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    • 4. 发明申请
    • OPTICAL MODULE OF MICRO SPECTROMETER WITH TAPERED SLIT AND SLIT STRUCTURE THEREOF
    • 微型光谱仪的光学模块,带有切片和其结构
    • US20140002820A1
    • 2014-01-02
    • US13642828
    • 2010-04-29
    • Cheng-Hao Ko
    • Cheng-Hao Ko
    • G01J3/04G02B6/26G02B6/34
    • G02B6/34G01J3/0256G01J3/04G01J3/20G01J3/2803G02B6/26
    • An optical module of a micro spectrometer with tapered slit and slit structure thereof. The optical module includes an input section and a micro diffraction grating. The input section includes a slit structure, which receives a first optical signal and outputs a second optical signal travelling along a first optical path. The slit structure includes a substrate and a slit, which penetrates through the substrate and has a gradually reduced dimension from a first surface of the substrate to a second surface of the substrate. The micro diffraction grating, disposed on the first optical path, receives the second optical signal and separates the second optical signal into a plurality of spectrum components travelling along a second optical path. The optical module of the micro spectrometer with the tapered slit and slit structure thereof according to the embodiment of the invention can be manufactured in a mass-production manner using the semiconductor manufacturing processes, so that the cost can be decreased, and the slit can have a smooth surface, which avoids the negative effect on the incident light.
    • 具有锥形狭缝和狭缝结构的微光谱仪的光学模块。 光学模块包括输入部分和微衍射光栅。 所述输入部分包括狭缝结构,其接收第一光信号并输出​​沿着第一光路行进的第二光信号。 狭缝结构包括基板和狭缝,其穿透基板并且具有从基板的第一表面到基板的第二表面的逐渐减小的尺寸。 设置在第一光路上的微衍射光栅接收第二光信号,并将第二光信号分离成沿着第二光路行进的多个光谱分量。 根据本发明的实施例的具有锥形狭缝和狭缝结构的微光谱仪的光学模块可以使用半导体制造工艺以批量生产方式制造,从而可以降低成本,并且狭缝可以具有 光滑的表面,避免了对入射光的负面影响。