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1. 发明授权

US4976613A Heat treatment apparatus 失效
标题翻译：热处理设备
公开(公告)号：US4976613A
公开(公告)日：1990-12-11
申请号：US249780
申请日：1988-09-26
申请人： Shingo Watanabe
发明人： Shingo Watanabe
IPC分类号： H01L21/205 , C30B35/00 , H01L21/00 , H01L21/22 , H01L21/31 , H01L21/677 , F27D3/12
CPC分类号： H01L21/67757 , C30B35/00 , H01L21/67115 , Y10S414/14
摘要： Disclosed is a heat treatment apparatus comprises a body having an opening section on the clear room side, a furance disposed in the body, a process tube arranged elevatably relative to the furnace, and a preventing plate arranged closably at the opening section for shutting off the opening section when it is closed, thereby it is possible to prevent dust from entering into the clean room by closing the opening section with the preventing plate. Further, disclosed is an heat treatment apparatus wherein the process tube is supported by arms, these arms being horizontally receiprocated between the space section below the furnace and position outside of the space section, where the process tube is located, while the arms are elevated and lowered so that the process tube supported on the arms is delivered to and received from the elevaotr, and the process tube is supported, elevated and lowered by the elevator, relative to the furnace, thereby it is possible to move the process tube and to mount and remove the same to and from the body without relying upon human hands, thereby it is possible to facilitate the movement operation of the process tube and enhance the economy of operation and the safety of working.
摘要翻译：公开了一种热处理设备，包括：在清洁室侧具有开口部分的主体，设置在主体中的保护件，相对于炉子高度设置的处理管;以及防止板，其设置在开口部处，用于切断开闭部，因此能够通过用防止板关闭开口部来防止灰尘进入清洁室。此外，公开了一种热处理设备，其中处理管由臂支撑，这些臂水平地接合在炉的下方的空间部分之间，并且在臂被提升的同时位于处理管所在的空间部分的外部，下降，使得支撑在臂上的处理管被输送到电梯并从电动机接收，并且由电梯相对于炉子支撑，升高和降低处理管，从而可以移动处理管并安装并且不依赖人手从身体去除，从而有助于加工管的移动操作，增强操作经济性和工作安全性。

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