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    • 5. 发明授权
    • Low temperature chemical vapor deposition method for forming tungsten
and tungsten carbide
    • 用于形成钨和碳化钨的低温化学气相沉积方法
    • US5006371A
    • 1991-04-09
    • US490184
    • 1990-03-08
    • Diwakar GargErnest L. WrecsicsLeslie E. SchafferCarl F. MuellerPaul N. DyerKeith R. Fabregas
    • Diwakar GargErnest L. WrecsicsLeslie E. SchafferCarl F. MuellerPaul N. DyerKeith R. Fabregas
    • C23C16/14C23C16/30C23C28/00
    • C23C28/00C23C16/14C23C16/30
    • An improved highly erosive and abrasive wear resistant multi-layered coating system on a substrate which provides protection against impact of large particles is disclosed comprising a plurality of composite layers. In each of the composite layers, the first layer closest to the substrate comprises tungsten of sufficient thickness to confer substantial erosion and abrasion wear resistance characteristics to the coating system and a second layer deposited on the first layer comprises a mixture of tungsten and tungsten carbide and the tungsten carbide comprises W.sub.2 C, W.sub.3 C, or a mixture of both. Because the resulting coating system has enhanced high cycle fatigue strength over the substrate, the coating system is especially useful on such structures as turbine blades and similar articles of manufacture where such chemical vapor depositing the first and second layers at a temperature in the range of about 300.degree. to about 550.degree. C. and then repeating the chemical vapor deposition steps to achieve the multi-layered coating system such that the overall thickness of the system is at least about 20 .mu.m.
    • 公开了一种改进的高侵蚀性和磨蚀性耐磨多层涂层系统,其在基板上提供防止大颗粒冲击的保护,其包括多个复合层。 在每个复合层中,最靠近基底的第一层包括足够厚度的钨,以赋予涂层体系显着的侵蚀和磨损耐磨特性,而沉积在第一层上的第二层包括钨和碳化钨的混合物,以及 碳化钨包括W2C,W3C或两者的混合物。 由于所得到的涂层体系在衬底上具有增强的高循环疲劳强度,因此涂层系统特别适用于诸如涡轮机叶片和类似制品的结构,其中这种化学气相沉积第一和第二层的温度范围为约 然后重复化学气相沉积步骤以实现多层涂层体系,使得系统的总体厚度至少为20微米。