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1. 发明申请

US20100108893A1 Devices and Methods for Ultra Thin Photodiode Arrays on Bonded Supports 审中-公开
标题翻译：超薄型光电二极管阵列在固定支架上的设备和方法
公开(公告)号：US20100108893A1
公开(公告)日：2010-05-06
申请号：US12606012
申请日：2009-10-26
申请人： Frederick A. Flitsch , Alexander O. Goushcha
发明人： Frederick A. Flitsch , Alexander O. Goushcha
IPC分类号： G01T1/20 , H01L31/103 , H01L27/146 , H01L31/18
CPC分类号： H01L27/1463 , H01L27/1464 , H01L27/14689
摘要： Ultra thin photodiode array structures and fabrication methods are disclosed. The back illuminated or front illuminated photodiode arrays have the active portion fabricated in a semiconductor layer which may be bonded to a supporting substrate layer. The active portion of semiconductor layer may comprise epitaxially grown layer. The isolation regions between pixels of an array may span the epitaxial layer and a semiconductor layer. Electrical contacts to the diodes are made through the bonded substrate or a portion of active layer. Methods of fabrication include steps to form a photodiode array of this type as well as steps to bond this array to supporting substrates. In some embodiments, supporting substrates are temporarily bonded for support of the methods of processing.
摘要翻译：公开了超薄光电二极管阵列结构和制造方法。背照明或前照明光电二极管阵列具有制造在半导体层中的有源部分，该半导体层可以结合到支撑衬底层。半导体层的有源部分可以包括外延生长层。阵列的像素之间的隔离区可跨越外延层和半导体层。通过键合衬底或活性层的一部分制造与二极管的电接触。制造方法包括形成这种类型的光电二极管阵列的步骤以及将该阵列结合到支撑衬底的步骤。在一些实施例中，支撑衬底暂时结合以支持加工方法。

2. 发明申请

US20090314947A1 Radiation Detector with Isolated Pixels Photosensitive Array for CT and Other Imaging Applications 审中-公开
标题翻译：具有隔离像素的辐射检测器用于CT和其他成像应用的光敏阵列
公开(公告)号：US20090314947A1
公开(公告)日：2009-12-24
申请号：US12475274
申请日：2009-05-29
申请人： Alexander O. Goushcha , Perry A. Denning , Frederick A. Flitsch
发明人： Alexander O. Goushcha , Perry A. Denning , Frederick A. Flitsch
IPC分类号： G01T1/20 , H01L31/14
CPC分类号： G01T1/2018 , H01L27/1463 , H01L27/14634 , H01L27/14659 , H01L27/14663 , H01L2224/16225
摘要： This invention describes an imaging system based on an array of semiconductor photosensitive elements with isolating structure between elements (pixels) of the array. The isolated pixels of the array may be photodiodes and they provide excellent imaging capabilities that are important for many applications. The isolated photosensitive pixels may be comprised also by photoconductors, avalanche photodiodes, photosensitive IC, or other similar solid-state devices. The fields of possible application include but are not limited to the detector modules for homeland security, medical imaging systems (CT, SPECT, and PET including), fundamental and applied research, etc.
摘要翻译：本发明描述了一种基于在阵列的元件（像素）之间具有隔离结构的半导体光敏元件阵列的成像系统。阵列的孤立像素可以是光电二极管，并且它们提供对于许多应用很重要的优异的成像能力。孤立的光敏像素也可以由光电导体，雪崩光电二极管，光敏IC或其它类似的固态器件组成。可能的应用领域包括但不限于国土安全检测模块，医疗成像系统（CT，SPECT和PET），基础和应用研究等。

