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1. 发明申请

US20110240107A1 LARGE-AREA THIN-FILM-SILICON PHOTOVOLTAIC MODULES 审中-公开
标题翻译：大面积薄膜光伏模块
公开(公告)号：US20110240107A1
公开(公告)日：2011-10-06
申请号：US13079072
申请日：2011-04-04
申请人： Johannes Meier , Stefano Benagli , Julien Bailat , Daniel Borrello , Jerome Steinhauser , Jochen Hötzel , Lucie Castens , Jean-Baptiste Orhan , Yassine Djeridane , Evelyne Vallat-Sauvain , Ulrich Kroll
发明人： Johannes Meier , Stefano Benagli , Julien Bailat , Daniel Borrello , Jerome Steinhauser , Jochen Hötzel , Lucie Castens , Jean-Baptiste Orhan , Yassine Djeridane , Evelyne Vallat-Sauvain , Ulrich Kroll
IPC分类号： H01L31/06
CPC分类号： H01L31/076 , H01L31/022483 , H01L31/056 , Y02E10/52 , Y02E10/548
摘要： Micromorph tandem cells with stabilized efficiencies of 11.0% have been achieved on as-grown LPCVD ZnO front TCO at bottom cell thickness of just 1.3 μm in combination with an antireflection concept. Applying an advanced LPCVD ZnO front TCO stabilized tandem cells of 10.6% have been realized at a bottom cell thickness of only 0.8 μm. Implementing intermediate reflectors in Micromorph tandem cell devices allow for, compared to commercial SnO2, reduced optical losses when LPCVD ZnO is used. At present highest stabilized cell efficiency reached 11.3% incorporating an in-situ intermediate reflector with a bottom cell thickness of 1.6 μm.
摘要翻译：结合抗反射概念，在底部单元厚度为1.3μm的生长LPCVD ZnO前端TCO上实现了具有11.0％稳定效率的微米级串联电池。采用先进的LPCVD ZnO前TCO稳定的10.6％的串联电池已经实现在仅0.8μm的底部电池厚度。与商业SnO2相比，在Micromorph串联电池器件中实现中间反射器允许当使用LPCVD ZnO时减少光损耗。目前，最高稳定的电池效率达到11.3％，并结合了底部电池厚度为1.6μm的原位中间反射器。

2. 发明授权

US08056504B2 Voltage non-uniformity compensation method for high frequency plasma reactor for the treatment of rectangular large area substrates 有权
标题翻译：用于处理矩形大面积衬底的高频等离子体反应器的电压不均匀补偿方法
公开(公告)号：US08056504B2
公开(公告)日：2011-11-15
申请号：US12708757
申请日：2010-02-19
申请人： Jacques Schmitt , Laurent Sansonnens , Mustapha Elyaakoubi , Michael Irzyk
发明人： Jacques Schmitt , Laurent Sansonnens , Mustapha Elyaakoubi , Michael Irzyk
IPC分类号： H01L21/00 , C23C16/00
CPC分类号： H01J37/32009 , H01J37/32091 , H01J37/32541
摘要： A vacuum vessel and at least two electrodes define an internal process space. At least one power supply is connectable with the electrodes. A substrate holder holds a substrate to be treated in the internal process space. At least one of the electrodes has along a first cross section a concave profile and has along a second cross section a convex profile, the first cross section being parallel to the second cross section. Gas is provided to the space through a gas inlet. Power is provided to the electrodes and the substrate is treated.
摘要翻译：真空容器和至少两个电极限定内部工艺空间。至少一个电源可以与电极连接。基板保持器将待处理的基板保持在内部处理空间中。电极中的至少一个沿着第一横截面具有凹形轮廓，并且沿着第二横截面具有凸形轮廓，第一横截面与第二横截面平行。气体通过气体入口提供给空间。电源被提供给电极并且处理基板。

