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    • 1. 发明授权
    • Total reflection tera hertz wave measuring apparatus
    • 全反射赫兹波测量仪
    • US08354644B2
    • 2013-01-15
    • US12530897
    • 2008-02-13
    • Takashi YasudaYoichi KawadaHironori TakahashiShinichiro AoshimaAtsuko Aoshima
    • Takashi YasudaYoichi KawadaHironori TakahashiShinichiro Aoshima
    • G01J5/02
    • G01N21/3581G01N21/552
    • A total reflection terahertz wave measuring apparatus 1 is configured to acquire information on a subject S by a total reflection measurement method by use of a terahertz wave, and includes a light source 11, a branching part 12, a chopper 13, an optical path length difference adjusting part 14, a polarizer 15, a separator 17, a terahertz wave generating element 20, an internal total reflection prism 31, a terahertz wave detecting element 40, a ¼ wavelength plate 51, a polarization split element 52, a photodetector 53A, a photodetector 53B, a differential amplifier 54, and a lock-in amplifier 55. The internal total reflection prism 31 is a so-called aplanatic prism, and has an entrance plane 31a, an exit plane 31b, and a reflection plane 31c. The terahertz wave generating element 20 is provided to be integrated with the entrance plane 31a of the internal total reflection prism 31, and the terahertz wave detecting element 40 is provided to be integrated with the exit plane 31b of the internal total reflection prism 31.
    • 全反射太赫波测量装置1被配置为通过使用太赫兹波的全反射测量方法获取关于被摄体S的信息,并且包括光源11,分支部12,斩波器13,光程长度 差分调整部14,偏振片15,隔膜17,太赫波生成元件20,内部全反射棱镜31,太赫兹波检测元件40,1/4波片51,偏振分离元件52,光电检测器53A, 光检测器53B,差分放大器54和锁定放大器55.内部全反射棱镜31是所谓的平行棱镜,具有入射面31a,出射面31b和反射面31c。 太赫波发生元件20设置成与内部全反射棱镜31的入射面31a一体化,并且太赫兹波检测元件40设置成与内部全反射棱镜31的出射面31b一体化。
    • 2. 发明授权
    • Laser beam working machine
    • 激光束加工机
    • US08841580B2
    • 2014-09-23
    • US13143604
    • 2009-12-04
    • Kenshi FukumitsuShingo OishiShinichiro AoshimaAtsuko Aoshima
    • Kenshi FukumitsuShingo OishiShinichiro Aoshima
    • B23K26/08B23K26/073B23K26/00
    • B23K26/0736B23K26/0617B23K26/0738B23K26/08B23K26/53
    • A cylindrical lens (4) diverges a laser beam (L1) in the Y-axis direction (i.e., within the YZ plane) but neither diverges nor converges it in the X-axis direction (i.e., within the ZX plane). An objective lens (5) converges the laser beam (L1) emitted from the cylindrical lens (4) into a point P1 in the Y-axis direction and into a point P2 in the X-axis direction. As a consequence, the cross section of the laser beam (L1) becomes elongated forms extending in the X- and Y-axis directions at the points P1, P2, respectively. Therefore, when the points P1, P2 are located on the outside and inside of the work (S), respectively, an elongated working area extending in the Y-axis direction can be formed in a portion where the point P2 is positioned within the work (S).
