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    • 2. 发明授权
    • Semiconductor device and method of fabricating the same
    • 半导体装置及其制造方法
    • US08330218B2
    • 2012-12-11
    • US12870913
    • 2010-08-30
    • Jong-ho ParkHyi-Jeong ParkHye-mi KimChang-Ki Jeon
    • Jong-ho ParkHyi-Jeong ParkHye-mi KimChang-Ki Jeon
    • H01L29/76H01L29/94H01L31/062H01L31/113H01L31/119
    • H01L21/8249H01L21/823412H01L21/823418H01L21/823807H01L21/823814H01L27/0623H01L27/0922H01L29/0653H01L29/41766H01L29/456H01L29/66719H01L29/66727H01L29/7809H01L29/7812
    • Provided are a semiconductor device and a method of fabricating the semiconductor device. The semiconductor device using a DMOS device includes: a semiconductor substrate, in which a first conductive type well is formed; a first conductive type gate electrode formed on the semiconductor substrate with a gate insulating layer intervening between the gate electrode and the semiconductor substrate; a second conductive type body electrode formed on the semiconductor substrate and separated from the gate electrode; a first conductive type drain electrode formed on the semiconductor substrate and separated from the gate electrode and the body electrode; a second conductive type first body region formed in the well under the body electrode; a second conductive type second body region extending from the first body region to the gate insulating layer and formed in the well; a first conductive type source region formed in the second body region and extending from the first body region to the gate insulating layer; and a first conductive type source electrode extending from the source region to surround the gate electrode on the semiconductor substrate with an insulating layer intervening between the source electrode and gate electrode.
    • 提供半导体器件和制造半导体器件的方法。 使用DMOS器件的半导体器件包括:形成第一导电型阱的半导体衬底; 形成在所述半导体衬底上的第一导电型栅极电极,所述栅极绝缘层介于所述栅电极和所述半导体衬底之间; 形成在所述半导体基板上并与所述栅电极分离的第二导电型体电极; 形成在所述半导体基板上并与所述栅电极和所述主体电极分离的第一导电型漏电极; 形成在所述体电极下方的所述阱内的第二导电型第一体区域; 第二导电类型的第二主体区域,其从所述第一主体区域延伸到所述栅极绝缘层并形成在所述阱中; 形成在所述第二主体区域中并从所述第一主体区域延伸到所述栅极绝缘层的第一导电型源极区域; 以及第一导电型源电极,其从所述源极区域延伸,以在所述半导体衬底上围绕所述栅极电极,所述绝缘层介于所述源电极和栅电极之间。
    • 4. 发明授权
    • Method of manufacturing a semiconductor device
    • 制造半导体器件的方法
    • US5913114A
    • 1999-06-15
    • US7534
    • 1998-01-15
    • Sun-Hak LeeChang-Ki JeonCheol-Joong Kim
    • Sun-Hak LeeChang-Ki JeonCheol-Joong Kim
    • H01L27/06H01L21/8249H01L21/8238
    • H01L29/66712H01L21/8249H01L29/7809H01L29/42368
    • A semiconductor device, and a method of manufacturing the same, containing a high voltage DMOS transistor, a low voltage CMOS transistor, and a bipolar transistor in a single substrate. The steps include forming an isolation layer within the substrate in an isolation region between each of a DMOS region, a CMOS region, or a bipolar region. A first oxide layer of variable thickness is formed on the substrate, a thick second oxide layer is formed on the isolation layer, and a polysilicon layer is formed on both oxide layers. The polysilicon layer is patterned to form gate patterns on the first oxide layer and resistive patterns on the second oxide layer. The gate pattern is then doped but the resistive pattern is undoped. The thickness of the first oxide layer in the DMOS region is greater than the thickness of the first oxide layer in the CMOS region.