3. 发明申请

US20110203610A1 REMOTE PLASMA CLEANING METHOD AND APPARATUS FOR APPLYING SAID METHOD 审中-公开
标题翻译：远程等离子体清洗方法和应用方法的装置
公开(公告)号：US20110203610A1
公开(公告)日：2011-08-25
申请号：US13002572
申请日：2009-07-07
申请人： Felix-George Leu , Christoph Ellert , Gerold Buchel , Javier Martin
发明人： Felix-George Leu , Christoph Ellert , Gerold Buchel , Javier Martin
IPC分类号： B08B7/00
CPC分类号： C23C16/4405 , H01J37/32357 , H01J37/32862 , H01J2237/335
摘要： A vacuum processing system with a vacuum chamber has an inlet, at least first and second outlets, exhaust means at a first of said outlets and a remote plasma source RPS, wherein the RPS is attached to a connecting point to the second of said outlets. In a method for remote plasma cleaning of a vacuum processing system with such an arrangement a flow of radicals is generated by said remote plasma source and directed to the first of said outlets whilst operating exhaust means via the second of said outlets.
摘要翻译：具有真空室的真空处理系统具有入口，至少第一和第二出口，位于所述出口中的第一个处的排气装置和远程等离子体源RPS，其中所述RPS附接到与所述第二出口的连接点。在具有这种布置的真空处理系统的远程等离子体清洁的方法中，所述远程等离子体源产生自由基流并被引导到所述第一个出口，同时经由第二所述出口操作排气装置。

4. 发明申请

US20110104399A1 METHOD OF REMOVING CONTAMINATION FROM A REACTOR 失效
标题翻译：从反应器中去除污染的方法
公开(公告)号：US20110104399A1
公开(公告)日：2011-05-05
申请号：US12917588
申请日：2010-11-02
申请人： Paolo Losio , Oliver Kluth , Jiri Kalas
发明人： Paolo Losio , Oliver Kluth , Jiri Kalas
IPC分类号： C23C16/50 , B08B9/00
CPC分类号： C23C14/564 , B08B7/0035 , C23C16/4405
摘要： The present invention provides a method for removing metal and/or metal oxide contamination from the interior of a vacuum coating reactor, the method comprising the steps of: a) performing an idle coating step by depositing a coating layer, wherein the coating layer comprises silicon; b) at least partly removing the deposited coating layer. The method according to the invention is particularly suitable for cleaning reactors in the context of solar cell manufacturing. The method is time saving and cost saving.
摘要翻译：本发明提供一种从真空涂覆反应器内部除去金属和/或金属氧化物污染物的方法，该方法包括以下步骤：a）通过沉积涂层进行怠速涂覆步骤，其中涂层包含硅 ; b）至少部分地去除沉积的涂层。根据本发明的方法特别适用于在太阳能电池制造的背景下的清洗反应器。该方法节省时间，节省成本。

5. 发明授权

US07897966B2 Method for manufacturing flat substrates 失效
标题翻译：平面基板的制造方法
公开(公告)号：US07897966B2
公开(公告)日：2011-03-01
申请号：US12372813
申请日：2009-02-18
申请人： Hai Tran Quoc , Jerome Villette
发明人： Hai Tran Quoc , Jerome Villette
IPC分类号： H01L29/10
CPC分类号： C23C16/0272 , C03C17/3447 , C03C17/3482 , C23C16/24 , C23C16/4404 , C23C16/4405 , C23C16/5096 , C23C16/56 , H01L21/02422 , H01L21/02488 , H01L21/02532 , H01L21/0262 , H01L27/1214 , H01L29/66765 , H01L31/1824 , Y02E10/545 , Y02P70/521 , Y10T428/1014
摘要： For avoiding the metallic inner surface of a PECVD reactor to influence thickness uniformity and quality uniformity of a μc-Si layer (19) deposited on a large-surface substrate, (15) before each substrate is single treated at least parts of the addressed wall are precoated with a dielectric layer (13).
摘要翻译：为了避免PECVD反应器的金属内表面影响沉积在大表面衬底上的μc-Si层（19）的厚度均匀性和质量均匀性，（15）在每个衬底被单独处理至少部分被寻址的壁之前被预涂覆有介电层（13）。