    • 柱面透镜(4)在Y轴方向(即,在YZ平面内)分散激光束(L1),但是在X轴方向(即,ZX平面内)中也不会发散或会聚。 物镜(5)将从柱面透镜(4)射出的激光束(L1)向Y轴方向的点P1会聚,并将X轴方向的点P2会聚。 因此,激光束(L1)的横截面分别成为在点P1,P2处沿X轴方向和Y轴方向延伸的细长形状。 因此,当点P1,P2分别位于工件(S)的外侧和内部时,可以在点P2位于工件(S)内的部分中形成沿Y轴方向延伸的细长工作区域 (S)。
    • 3. 发明授权
    • Total reflection terahertz wave measurement device
    • 全反射太赫兹波测量装置
    • US08415625B2
    • 2013-04-09
    • US12988158
    • 2009-04-27
    • Atsushi NakanishiYoichi KawadaTakashi YasudaHironori TakahashiMasatoshi FujimotoShinichiro AoshimaAtsuko Aoshima
    • Atsushi NakanishiYoichi KawadaTakashi YasudaHironori TakahashiMasatoshi FujimotoShinichiro Aoshima
    • G01J5/02
    • G01N21/552G01N21/3504G01N21/3586
    • A total reflection terahertz wave measuring apparatus 1 includes a light source 11, a branching part 12, a chopper 13, an optical path length difference adjusting part 14, a polarizer 15, a beam splitter 17, a terahertz wave generating element 20, a filter 25, an internal total reflection prism 31, a terahertz wave detecting element 40, a ¼ wavelength plate 51, a polarization split element 52, a photodetector 53a, a photodetector 53b, a differential amplifier 54, and a lock-in amplifier 55. The internal total reflection prism 31 is a so-called aplanatic prism, and has an entrance surface 31a, an exit surface 31b, and a reflection surface 31c. The terahertz wave generating element 20 and the filter 25 are provided to be integrated with the entrance surface 31a of the internal total reflection prism 31, and the terahertz wave detecting element 40 is provided to be integrated with the exit surface 31b of the internal total reflection prism 31. The filter 25 allows a terahertz wave to be transmitted therethrough and blocks pump light. Accordingly, a total reflection terahertz wave measuring apparatus, which can be downsized, can be realized.
    • 全反射太赫波测量装置1包括光源11,分支部12,斩波器13,光程长度差调节部14,偏振器15,分束器17,太赫兹波发生元件20,滤光器 25,内部全反射棱镜31,太赫兹波检测元件40,1/4波片51,偏振分离元件52,光电检测器53a,光电检测器53b,差分放大器54和锁定放大器55。 内部全反射棱镜31是所谓的平行棱镜,具有入射面31a,出射面31b和反射面31c。 太赫兹波发生元件20和滤波器25设置成与内部全反射棱镜31的入射面31a一体化,太赫兹波检测元件40设置成与内部全反射棱镜31的出射面31b一体化 滤光器25允许太赫兹波被透过并阻止泵浦光。 因此,能够实现小型化的全反射太赫兹波测量装置。
    • 5. 发明授权
    • Laser beam working machine
    • 激光束加工机
    • US08872067B2
    • 2014-10-28
    • US13143636
    • 2009-12-04
    • Kenshi FukumitsuShingo OishiShinichiro AoshimaAtsuko Aoshima
    • Kenshi FukumitsuShingo OishiShinichiro Aoshima
    • B23K26/08B23K26/073
    • B23K26/0732B23K26/0617B23K26/073B23K26/0738B23K26/08
    • A cylindrical lens (4) diverges a laser beam (L1) in the Y-axis direction (i.e., within the YZ plane) but neither diverges nor converges it in the X-axis direction (i.e., within the ZX plane). An objective lens (5) converges the laser beam (L1) emitted from the cylindrical lens (4) into a point P1 in the Y-axis direction and into a point P2 in the X-axis direction. A pair of knife edges (13) adjust the divergence angle (θ) of the laser beam (L1) incident on the objective lens (5) in the Y-axis direction. As a consequence, the cross section of the laser beam (L1) becomes an elongated form extending in the Y-axis direction at the point P2, while the maximum length in the Y-axis direction is regulated. Therefore, locating the point P2 on the front face of a work (S) can form an elongated working area extending in the Y-axis direction by a desirable length on the front face of the work (S).
