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1. 发明授权

US5247534A Pulsed gas-discharge laser 失效
标题翻译：脉冲气体放电激光
公开(公告)号：US5247534A
公开(公告)日：1993-09-21
申请号：US858693
申请日：1992-03-27
申请人： Elmar Muller-Horsche
发明人： Elmar Muller-Horsche
IPC分类号： H01S3/0977 , H01S3/038 , H01S3/0971
CPC分类号： H01S3/09716 , H01S3/038 , H01S3/0384
摘要： A pulsed gas-discharge laser, in particular an excimer laser, comprises main discharge electrodes (10, 10a) of erosion-resistant metal between which laser gas flows with high velocity to replace the laser gas between the main discharge electrodes from laser pulse to laser pulse. For preionizing the laser gas two X-ray radiation sources (30, 30a) are arranged adjacent one main discharge electrode (10). The flow path (18) of the laser gas is formed partially by flow bodies (16, 16a, 32, 32a) which consist of a material which has a high secondary emissive power with regard to the X-ray radiation. The secondary radiation is so configured that it promotes the preionization.
摘要翻译：脉冲气体放电激光器，特别是准分子激光器，包括抗侵蚀金属的主放电电极（10,10a），激光气体以高速度流动，从而将主放电电极之间的激光气体从激光脉冲到激光脉冲。为了预激化激光气体，两个X射线辐射源（30,30a）被布置在一个主放电电极（10）附近。激光气体的流动路径（18）部分地由流体（16,16a，32,32a）形成，该主体由相对于X射线辐射具有高次级发射功率的材料组成。次级辐射被配置成促进了前置电离。

2. 发明授权

US5247535A Apparatus for preionization of gas in a pulsed gas laser 失效
标题翻译：用于在脉冲气体激光中预测气体的装置
公开(公告)号：US5247535A
公开(公告)日：1993-09-21
申请号：US849761
申请日：1992-03-12
申请人： Elmar Muller-Horsche , Ludwig Kohler , Bernd Keller
发明人： Elmar Muller-Horsche , Ludwig Kohler , Bernd Keller
IPC分类号： H01S3/0977 , H01S3/0971
CPC分类号： H01S3/09716
摘要： An apparatus for preionization of gas in a pulsed gas laser by means of soft X-ray radiation comprises an elongated cathode (26) which is heated by thermal radiation or electron bombardment and which is arranged parallel to a likewise elongated anode (18) in an evacuated housing.
摘要翻译：用于通过软X射线辐射在脉冲气体激光器中预气化气体的装置包括细长阴极（26），其通过热辐射或电子轰击加热，并且平行于同样伸长的阳极（18）布置在撤离房屋

3. 发明授权

US5247531A Apparatus for preionizing apulsed gas laser 失效
标题翻译：用于预测未燃气体激光的装置
公开(公告)号：US5247531A
公开(公告)日：1993-09-21
申请号：US849960
申请日：1992-03-12
申请人： Elmar Muller-Horsche
发明人： Elmar Muller-Horsche
IPC分类号： H01S3/038 , H01S3/097 , H01S3/0971 , H01S3/0977
CPC分类号： H01S3/09713
摘要： An apparatus for preionization of a pulsed gas laser comprises corona preionization electrodes (12, 12') which are each arranged adjacent a respective associated main electrode (10, 10'). To generate an effective preionization with low constructional and circuit expenditure the preionization electrodes (12, 12') are set under voltage with the same high-voltage source (16) which also supplies the main electrodes (10, 10') with voltage. By means of an inductance (30) a time delay is set between the excitation of the preionization electrodes and the triggering of the main discharge between the main electrodes (10, 10').
摘要翻译：用于脉冲气体激光器的预电离的装置包括电晕预电离电极（12,12'），每个电极邻近相应的主电极（10,10'）布置。为了产生具有低结构和电路消耗的有效的预电离，将预电极电极（12,12'）设置为具有相同的高压源（16）的电压，该高压源还向主电极（10,10'）提供电压。通过电感（30），在前置电极的激励和主电极（10,10'）之间的主放电的触发之间设定时间延迟。

4. 发明授权

US4630277A Excitation circuit for laser systems, especially for TE-high energy lasers, with adjustment of preionization 失效
标题翻译：用于激光系统的激励电路，特别是用于TE高能量激光器，具有前置电位的调整
公开(公告)号：US4630277A
公开(公告)日：1986-12-16
申请号：US601265
申请日：1984-04-17
申请人： Hans-Jurgen Cirkel , MuReinhard , Elmar Muller-Horsche
发明人： Hans-Jurgen Cirkel , MuReinhard , Elmar Muller-Horsche
IPC分类号： H01S3/0971 , H01S3/00
CPC分类号： H01S3/09713
摘要： An excitation circuit for laser systems with excitation by a maximally homogeneous, arc-free capacitor discharge in a gas space of a laser head between at least two mutually spaced-apart laser electrodes includes at least one fast acting high-voltage switch activatable via a pulse-forming network connected thereto for generating high-voltage pulses at the laser electrodes; first and second stripline capacitors and appertaining equivalent inductances operatively associated with the pulse-forming network and the high-voltage switch and the laser head; preionization devices operatively connected to the laser electrodes and having a plurality of members of at least one of surface discharge gap members and preionization rod members, together with auxiliary circuit connected thereto, the auxiliary circuits being connected to the pulse-forming network for providing all auxiliary voltages and currents for operating the preionization devices, the auxiliary circuits being connectible, in addition to ground potential of the excitation circuit, to at least one of three discrete circuit points of which one point is connected to a high-voltage input of the pulse-forming network, a second point is connected to a high-voltage branching point of the high-voltage switch and one of the stripline capacitors, and a third point is connected directly to the laser electrode having high potential, for controlling the instant of onset of the laser gas discharge and the time relationship between applying a high-voltage pulse to the laser electrodes, on the one hand, and applying a firing pulse to poles of the preionization devices, on the other hand.
摘要翻译：激光系统的激励电路，其具有通过在至少两个相互间隔开的激光电极之间的激光头的气体空间中的最大均匀的无电弧电容器放电而激发的激励电路，包括至少一个快速作用的高压开关，其通过脉冲连接到其上的用于在激光电极处产生高压脉冲的网络; 第一和第二带状线电容器和与脉冲形成网络和高压开关和激光头可操作地相关联的等效电感; 预电离装置可操作地连接到激光电极并且具有多个表面放电间隙构件和预电离棒构件中的至少一个的构件以及与其连接的辅助电路，辅助电路连接到脉冲形成网络，用于提供所有辅助用于操作预电离装置的电压和电流，除了励磁电路的接地电位之外，辅助电路可连接到三个离散电路点中的至少一个，其中一个点连接到脉冲电压的高电压输入端，形成网络，第二点连接到高压开关的高压分支点和带状线电容器之一，第三点直接连接到具有高电位的激光电极，用于控制激光气体放电和向激光电极施加高电压脉冲之间的时间关系另一方面，另一方面，向预电离装置的极点施加点火脉冲。

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