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    • 2. 发明授权
    • Multiple layer alignment sensing
    • 多层对齐检测
    • US07650029B2
    • 2010-01-19
    • US10995840
    • 2004-11-23
    • Carl E. PicciottoJun Gao
    • Carl E. PicciottoJun Gao
    • G06K9/00
    • G03F9/7003G03F9/7038G03F9/7088
    • Using an imaging system in relation to a plurality of material layers is described, the material layers being separated by a distance greater than a depth of field of the imaging system. A focal plane of the imaging system and a first of the plurality of material layers are brought into correspondence. A first image including at least a portion of the first material layer having a first feature of interest thereon is stored. The focal plane of the imaging system and a second of the plurality of material layers are brought into correspondence. A second image including at least a portion of the second material layer having a second feature of interest thereon is acquired. The first and second images are processed for automatic computation of an alignment measurement between the first and second features of interest.
    • 描述了相对于多个材料层使用成像系统,材料层被分离大于成像系统的景深的距离。 使成像系统的焦平面和多个材料层中的第一个成对准。 存储包括其上具有感兴趣的第一特征的第一材料层的至少一部分的第一图像。 使成像系统的焦平面和多个材料层中的第二个成对应。 获取包括具有第二特征的第二材料层的至少一部分的第二图像。 处理第一和第二图像以自动计算感兴趣的第一和第二特征之间的对准测量。
    • 3. 发明授权
    • Displacement estimation system and method
    • 位移估计系统和方法
    • US07085673B2
    • 2006-08-01
    • US10930614
    • 2004-08-31
    • Carl E. PicciottoJun GaoWei Wu
    • Carl E. PicciottoJun GaoWei Wu
    • G01B21/02G06K9/32
    • G06T7/20G06T7/70
    • A displacement estimation system including a data acquisition system and a processing system is provided. The data acquisition system is configured to capture a first frame from a first substrate including a first pattern and a second substrate including a second pattern at a first time and capture a second frame from a third substrate including a third pattern and a fourth substrate including a fourth pattern at a second time subsequent to the first time. The first pattern and the third pattern are substantially identical, and the second pattern and the fourth pattern are substantially identical. The processing system is configured to calculate a first displacement between the first pattern and the third pattern using the first frame and the second frame and calculate a second displacement between the second pattern and the fourth pattern using the first frame and the second frame.
    • 提供了包括数据采集系统和处理系统的位移估计系统。 数据采集​​系统被配置为在第一时间从包括第一图案的第一基板和包括第二图案的第二基板捕获第一帧,并从包括第三图案的第三基板和包括第三图案的第四基板捕获第二帧 第四模式在第一次之后的第二时间。 第一图案和第三图案基本相同,第二图案和第四图案基本相同。 处理系统被配置为使用第一帧和第二帧来计算第一图案和第三图案之间的第一位移,并且使用第一帧和第二帧计算第二图案和第四图案之间的第二位移。
    • 6. 发明申请
    • LITHOGRAPHY ALIGNMENT SYSTEM AND METHOD USING nDSE-BASED FEEDBACK CONTROL
    • LITHOGRAPHY对准系统和使用基于nDSE的反馈控制的方法
    • US20080090312A1
    • 2008-04-17
    • US11550372
    • 2006-10-17
    • Inkyu ParkWei WuJun GaoCarl E. Picciotto
    • Inkyu ParkWei WuJun GaoCarl E. Picciotto
    • H01L21/66
    • G03F9/7038G03F9/7088G03F9/7092G03F9/7096
    • A contact lithography alignment system and method use nanoscale displacement sensing and estimation (nDSE) to maintain an alignment and compensate for a disturbance of one or more objects during contact lithography. A method of maintaining an alignment includes establishing an initial alignment of one or more objects and employing nDSE-based feedback control of relative positions of more or more of the objects to maintain the alignment during contact lithography. A method of disturbance compensation includes acquiring a first image, acquiring a second image, estimating an alignment error using nDSE applied to the first and second image, and adjusting a relative position to reduce the alignment error. A contact lithography system includes an optical sensor, a feedback processor providing nDSE and a position controller that adjusts relative positions of one or more objects to reduce an alignment error determined using the nDSE.
    • 接触光刻对准系统和方法使用纳米尺度位移感测和估计(nDSE)来保持对准并补偿接触光刻期间一个或多个物体的干扰。 保持对准的方法包括建立一个或多个对象的初始对准,并且采用基于nDSE的多个对象的相对位置的反馈控制来保持接触光刻期间的对准。 干扰补偿的方法包括获取第一图像,获取第二图像,使用施加到第一和第二图像的nDSE来估计对准误差,以及调整相对位置以减小对准误差。 接触光刻系统包括光学传感器,提供nDSE的反馈处理器和调整一个或多个对象的相对位置以减少使用nDSE确定的对准误差的位置控制器。