3. 发明授权

US07576371B1 Structures and methods to improve the crosstalk between adjacent pixels of back-illuminated photodiode arrays 失效
标题翻译：用于改善背照式光电二极管阵列的相邻像素之间的串扰的结构和方法
公开(公告)号：US07576371B1
公开(公告)日：2009-08-18
申请号：US11368041
申请日：2006-03-03
申请人： Alexander O. Goushcha
发明人： Alexander O. Goushcha
IPC分类号： H01L27/14
CPC分类号： H01L27/1463 , H01L27/1464
摘要： Structures and methods to improve the crosstalk between adjacent pixels of back-illuminated photodiode arrays on a substrate having first and second surfaces, including providing a first matrix of regions of a first conductivity type of a higher conductivity than the substrate extending into the substrate from the first surface and surrounding each photodiode of the array, and providing a second matrix of regions of a first conductivity type of a higher conductivity than the substrate extending into the substrate from the second surface, the second matrix being a mirror image of and aligned with the first matrix, the matrices extending into the substrate less than one half the thickness of the substrate so as to not touch each other. The methods and corresponding structures may be applied to p/n diodes, pin diodes, avalanche photodiodes, photoconductive cells (no p-n junction at all), or similar photosensitive device arrays.
摘要翻译：用于改善具有第一和第二表面的衬底上的背照式光电二极管阵列的相邻像素之间的串扰的结构和方法，包括提供第一导电类型的第一导电类型的矩阵，该第一导电类型的区域的导电性比从基板延伸到衬底中的衬底的导电性高第一表面并且围绕阵列的每个光电二极管，并且提供具有比从第二表面延伸到衬底中的衬底更高的导电性的第一导电类型的区域的第二矩阵，第二矩阵是与第第一矩阵，矩阵延伸到衬底中的厚度小于衬底的厚度的一半，以便不彼此接触。方法和相应的结构可以应用于p / n二极管，pin二极管，雪崩光电二极管，光导电池（根本没有p-n结）或类似的光敏器件阵列。

4. 发明授权

US4037973A Light sensitive device for measuring particles in a liquid 失效
标题翻译：用于测量液体中的颗粒的光敏装置
公开(公告)号：US4037973A
公开(公告)日：1977-07-26
申请号：US635279
申请日：1975-11-26
申请人： Larry R. Carr
发明人： Larry R. Carr
IPC分类号： G01N21/85 , G01N21/26
CPC分类号： G01N21/8507
摘要： A device for measuring particles in a liquid, utilizing a light source for the illumination of two detectors, one through a relatively short distance and the other through a relatively long distance, with liquid to be measured passing between the light source and the two detectors. A reference signal produced by the first cell is supplied to an amplifier and indicator, and a measurement signal produced by the second detector is supplied to the amplifier and indicator, with such amplifier and indicator producing a visual indication of the concentration of particles suspended in the liquid. The two detectors and light source are contained in a small housing, remote from the amplifier and indicator, and connected to it by a flexible cable.

5. 发明申请

US20110184678A1 AUTOMATED SYSTEMS AND METHODS FOR CHARACTERIZING LIGHT-EMITTING DEVICES 审中-公开
标题翻译：用于表征发光装置的自动化系统和方法
公开(公告)号：US20110184678A1
公开(公告)日：2011-07-28
申请号：US12874274
申请日：2010-09-02
申请人： RAND W. LEE , MATTHEW G. PIATT , DAVID P. BAJORINS , KRIS YOUNG , CHACE H. FADLOVICH
发明人： RAND W. LEE , MATTHEW G. PIATT , DAVID P. BAJORINS , KRIS YOUNG , CHACE H. FADLOVICH
IPC分类号： G06F19/00 , G01R19/00 , G01R23/00
CPC分类号： G01R31/2635 , G01J3/0208 , G01J3/0251 , G01J3/0286 , G01J3/505
摘要： Automated systems and methods for characterizing light-emitting devices as a function of the electrical and temperature properties of the device are disclosed. The system includes a thermal stack assembly operatively connected to a temperature control system and that operably supports and controls the temperature of the light-emitting device. A power supply provides varying amounts of electrical power to the light-emitting device. A control computer controls the power supply and the temperature control system based on a user-defined electrical and temperature profiles. A light processor optically analyzes light from the light-emitting device as its electrical and temperature properties are varied. The control computer receives and processes electrical signals from the light processor and outputs one or more optical characterizations as a function of electrical and temperature properties of the light-emitting device.
摘要翻译：公开了用于表征作为设备的电气和温度特性的函数的发光器件的自动化系统和方法。该系统包括可操作地连接到温度控制系统并且可操作地支撑和控制发光装置的温度的热堆叠组件。电源为发光装置提供不同数量的电力。控制计算机根据用户定义的电气和温度曲线控制电源和温度控制系统。光处理器光学地分析来自发光器件的光，因为其电和温度特性是变化的。控制计算机接收并处理来自光处理器的电信号，并且输出作为发光装置的电气和温度特性的函数的一个或多个光学表征。