6. 发明申请

US20130340817A1 THIN FILM SILICON SOLAR CELL IN TANDEM JUNCTION CONFIGURATION ON TEXTURED GLASS 审中-公开
标题翻译：薄膜玻璃上的薄膜结构中的薄膜硅太阳能电池
公开(公告)号：US20130340817A1
公开(公告)日：2013-12-26
申请号：US13819045
申请日：2011-09-01
申请人： Julien Bailat , Karl William Koch, III , Glenn Eric Kohnke , Sasha Marjanovic , Johannes Meier
发明人： Julien Bailat , Karl William Koch, III , Glenn Eric Kohnke , Sasha Marjanovic , Johannes Meier
IPC分类号： H01L31/0236 , H01L31/076
CPC分类号： H01L31/0236 , H01L31/022466 , H01L31/022483 , H01L31/02366 , H01L31/03921 , H01L31/076 , Y02E10/50
摘要： Solar cells or solar modules of the so-called tandem type, i.e. stacked arrangements of photovoltaic absorber devices on a substrate with a textured surface are described. The thin film solar cell has a substrate comprising a textured surface, and a front electrode layer comprising a transparent conductive oxide adjacent to the textured surface, wherein the electrode layer has a thickness less than the roughness of the textured surface.
摘要翻译：描述了所谓的串联式太阳能电池或太阳能模块，即具有纹理表面的基板上的光电吸收器件的堆叠布置。所述薄膜太阳能电池具有包含织构化表面的基板和包括与所述纹理表面相邻的透明导电氧化物的前电极层，其中所述电极层的厚度小于所述纹理表面的粗糙度。

7. 发明授权

US08409991B2 Method for manufacturing large-area vacuum plasma treated substrates and vacuum plasma treatment apparatus 有权
标题翻译：制造大面积真空等离子体处理基板和真空等离子体处理装置的方法
公开(公告)号：US08409991B2
公开(公告)日：2013-04-02
申请号：US12808192
申请日：2008-12-19
申请人： Stephan Jost , Andreas Belinger
发明人： Stephan Jost , Andreas Belinger
IPC分类号： H01L21/302 , H01L21/461
CPC分类号： H01J37/32541 , H01J37/32082 , H01J37/32091
摘要： A large surface substrate (5, 5a) is Rf vacuum plasma treated with the help of an electrode arrangement (9) consisting of an even number of electrode strips (9a, 9b). At least one of the strips is Rf supplied at least two distinct loci (P1, P2) along the central axis (A) of the addressed strip (9a).
摘要翻译：借助于由偶数个电极条（9a，9b）组成的电极装置（9），大面积的基片（5,5a）是Rf真空等离子体处理的。条带中的至少一个沿着所寻址的条带（9a）的中心轴线（A）提供至少两个不同的轨迹（P1，P2）。

