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    • 10. 发明授权
    • Light emitting diode with embedded saw-tooth multilayer having a photonic crystal structure and process for fabricating the same
    • 具有嵌入式锯齿多层的发光二极管,具有光子晶体结构及其制造方法
    • US07663153B2
    • 2010-02-16
    • US12011304
    • 2008-01-25
    • Chen-Yang HuangHao-Min KuShiuh ChaoChu-Li ChaoRong Xuan
    • Chen-Yang HuangHao-Min KuShiuh ChaoChu-Li ChaoRong Xuan
    • H01L31/00
    • H01L33/12H01L33/10H01L33/22H01L33/46H01L2933/0083
    • A light emitting diode (LED) is provided. The LED at least includes a substrate, a saw-toothed multilayer, a first type semiconductor layer, an active emitting layer and a second type semiconductor layer. In the LED, the saw-tooth multilayer is formed opposite the active emitting layer below the first type semiconductor layer by an auto-cloning photonic crystal process. Due to the presence of the saw-tooth multilayer on the substrate of the LED, the scattered light form a back of the active emitting layer can be reused by reflecting and recycling through the saw-tooth multilayer. Thus, all light is focused to radiate forward so as to improve the light extraction efficiency of the LED. Moreover, the saw-tooth multilayer does not peel off or be cracked after any high temperature process because the saw-tooth multilayer has the performance of releasing thermal stress and reducing elastic deformation between it and the substrate.
    • 提供了一种发光二极管(LED)。 LED至少包括基板,锯齿多层,第一类型半导体层,有源发射层和第二类型半导体层。 在LED中,通过自动克隆光子晶体工艺,在第一类半导体层下面的有源发射层的相对侧形成锯齿多层。 由于在LED的基板上存在锯齿多层,可以通过锯齿多层的反射和再循环来再次形成有源发射层的背面的散射光。 因此,所有的光被聚焦以向前辐射,以便提高LED的光提取效率。 此外,由于锯齿多层具有释放热应力并且减小其与基板之间的弹性变形的性能,所以锯齿多层不会在任何高温处理之后剥离或破裂。