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2. 发明授权

US06374859B1 Manifold system for enabling a distribution of fluids 失效
标题翻译：用于实现流体分配的歧管系统
公开(公告)号：US06374859B1
公开(公告)日：2002-04-23
申请号：US09111999
申请日：1998-07-08
申请人： Kim N. Vu , Eric J. Redemann , David P. Sheriff
发明人： Kim N. Vu , Eric J. Redemann , David P. Sheriff
IPC分类号： F16K2700
CPC分类号： C23C16/44 , C23C16/455 , C23C16/45561 , F16K11/22 , F16K27/003 , H01J37/3244 , H01L21/67017 , Y10T137/5109 , Y10T137/87885
摘要： A manifold system for incorporation in a gas panel distribution system for semi-conductor manufacturing includes a plurality of individual manifold blocks with each manifold block having a fluid passageway with an entrance and exit port accessing a common surface. Adjacent manifold blocks are removably interconnected to permit the respective fluid passageways to be in position for interconnection. A plurality of active components can be sealingly fastened to the individual manifold blocks to complete the interconnection of the respective fluid passageways. Each active component can bridge over a pair of adjacent individual manifold blocks and form with the individual manifold blocks an operative gas stick for delivering gas to a semiconductor tool. The individual manifold blocks can be identical in configuration and can include a first upper flange on one side and a second lower flange on an opposite side to enable an interlocking of adjacent manifold blocks.
摘要翻译：用于并入用于半导体制造的气体面板分配系统中的歧管系统包括多个单独的歧管块，每个歧管块具有流体通道，入口和出口进入共同的表面。相邻的歧管块可移除地互连，以允许相应的流体通道在适当的位置进行互连。多个有源部件可以密封地紧固到各个歧管块以完成各个流体通道的互连。每个有源部件可以跨接在一对相邻的单独歧管块上，并与各个歧管块形成用于将气体输送到半导体工具的可操作气体棒。各个歧管块的构造可以相同，并且可以包括一侧上的第一上凸缘和相对侧上的第二下凸缘，以使得相邻歧管块的联锁。

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