的聚焦装置具有收集器反射镜，其以虚拟或实际方式在第二焦点处收集来自光源的光，特别是对于使用EUV辐射的微光刻，以及照明系统中的路由单元和下游波束形成。集光镜可以在z方向（光轴）上移位，并且被设计和/或安装成使得在温度变化的情况下第二焦点的位置保持不变。

8. 发明授权

US07196841B2 Lighting system, particularly for use in extreme ultraviolet (EUV) lithography 失效
标题翻译：照明系统，特别适用于极紫外（EUV）光刻
公开(公告)号：US07196841B2
公开(公告)日：2007-03-27
申请号：US10512100
申请日：2003-04-08
申请人： Frank Melzer , Wolfgang Singer
发明人： Frank Melzer , Wolfgang Singer
IPC分类号： G02B5/08 , G02B26/00 , G02B26/08 , G03B27/54 , A61N5/00 , G21K5/00
CPC分类号： G03F7/70075 , G02B26/0816 , G03F7/70141 , G03F7/702
摘要： A lighting system, particularly for use in extreme ultraviolet (EUV) lithography, comprising a projection lens for producing semiconductor elements for wavelengths ≦193 nm is provided with a light source, an object plane, an exit pupil, a first optical element having first screen elements for producing light channels, and with a second optical element having second screen elements. A screen element of the second optical element is assigned to each light channel that is formed by one of the first screen elements of the first optical element. The screen elements of the first optical element and of the second optical element can be configured or arranged so that they produce, for each light channel, a continuous beam course from the light source up to the object plane. The angles of the first screen elements of the first optical element can be adjusted in order to modify a tilt. The location and/or angles of the second screen elements of the second optical element can be adjusted individually and independently of one another in order to realize another assignment of the first screen elements of the first optical element to the second screen elements of the second optical element by displacing and/or tilting the first and second screen elements.
摘要翻译：特别是用于极紫外（EUV）光刻的照明系统，包括用于制造波长<= 193nm的半导体元件的投影透镜，其具有光源，物平面，出射光瞳，具有第一光学元件的第一光学元件用于产生光通道的屏幕元件，以及具有第二屏元件的第二光学元件。第二光学元件的屏幕元件被分配给由第一光学元件的第一屏幕元件之一形成的每个光通道。第一光学元件和第二光学元件的屏幕元件可以被配置或布置成使得它们为每个光通道产生从光源到物平面的连续光束路线。可以调节第一光学元件的第一屏元件的角度以便改变倾斜。第二光学元件的第二屏幕元件的位置和/或角度可以彼此独立地且独立地进行调整，以便实现第一光学元件的第一屏幕元件与第二光学元件的第二屏幕元件的另一分配元件通过移位和/或倾斜第一和第二屏元件。

9. 发明授权

US07091505B2 Collector with fastening devices for fastening mirror shells 有权
标题翻译：带紧固装置的收集器用于固定镜壳
公开(公告)号：US07091505B2
公开(公告)日：2006-08-15
申请号：US10775037
申请日：2004-02-09
申请人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
发明人： Wolfgang Singer , Wilhelm Egle , Markus Weiss , Joachim Hainz , Joachim Wietzorrek , Johannes Wangler , Frank Melzer , Bernhard Gellrich , Bernhard Geuppert , Erich Schubert , Martin Antoni
IPC分类号： G21G5/00 , A61N5/00
CPC分类号： B82Y10/00 , G02B5/09 , G02B7/182 , G02B17/006 , G02B19/0023 , G02B19/0047 , G02B19/0095 , G03F7/70158 , G03F7/70166 , G03F7/70175 , G03F7/702 , G03F7/70233 , G03F7/70358 , G03F7/70825 , G21K1/06 , G21K5/04
摘要： There is provided a projection exposure system operable in a scanning mode along a scanning direction. The projection exposure system includes a collector that receives light having a wavelength ≦193 nm and illuminates a region in a plane. The plane is defined by a local coordinate system having a y-direction parallel to the scanning direction and an x-direction perpendicular to the scanning direction. The collector includes (a) a first mirror shell, (b) a second mirror shell within the first mirror shell, and (c) a fastening device for fastening the first and second mirror shells. The mirror shells are substantially rotational symmetric about a common rotational axis. The fastening device has a support spoke that extends in a radial direction of the mirror shells, and the support spoke, when projected into the plane, yields a projection that is non-parallel to the y-direction.
摘要翻译：提供了沿着扫描方向以扫描模式操作的投影曝光系统。投影曝光系统包括收集器，其收集波长<= 193nm的光并照亮平面中的区域。平面由具有与扫描方向平行的y方向和垂直于扫描方向的x方向的局部坐标系限定。收集器包括（a）第一镜壳，（b）第一镜壳内的第二镜壳，以及（c）用于紧固第一镜壳和第二镜壳的紧固装置。镜壳基本上围绕公共旋转轴线旋转对称。紧固装置具有在镜壳的径向方向上延伸的支撑辐条，并且当投影到平面中时支撑辐条产生不平行于y方向的突起。

10. 发明申请

US20050030656A1 Facet mirror having a number of mirror facets 有权
标题翻译：面镜具有多个镜面
公开(公告)号：US20050030656A1
公开(公告)日：2005-02-10
申请号：US10841846
申请日：2004-05-07
申请人： Hubert Holderer , Andres Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
发明人： Hubert Holderer , Andres Heisler , Wolfgang Singer , Markus Weiss , Andreas Seifert , Frank Melzer , Heinz Mann
IPC分类号： G02B5/09 , G02B7/182 , G02B7/198 , G02B26/08 , G03F7/20
CPC分类号： G03F7/70258 , G02B5/09 , G02B7/1821 , G02B7/1824 , G02B26/0816 , G03F7/70075 , G03F7/70141 , G03F7/702 , G03F7/70275
摘要： In a facet mirror with a number of mirror facets, wherein the mirror facets are provided with reflecting surfaces, the mirror facets are mounted jointly in a basic body via bearing devices. The mirror facets comprise mirror bodies contacting at the periphery with the bearing devices via a surface, line or point contact. The preferred field of use of the facet mirrors is a projection objective of a projection exposure machine in microlithography for fabricating semiconductor elements.
摘要翻译：在具有多个镜面的小平面镜中，其中镜面设置有反射面，镜面通过轴承装置联合地安装在基体内。镜面包括通过表面，线或点接触在外周与轴承装置接触的镜体。小平面镜的优选使用领域是用于制造半导体元件的微光刻中的投影曝光机的投影物镜。

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