8. 发明授权

US08299396B2 Method for laser scribing of solar panels 失效
标题翻译：太阳能电池板激光划片方法
公开(公告)号：US08299396B2
公开(公告)日：2012-10-30
申请号：US12059305
申请日：2008-03-31
申请人： Philipp Grunewald , Phil Rumsby
发明人： Philipp Grunewald , Phil Rumsby
IPC分类号： B23K26/36
CPC分类号： B23K26/16 , B23K26/0823 , B23K26/0853 , B23K26/351 , B23K26/40 , B23K2101/36 , B23K2103/50 , H01L31/186 , H01L31/208 , Y02E10/50 , Y02P70/521
摘要： A method and device for ablation of thin layers on the rim region of the surface of a plane substrate coated with a thin film. The rim region runs along the edge or edges of the substrate, and the thin layers should be ablated in at least two, not necessarily unconnected areas of the rim region along edge pieces not parallel to one another. A laser beam is pointed toward an ablation area. The areas of the rim region to be ablated are guided through the area so that in a plane of the surface of the substrate, during the whole ablation process, there is basically a constant distance in the space that lies partly in the ablation area and has its starting point outside the substrate surface and its end point within the substrate surface.
摘要翻译：一种用于在涂覆有薄膜的平面基板的表面的边缘区域上消融薄层的方法和装置。边缘区域沿着基底的边缘或边缘延伸，并且薄层应当沿着彼此不平行的边缘片段在边缘区域的至少两个，但不一定是未连接的区域中被消融。激光束指向消融区域。要消除的边缘区域的区域被引导穿过该区域，使得在基板表面的平面中，在整个烧蚀过程中，在空间中基本上具有恒定的距离，部分位于消融区域中，并且具有其起始点在基板表面之外，其端点在基板表面内。

9. 发明申请

US20110252969A1 HOT-TRAP ASSEMBLY FOR TRAPPING UNREACTED GAS BY- PRODUCTS 失效
标题翻译：用于跟踪无关气体副产品的热带组件
公开(公告)号：US20110252969A1
公开(公告)日：2011-10-20
申请号：US13059855
申请日：2009-06-15
申请人： Tobias Fischer , Stefan Schneider , Hagen Gottlich , Kavreet Bhangu , Benjamin Vogler , Christoph Widmeier , Arno Zindel
发明人： Tobias Fischer , Stefan Schneider , Hagen Gottlich , Kavreet Bhangu , Benjamin Vogler , Christoph Widmeier , Arno Zindel
IPC分类号： B01D45/08 , C23C16/00
CPC分类号： C23C16/4412
摘要： The present invention provides a hot-trap device (1) comprising an enclosure (2) with at least one inlet (3), at least one outlet (5) at least one heating means (7) and at least one collector means (10) for the conversion of reaction by-products into products, wherein the collector means is arranged within the enclosure between the inlet and the outlet has a diameter that substantially matches the diameter of the enclosure and has at least one opening (18).
摘要翻译：本发明提供一种热阱装置（1），其包括具有至少一个入口（3），至少一个出口（5）至少一个加热装置（7）和至少一个收集器装置（10）的外壳（2）），用于将反应副产物转化成产物，其中收集器装置布置在入口和出口之间的外壳内，其直径基本上与外壳的直径相匹配并具有至少一个开口（18）。

10. 发明申请

US20110089960A1 MEASUREMENT SYSTEM 失效
标题翻译：测量系统
公开(公告)号：US20110089960A1
公开(公告)日：2011-04-21
申请号：US12874247
申请日：2010-09-02
申请人： Marco Apolloni , Jean Randhahn
发明人： Marco Apolloni , Jean Randhahn
IPC分类号： G01R31/26
CPC分类号： F21S8/006 , H02S50/10
摘要： The invention discloses a contacting device for a thin film solar cell, comprising a positioning plane for positioning the solar cell thereon, a contact element for electrically contacting the solar cell and a suction element, wherein the solar cell is arrangeable on the top side of the positioning plane, the contact element is arranged slideably in a direction orthogonal to the positioning plane and arranged slideably through an opening of the positioning plane, and the suction element is arranged on the bottom side of the positioning plane for sucking air through the opening. The contacting device allows for obtaining improved measurement accuracy.
摘要翻译：本发明公开了一种用于薄膜太阳能电池的接触装置，包括用于将太阳能电池放置在其上的定位平面，用于电接触太阳能电池的接触元件和吸入元件，其中太阳能电池可布置在定位平面，接触元件在与定位平面正交的方向上可滑动地布置，并且可滑动地布置在定位平面的开口上，并且吸引元件布置在定位平面的底侧，用于通过开口吸入空气。接触装置允许获得改进的测量精度。

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