6. 发明授权

US07667400B1 Back-illuminated Si photomultipliers: structure and fabrication methods 失效
标题翻译：背照式Si光电倍增管：结构和制作方法
公开(公告)号：US07667400B1
公开(公告)日：2010-02-23
申请号：US11811121
申请日：2007-06-07
申请人： Alexander O. Goushcha
发明人： Alexander O. Goushcha
IPC分类号： H01J43/04
CPC分类号： H01L31/1075 , H01L27/1446 , H01L27/1464 , H01L31/107
摘要： Back-illuminated silicon photomultipliers having a substrate of a first conductivity type having front and back sides, a matrix of regions of a second conductivity type in the substrate, a matrix of regions of the first conductivity type under the matrix of regions of the second conductivity type and adjacent the back side of the substrate, with the bottom of the matrix of regions of the second conductivity type forming a p/n junction with the substrate or a matrix of regions of the second conductivity type, the matrix of regions of the first conductivity type having a higher conductivity than the substrate, a common anode formed by a uniform layer of the first conductivity type of higher conductivity than the substrate on the back side of the substrate. Preferably a plurality of trenches filed with an opaque material are provided in the back side of the substrate, the substrate preferably having a thickness of less than approximately 150 um.
摘要翻译：具有第一导电类型的衬底的背照式硅光电倍增管具有前侧和后侧，在衬底中具有第二导电类型的区域的矩阵，第二导电类型的第二导电类型的区域的基体的矩阵类型并且邻近衬底的背面，第二导电类型的区域的基体的底部与衬底形成ap / n结或第二导电类型的区域的矩阵，第一导电区域的矩阵具有比衬底更高的导电性的类型的阳极，通过与衬底的背面上的衬底相比具有更高导电性的第一导电类型的均匀层形成的公共阳极。优选地，在衬底的背面设置多个具有不透明材料的沟槽，该衬底优选地具有小于约150μm的厚度。

7. 发明授权

US4080076A Suspended solids analyzer using multiple light sources and photodetectors 失效
标题翻译：使用多个光源和光电探测器的悬浮固体分析仪
公开(公告)号：US4080076A
公开(公告)日：1978-03-21
申请号：US709326
申请日：1976-07-28
申请人： Larry R. Carr
发明人： Larry R. Carr
IPC分类号： G01N21/53 , G01N21/26
CPC分类号： G01N21/534
摘要： A method of analyzing suspended solids, particularly in flowing liquids, in which a plurality of light sources and photodetectors are employed in predetermined arrangement to provide a relatively short light path and a relatively long light path for each photodetector, with the light sources being actuated in predetermined off-on sequence, to provide corresponding periods of illumination from each light source and intermediate periods of no illumination, with the no illumination value representing ambient light, and so combining the respective light values so obtained to provide values representing not only the suspended solid content but also comparison values indicating the presence of failures of the respective light sources and photodetectors, and apparatus for practicing the method.
摘要翻译：一种分析悬浮固体，特别是流动液体的方法，其中以预定布置采用多个光源和光电检测器，以为每个光电检测器提供相对短的光路和相对较长的光路，其中光源被致动从每个光源提供相应的照明周期和不照射的中间周期，而没有照明值表示环境光，因此组合所得到的各个光值以提供不仅表示悬浮固体的值内容，还包括表示相应的光源和光电检测器的故障的存在的比较值，以及用于实施该方法的装置。

8. 发明授权

US3704461A Intrusion detection system responsive to interruption of a transmitted beam 失效
标题翻译：针对发射光束中断的入侵检测系统
公开(公告)号：US3704461A
公开(公告)日：1972-11-28
申请号：US3704461D
申请日：1970-03-25
申请人： OPTRONIX INC
发明人： ROSE EDWARD A , KROHN RICHARD H , SLATER DONALD E
IPC分类号： G08B13/183 , G08B13/18
CPC分类号： G08B13/183
摘要： An infrared intruder detection system operable under severe weather conditions including fog, rain and snow over great distances exceeding 500 feet in the severest weather comprises a pulsed infrared transmitter and a self-contained spaced apart self-synchronized infrared receiver. Upon interruption of the transmitted beam for a predetermined period, the receiver generates an alarm in response to the remaining ever present signals due to ambient light and thermal instrument noise. When the beam is not interrupted, a local synchronous oscillator will track the incoming signal pulses. In the presence of an intruder, the pulsed beam is no longer received and the oscillator is unable to track the resulting amplified noise signal which arises from ambient light and thermal instrument noise. This results in the generation of an error signal at the output of the demodulator to which the oscillator is coupled. By the inclusion of appropriate bandpass amplifiers, filters and integrating circuits set to respond to predetermined thresholds coupled to the output of the demodulator, the receiver is able to discriminate between an intruder and such momentary interrupts as are caused by birds, falling leaves and blowing bits of paper which otherwise might cause false alarms.
摘要翻译：在恶劣天气条件下可操作的红外入侵者检测系统，包括在最恶劣天气下超过500英尺的雾，雨和雪超过500英尺的红外入侵者检测系统包括脉冲红外发射器和独立的间隔开的自同步红外接收器。在发射光束中断预定时间段之后，由于环境光和热仪器噪声，接收器响应于剩余的现有信号产生报警。当光束不中断时，本地同步振荡器将跟踪输入信号脉冲。在入侵者存在的情况下，不再接收脉冲波束，并且振荡器不能跟踪由环境光和热量仪器噪声引起的所产生的放大噪声信号。这导致在振荡器耦合到的解调器的输出处产生误差信号。通过包括适当的带通放大器，滤波器和集成电路设置为响应于耦合到解调器的输出的预定阈值，接收器能够区分入侵者和诸如由鸟，落叶和吹风位造成的瞬时中断否则可能会导致虚警。

