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1. 发明授权

US07119943B2 Plate-based microelectromechanical switch having a three-fold relative arrangement of contact structures and support arms 失效
标题翻译：具有接触结构和支撑臂的三重相对布置的基于平板的微机电开关
公开(公告)号：US07119943B2
公开(公告)日：2006-10-10
申请号：US10921746
申请日：2004-08-19
申请人： Richard D. Nelson , William G. Flynn , David A. Goins
发明人： Richard D. Nelson , William G. Flynn , David A. Goins
IPC分类号： G02B26/00
CPC分类号： H01H59/0009
摘要： A microelectromechanical system (MEMS) switch is provided which includes a multiple of three support arms extending from the periphery of a moveable electrode. In addition, MEMS switch includes a plurality of contact structures having portions extending into a space between a fixed electrode and the moveable electrode. In some cases, the relative arrangement of the support arms and the contact structures are congruent among three regions of the MEMS switch which collectively comprise the entirety of the fixed electrode and the entirety of the moveable electrode. In other embodiments, the contact structures may not be arranged congruently within the MEMS switch.
摘要翻译：提供了一种微机电系统（MEMS）开关，其包括从可移动电极的周边延伸的三个支撑臂的多个。此外，MEMS开关包括多个接触结构，其具有延伸到固定电极和可移动电极之间的空间的部分。在一些情况下，支撑臂和接触结构的相对布置在MEMS开关的三个区域中是一致的，它们共同地包括整个固定电极和整个可移动电极。在其他实施例中，接触结构可以不一致地布置在MEMS开关内。

2. 发明授权

US07310033B2 MEMS switch electrode configuration to increase signal isolation 失效
标题翻译： MEMS开关电极配置增加信号隔离
公开(公告)号：US07310033B2
公开(公告)日：2007-12-18
申请号：US10921696
申请日：2004-08-19
申请人： David A. Goins
发明人： David A. Goins
IPC分类号： H01H51/22
CPC分类号： H01H59/0009 , H01G5/18
摘要： A microelectromechanical system (MEMS) switch is provided which includes a moveable electrode with an opening arranged over at least a portion of the signal trace. In some cases, the opening may include a notch arranged along a periphery of the moveable electrode. In particular, the opening may include a notch bound by two edges of the moveable electrode which are respectively arranged relative to opposing sides of the signal trace. In other embodiments, the opening may include a hole arranged interior to the peripheral edge of the moveable electrode. In some cases, the MEMS switch may include a plurality of contact structures coupled to signal traces. In such cases, the moveable electrode may include openings specifically arranged above a plurality of the signal traces.
摘要翻译：提供了一种微机电系统（MEMS）开关，其包括具有布置在信号迹线的至少一部分上的开口的可移动电极。在一些情况下，开口可以包括沿着可移动电极的周边布置的凹口。特别地，开口可以包括由可移动电极的两个边缘限定的凹口，其相对于信号迹线的相对侧分别布置。在其他实施例中，开口可以包括布置在可移动电极的周边边缘内部的孔。在一些情况下，MEMS开关可以包括耦合到信号迹线的多个接触结构。在这种情况下，可移动电极可以包括特别布置在多个信号迹线上方的开口。

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