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    • 4. 发明授权
    • Inductor
    • 电感器
    • US07986211B2
    • 2011-07-26
    • US12968022
    • 2010-12-14
    • Seong-il KimJongmin LeeByoung-Gue MinHyung Sup YoonHae Cheon KimEun Soo Nam
    • Seong-il KimJongmin LeeByoung-Gue MinHyung Sup YoonHae Cheon KimEun Soo Nam
    • H01F5/00
    • H01F17/0006H01F2017/0086H01L28/10
    • Provided is an inductor. The inductor includes a first to a fourth conductive terminals formed in one direction within a semiconductor substrate, a first conductive line formed on one side of the semiconductor substrate and electrically connected to the second and third conductive terminals interiorly positioned among the first to fourth conductive terminals, a second conductive line formed on the one side of the semiconductor substrate and electrically connected to the first and fourth conductive terminals exteriorly positioned among the first to fourth conductive terminals, and a third conductive line formed on the other side of the semiconductor substrate and electrically connected to the first and third conductive terminals among the first to fourth conductive terminals.
    • 提供一种电感器。 电感器包括在半导体衬底内的一个方向上形成的第一至第四导电端子,形成在半导体衬底的一侧上的第一导电线,并且电连接到内部位于第一至第四导电端子之间的第二和第三导电端子 形成在所述半导体衬底的一侧上并与外部位于所述第一至第四导电端子之间的所述第一和第四导电端子电连接的第二导电线,以及形成在所述半导体衬底的另一侧上并电连接的第三导电线 连接到第一至第四导电端子中的第一和第三导电端子。
    • 5. 发明授权
    • Method of fabricating heterojunction bipolar transistor
    • 异质结双极晶体管的制造方法
    • US07273789B2
    • 2007-09-25
    • US11227503
    • 2005-09-15
    • Byoung Gue MinJong Min LeeSeong Il KimChul Won JuKyung Ho Lee
    • Byoung Gue MinJong Min LeeSeong Il KimChul Won JuKyung Ho Lee
    • H01L21/331
    • H01L29/66318H01L29/7371
    • Provided is a method of fabricating a heterojunction bipolar transistor (HBT). The method includes: sequentially depositing a sub-collector layer, a collector layer, a base layer, an emitter layer, and an emitter capping layer on a substrate; forming an emitter electrode on the emitter capping layer; forming a mesa type emitter to expose the base layer by sequentially etching the emitter capping layer and the emitter layer using the emitter electrode as an etch mask in vertical and negative-sloped directions to the substrate, respectively; and forming a base electrode on the exposed base layer using the emitter electrode as a mask in self-alignment with the emitter electrode. In this method, a distance between the mesa type emitter and the base electrode can be minimized and reproducibly controlled. Also, a self-aligned device with an excellent high-frequency characteristic can be embodied.
    • 提供了一种制造异质结双极晶体管(HBT)的方法。 该方法包括:在衬底上依次沉积副集电极层,集电极层,基极层,发射极层和发射极覆盖层; 在发射极盖层上形成发射电极; 通过使用发射极电极作为蚀刻掩模,分别在垂直和负向倾斜的方向上依次蚀刻发射极覆盖层和发射极层来形成台面型发射极以暴露基底层; 以及使用发射电极作为与发射极电极自对准的掩模,在所述暴露的基底层上形成基极。 在这种方法中,台面型发射极和基极之间的距离可以被最小化并可重复地控制。 此外,可以实现具有优异的高频特性的自对准装置。
    • 7. 发明申请
    • INDUCTOR
    • 电感器
    • US20110140825A1
    • 2011-06-16
    • US12968022
    • 2010-12-14
    • Seong-il KIMJongmin LeeByoung-Gue MinHyung Sup YoonHae Cheon KimEun Soo Nam
    • Seong-il KIMJongmin LeeByoung-Gue MinHyung Sup YoonHae Cheon KimEun Soo Nam
    • H01F27/30
    • H01F17/0006H01F2017/0086H01L28/10
    • Provided is an inductor. The inductor includes a first to a fourth conductive terminals formed in one direction within a semiconductor substrate, a first conductive line formed on one side of the semiconductor substrate and electrically connected to the second and third conductive terminals interiorly positioned among the first to fourth conductive terminals, a second conductive line formed on the one side of the semiconductor substrate and electrically connected to the first and fourth conductive terminals exteriorly positioned among the first to fourth conductive terminals, and a third conductive line formed on the other side of the semiconductor substrate and electrically connected to the first and third conductive terminals among the first to fourth conductive terminals.
    • 提供一种电感器。 电感器包括在半导体衬底内的一个方向上形成的第一至第四导电端子,形成在半导体衬底的一侧上的第一导电线,并且电连接到内部位于第一至第四导电端子之间的第二和第三导电端子 形成在所述半导体衬底的一侧上并与外部位于所述第一至第四导电端子之间的所述第一和第四导电端子电连接的第二导电线,以及形成在所述半导体衬底的另一侧上并电连接的第三导电线 连接到第一至第四导电端子中的第一和第三导电端子。