9. 发明授权

US08101981B2 Back-illuminated, thin photodiode arrays with isolating etched trenches between elements 失效
标题翻译：背光照明的薄光电二极管阵列，在元件之间具有隔离的蚀刻沟槽
公开(公告)号：US08101981B2
公开(公告)日：2012-01-24
申请号：US12188829
申请日：2008-08-08
申请人： Alexander O. Goushcha , George Papadopoulos , Perry A. Denning
发明人： Alexander O. Goushcha , George Papadopoulos , Perry A. Denning
IPC分类号： H01L31/062
CPC分类号： H01L27/1446 , H01L27/1443 , H01L27/1463 , H01L27/1464 , H01L27/14689
摘要： Back-illuminated, thin photodiode arrays with trench isolation. The trenches are formed on one or both sides of a substrate, and after doping the sides of the trenches, are filled to provide electrical isolation between adjacent photodiodes. Various embodiments of the photodiode arrays and methods of forming such arrays are disclosed.
摘要翻译：背光照明，具有沟槽隔离的薄型光电二极管阵列。沟槽形成在衬底的一侧或两侧，并且在掺杂沟槽的侧面之后，填充沟槽以在相邻的光电二极管之间提供电隔离。公开了光电二极管阵列的各种实施例和形成这种阵列的方法。

10. 发明授权

US07875890B1 Structures and methods to improve the crosstalk between adjacent pixels of back-illuminated photodiode arrays 失效
标题翻译：用于改善背照式光电二极管阵列的相邻像素之间的串扰的结构和方法
公开(公告)号：US07875890B1
公开(公告)日：2011-01-25
申请号：US12541747
申请日：2009-08-14
申请人： Alexander O. Goushcha
发明人： Alexander O. Goushcha
IPC分类号： H01L31/068
CPC分类号： H01L27/1463 , H01L27/1464
摘要： Structures and methods to improve the crosstalk between adjacent pixels of back-illuminated photodiode arrays on a substrate having first and second surfaces, including providing a first matrix of regions of a first conductivity type of a higher conductivity than the substrate extending into the substrate from the first surface and surrounding each photodiode of the array, and providing a second matrix of regions of a first conductivity type of a higher conductivity than the substrate extending into the substrate from the second surface, the second matrix being a mirror image of and aligned with the first matrix, the matrices extending into the substrate less than one half the thickness of the substrate so as to not touch each other. The methods and corresponding structures may be applied to p/n diodes, pin diodes, avalanche photodiodes, photoconductive cells (no p-n junction at all), or similar photosensitive device arrays.
摘要翻译：用于改善具有第一和第二表面的衬底上的背照式光电二极管阵列的相邻像素之间的串扰的结构和方法，包括提供第一导电类型的第一导电类型的矩阵，该第一导电类型的区域的导电性比从基板延伸到衬底中的衬底的导电性高第一表面并且围绕阵列的每个光电二极管，并且提供具有比从第二表面延伸到衬底中的衬底更高的导电性的第一导电类型的区域的第二矩阵，第二矩阵是与第第一矩阵，矩阵延伸到衬底中的厚度小于衬底的厚度的一半，以便不彼此接触。方法和相应的结构可以应用于p / n二极管，pin二极管，雪崩光电二极管，光导电池（根本没有p-n结）或类似的光敏器件阵列。

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