    • 柱面透镜(4)在Y轴方向(即,在YZ平面内)分散激光束(L1),但是在X轴方向(即,ZX平面内)中也不会发散或会聚。 物镜(5)将从柱面透镜(4)射出的激光束(L1)向Y轴方向的点P1会聚,并将X轴方向的点P2会聚。 一对刀刃(13)调整在Y轴方向入射到物镜(5)上的激光束(L1)的发散角(& L)。 结果,激光束(L1)的横截面变为在点P2处沿Y轴方向延伸的细长形状,同时限制Y轴方向上的最大长度。 因此,将点P2定位在工件(S)的前表面上可以形成在工件(S)的正面上沿Y轴方向延伸期望长度的细长工作区域。
    • 6. 发明申请
    • LASER BEAM WORKING MACHINE
    • 激光束工作机
    • US20120006797A1
    • 2012-01-12
    • US13143636
    • 2009-12-04
    • Kenshi FukumitsuShingo OishiShinichiro AoshimaAtsuko Aoshima
    • Kenshi FukumitsuShingo OishiShinichiro AoshimaAtsuko Aoshima
    • B23K26/00
    • B23K26/0732B23K26/0617B23K26/073B23K26/0738B23K26/08
    • A cylindrical lens (4) diverges a laser beam (L1) in the Y-axis direction (i.e., within the YZ plane) but neither diverges nor converges it in the X-axis direction (i.e., within the ZX plane). An objective lens (5) converges the laser beam (L1) emitted from the cylindrical lens (4) into a point P1 in the Y-axis direction and into a point P2 in the X-axis direction. A pair of knife edges (13) adjust the divergence angle (θ) of the laser beam (L1) incident on the objective lens (5) in the Y-axis direction. As a consequence, the cross section of the laser beam (L1) becomes an elongated form extending in the Y-axis direction at the point P2, while the maximum length in the Y-axis direction is regulated. Therefore, locating the point P2 on the front face of a work (S) can form an elongated working area extending in the Y-axis direction by a desirable length on the front face of the work (S).
    • 柱面透镜(4)在Y轴方向(即,在YZ平面内)分散激光束(L1),但是在X轴方向(即,ZX平面内)中也不会发散或会聚。 物镜(5)将从柱面透镜(4)射出的激光束(L1)向Y轴方向的点P1会聚,并将X轴方向的点P2会聚。 一对刀刃(13)调整在Y轴方向入射到物镜(5)上的激光束(L1)的发散角(& L)。 结果,激光束(L1)的横截面变为在点P2处沿Y轴方向延伸的细长形状,同时限制Y轴方向上的最大长度。 因此,将点P2定位在工件(S)的前表面上可以形成在工件(S)的正面上沿Y轴方向延伸期望长度的细长工作区域。
    • 7. 发明申请
    • TOTAL REFLECTION TERAHERTZ WAVE MEASUREMENT DEVICE
    • 总反射TERAHERTZ波形测量装置
    • US20110249253A1
    • 2011-10-13
    • US12988158
    • 2009-04-27
    • Atsushi NakanishiYoichi KawadaTakashi YasudaHironori TakahashiMasatoshi FujimotoShinichiro AoshimaAtsuko Aoshima
    • Atsushi NakanishiYoichi KawadaTakashi YasudaHironori TakahashiMasatoshi FujimotoShinichiro AoshimaAtsuko Aoshima
    • G01J3/00
    • G01N21/552G01N21/3504G01N21/3586
    • A total reflection terahertz wave measuring apparatus 1 includes a light source 11, a branching part 12, a chopper 13, an optical path length difference adjusting part 14, a polarizer 15, a beam splitter 17, a terahertz wave generating element 20, a filter 25, an internal total reflection prism 31, a terahertz wave detecting element 40, a ¼ wavelength plate 51, a polarization split element 52, a photodetector 53a, a photodetector 53b, a differential amplifier 54, and a lock-in amplifier 55. The internal total reflection prism 31 is a so-called aplanatic prism, and has an entrance surface 31a, an exit surface 31b, and a reflection surface 31c. The terahertz wave generating element 20 and the filter 25 are provided to be integrated with the entrance surface 31a of the internal total reflection prism 31, and the terahertz wave detecting element 40 is provided to be integrated with the exit surface 31b of the internal total reflection prism 31. The filter 25 allows a terahertz wave to be transmitted therethrough and blocks pump light. Accordingly, a total reflection terahertz wave measuring apparatus, which can be downsized, can be realized.
    • 全反射太赫波测量装置1包括光源11,分支部12,斩波器13,光程长度差调节部14,偏振器15,分束器17,太赫兹波发生元件20,滤光器 25,内部全反射棱镜31,太赫兹波检测元件40,1/4波片51,偏振分离元件52,光电检测器53a,光电检测器53b,差分放大器54和锁定放大器55。 内部全反射棱镜31是所谓的平行棱镜,具有入射面31a,出射面31b和反射面31c。 太赫兹波发生元件20和滤波器25设置成与内部全反射棱镜31的入射面31a一体化,太赫兹波检测元件40设置成与内部全反射棱镜31的出射面31b一体化 滤光器25允许太赫兹波被透过并阻止泵浦光。 因此,能够实现小型化的全反射太赫兹波测量装置。