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    • 4. 发明授权
    • Quantitative mobility spectrum analysis of magnetic-field dependent hall
and resistivity data
    • 磁场依赖霍尔和电阻率数据的定量迁移谱分析
    • US6100704A
    • 2000-08-08
    • US69945
    • 1998-04-30
    • Jerry R. MeyerIgor VurgaftmanDavid RedfernJaroslav AntoszewskiLorenzo FaraoneJeffrey R. Lindenmuth
    • Jerry R. MeyerIgor VurgaftmanDavid RedfernJaroslav AntoszewskiLorenzo FaraoneJeffrey R. Lindenmuth
    • G01R31/26
    • G01R31/2648
    • The present invention is a method for determining a carrier conductivity-rier mobility spectrum for a semiconductor sample, having the steps of: exposing the semiconductor sample to a range K of discrete magnetic fields k=1,2, . . . K; for each field obtaining a Hall coefficient R.sub.H and a resistivity .rho., and calculating from R.sub.H (B.sub.k) and .sigma.(B.sub.k) experimental conductivity tensor components .sigma..sub.xx.sup.k (exp) and .sigma..sub.xy.sup.k (exp), and slopes of these conductivity tensor components .sigma.'.sub.xx.sup.k (exp) and .sigma.'.sub.xy.sup.k (exp); selecting a trial carrier conductivity-carrier mobility spectrum s.sub.i corresponding to a plurality I of carrier mobilities .mu..sub.i, i=1,2, . . . I; for each B.sub.j, using this trial carrier conductivity-carrier mobility spectrum to calculate conductivity tensor components .sigma..sub.xx.sup.j and .sigma..sub.xy.sup.j, and slopes of the conductivity tensor components .sigma.'.sub.xx.sup.j and .sigma.'.sub.xy.sup.j ; for each B.sub.j, calculating errors .DELTA..sub.xx.sup.j .ident..sigma..sub.xx.sup.j (exp)-.sigma..sub.xx.sup.j, .DELTA..sub.xy.sup.j .ident..sigma..sub.xy.sup.j (exp)-.sigma..sub.xy.sup.j, .DELTA.'.sub.xx.sup.j (exp)-.sigma.'.sub.xx.sup.j, and .DELTA.'.sub.xy.sup.j .ident..sigma.'.sub.xy.sup.j (exp)-.sigma.'.sub.xy.sup.j, and calculating therefrom a total weighted squared error .chi..sub.j.sup.2 ; for each B.sub.j and at least a subset of .mu..sub.i, calculating an optimum change to said trial carrier conductivity-carrier mobility spectrum .delta.s.sub.ij, and calculating therefrom a modified total weighted squared error .chi..sub.ij.sup.2 ; for each B.sub.j, determining a minimum carrier mobility point .mu..sub.iminj whose corresponding change .delta.s.sub.ij that yields the lowest weighted squared error .chi..sub.ij.sup.2 ; for each B.sub.j and at least a subset of .mu..sub.i, changing the carrier conductivity-carrier mobility spectrum by not more than .delta.s.sub.ij.
    • 本发明是用于确定半导体样品的载流子传导率 - 载流子迁移率谱的方法,具有以下步骤:将半导体样品暴露于离散磁场k = 1,2的范围K。 。 。 K; 对于每个场获得霍尔系数RH和电阻率rho,并且从RH(Bk)和西格马(Bk)实验电导率张量分量sigma xxk(exp)和sigma xyk(exp)计算,并且这些电导率张量分量sigma' xxk(exp)和sigma'xyk(exp); 选择对应于载波移动性的多个I,i = 1,2的试验载波电导率 - 载流子迁移率谱si。 。 。 一世; 对于每个Bj,使用该试验载体电导率 - 载流子迁移率谱来计算电导率张量分量sigma xxj和sigma xyj,以及电导率张量分量sigma'xxj和sigma'xyj的斜率; 对于每个Bj,计算误差DELTA xxj = sigma xxj(exp) - sigma xxj,DELTA xyj = sigma xyj(exp) - sigma xyj,DELTA'xxj(exp) - sigma'xxj和DELTA'xyj = sigma'xyj exp)-σ'xyj,并从其计算总加权平方误差chi j2; 对于每个Bj和至少一个mu i的子集,计算对所述试验载波电导率 - 载波移动频谱δsij的最佳改变,并从其计算修改的总加权平方误差chi ij2; 对于每个Bj,确定最小载波移动点mu iminj,其对应的变化Δsij产生最低加权平方误差chi ij2; 对于每个Bj和至少一个μi的子集,将载波电导率 - 载流子迁移谱改变不超过δsij。