    • 在单个基板中包含高电压DMOS晶体管,低电压CMOS晶体管和双极晶体管的半导体器件及其制造方法。 这些步骤包括在DMOS区域,CMOS区域或双极区域中的每一个之间的隔离区域内在衬底内形成隔离层。 在衬底上形成可变厚度的第一氧化物层,在隔离层上形成厚的第二氧化物层,并且在两个氧化物层上形成多晶硅层。 图案化多晶硅层以在第一氧化物层上形成栅极图案,并在第二氧化物层上形成电阻图案。 然后掺杂栅极图案,但是电阻图案是未掺杂的。 DMOS区域中的第一氧化物层的厚度大于CMOS区域中第一氧化物层的厚度。
    • 5. 发明授权
    • Power semiconductor device
    • 功率半导体器件
    • US08217487B2
    • 2012-07-10
    • US12763689
    • 2010-04-20
    • Yongcheol ChoiChang-Ki JeonMinsuk KimDonghwan Kim
    • Yongcheol ChoiChang-Ki JeonMinsuk KimDonghwan Kim
    • H02M3/07H01L21/70
    • H03K17/6871H03K17/063H03K17/567H03K2217/0081
    • Disclosed is a power semiconductor device including a bootstrap circuit. The power semiconductor device includes a high voltage unit that provides a high voltage control signal so that a high voltage is output; a low voltage unit that provides a low voltage control signal so that a ground voltage is output, and is spaced apart from the high voltage unit; a charge enable unit that is electrically connected to the low voltage unit and charges a bootstrap capacitor for supplying power to the high voltage unit when the high voltage is output, when the ground voltage is output; and a high voltage cut-off unit that cuts off the high voltage when the high voltage is output so that the high voltage is not applied to the charge enable unit, and includes a first terminal electrically connected to the charge enable unit and a second terminal electrically connected to the high voltage unit.
    • 公开了一种包括自举电路的功率半导体器件。 功率半导体器件包括提供高电压控制信号以便输出高电压的高电压单元; 提供低电压控制信号以便输出接地电压并与高电压单元间隔开的低压单元; 充电使能单元,当输出所述接地电压时,电连接到所述低电压单元并对输出高电压单元的自举电容充电; 以及高压截止单元,其在输出高电压时切断高电压,使得高电压不被施加到充电使能单元,并且包括电连接到充电使能单元的第一端子和第二端子 电连接到高压单元。
    • 7. 发明申请
    • HIGH VOLTAGE SEMICONDUCTOR DEVICE HAVING SHIFTERS AND METHOD OF FABRICATING THE SAME
    • 具有变形器的高电压半导体器件及其制造方法
    • US20090243696A1
    • 2009-10-01
    • US12402528
    • 2009-03-12
    • Chang-ki JeonMin-suk KimYong-cheol Choi
    • Chang-ki JeonMin-suk KimYong-cheol Choi
    • H03L5/00H01L21/76
    • H01L27/088H01L21/823481
    • Provided are a high-voltage semiconductor device including a junction termination which electrically isolates a low voltage unit from a high voltage unit, and a method of fabricating the same. The high voltage semiconductor device includes a high voltage unit, a low voltage unit surrounding the high voltage unit, and a junction termination formed between the high voltage unit and the low voltage unit and surrounding the high voltage unit to electrically isolate the high voltage unit from the low voltage unit. The junction termination includes at least one level shifter which level shifts signals from the low voltage unit and supplies the same to the high voltage unit, a first device isolation region surrounding the high voltage unit to electrically isolate the high voltage unit from the level shifter, and a resistor layer electrically connecting neighboring level shifters.
    • 提供一种包括将低电压单元与高电压单元电隔离的接合端子的高压半导体器件及其制造方法。 高电压半导体器件包括高电压单元,围绕高电压单元的低电压单元,以及形成在高电压单元和低电压单元之间并且围绕高电压单元的连接端子,以将高压单元与 低压单位。 所述连接终端包括至少一个电平移位器,其将来自所述低电压单元的信号电平移位并将其提供给所述高压单元;围绕所述高压单元的第一器件隔离区,以将所述高压单元与所述电平移位器电隔离; 以及电连接相邻电平移位器的电阻层。